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CAS IR Grid
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长春光学精密机械与物... [4]
近代物理研究所 [1]
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Simulation of the surface cracking behavior in Al2O3 coating as tritium penetration barrier by extended finite element analysis
期刊论文
OAI收割
FUSION ENGINEERING AND DESIGN, 2021, 卷号: 173, 页码: 8
作者:
Liu, Ze
;
Bai, Xue
;
Sun, Sen
;
Zhang, Yafei
;
Lin, Mu
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收藏
  |  
浏览/下载:42/0
  |  
提交时间:2021/12/08
Roughness of the substrate
Surface crack
Strain energy release rate
Surface modification of SiC mirror by IARE method (EI CONFERENCE)
会议论文
OAI收割
7th International Conference on Thin Film Physics and Applications, September 24, 2010 - September 27, 2010, Shanghai, China
作者:
Gao J.
收藏
  |  
浏览/下载:27/0
  |  
提交时间:2013/03/25
A method to prepare high quality SiC coating at low temperature using large aperture E-beam evaporation PVD equipment with ion assistance was developed for the surface modification of SiC mirror for space projects. This method was called Ion Assisted Reactive Evaporation (IARE). The modified SiC coating was prepared using CH4 and Si with Kaufman ion source by IARE at 300C and it had met the requirements of applications. The SiC coating prepared by this method was amorphous. It was dense
homogeneous and easy to be polished. The surface modification of a SiC mirror was carried out using SiC coating by this method and achieved a fine surface modification effect. The surface roughness (rms) of the SiC substrate was reduced to 0.862nm
the scattering coefficient was reduced to 2.79% and the reflectance coated with Ag film was improved simultaneously after the surface modification. The effect of surface modification using SiC coating was close to that of using Si coating. It can be drawn that this technological method to preparation SiC coating for the surface modification of SiC mirror is reasonable and effective. 2011 SPIE.
IAD-Si coatings on RB-SiC space mirrors for ultra-smooth surfaces (EI CONFERENCE)
会议论文
OAI收割
4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, November 19, 2008 - November 21, 2008, Chengdu, China
作者:
Xu L.
;
Wang X.
;
Wang X.
;
Wang X.
;
Zhang F.
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  |  
浏览/下载:26/0
  |  
提交时间:2013/03/25
To eliminate surface limitation caused by Silicon impurity in RB-SiC space mirrors
a relatively thick Si film is deposited on well finished RB-SiC substrate by a new process-ion assisted depositing (IAD) to provide a better polishable surface. Testing results of IAD-Si properties are provided
showing that the amorphous film has great thermal shock resistance. Then
polishing experiments on 100.5m thick IAD-Si layers are accomplished focusing on smoother surface. Surface figure and micro-roughness of the coating after polished reach 0.026 RMS (=0.6328nm) and less than 0.5nm RMS respectively. Moreover
reflectivity of IAD-Si polished surface with reflective films increases higher than 4.5% than that of RB-SiC in 360-1100nm. High reflectivity and desirable thermal property make IAD-Si an attractive coating material for RB-SiC space mirrors. 2009 SPIE.
Fabrication technique of large-scale lightweight SiC space mirror (EI CONFERENCE)
会议论文
OAI收割
3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies, AOMATT 2007: Large Mirrors and Telescopes, July 8, 2007 - July 12, 2007, Chengdu, China
作者:
Zhang G.
;
Zhang G.
;
Zhang G.
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  |  
浏览/下载:21/0
  |  
提交时间:2013/03/25
Silicon carbide (SiC) is a new type candidate material for large-scale lightweight space mirror. Its low thermal distortion
high stiffness
high optical quality
and its dimensional stability are better than other traditional optical substrate materials such as ULE
Zerodure
Beryllium (Be) and so on. In this paper
the lightweight silicon carbide space mirror blank was fabricated by reaction sintering. As a space born mirror material
silicon carbide must be an optical grade ceramic. So we prepared the silicon carbide green body with gel-casting method. Then some carbon materials were supplemented into the green body which will bring reaction-sintering with silicon in a vacuum furnace during 1500-1600C
ultimately the reaction bonded silicon carbide was made. The diameter of SiC space mirror blank we have made is 680mm. If expanding the size of the vacuum furnace
bigger mirror blank can be obtained. The test results show that the mechanical and thermal properties of RB-SiC are excellent with bending strength of 350MPa
fracture toughness of 4.1 MPa·m1/2 and coefficient of thermal expansion(CET) of 2.6710-6/K. The surface roughness(RMS) could be better than 3nm.
Application of photoresist melting method to the fabrication of holographic grating (EI CONFERENCE)
会议论文
OAI收割
ICO20: Optical Devices and Instruments, August 21, 2005 - August 26, 2005, Changchun, China
作者:
Li W.
;
Tang Y.
;
Yu H.
;
Gao J.
;
Li W.
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  |  
浏览/下载:63/0
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提交时间:2013/03/25
A new technique of reducing surface roughness of photoresist grating is presented. In this paper
photoresist melting method
which is low-cost
short-period and easy realization
is presented. In addition
the influence of photoresist melting on the groove profile of the photoresist grating is investigated. Experimental results show that the surface roughness reduces due to surface tension
when developed photoresist is heated to be melting state by this method. In experiment
when the melted photoresist grating is etched by ion beam
the surface relief grating possessing preferable groove profile is obtained on K9 glass substrate
then the surface is evaporated by aluminum using vacuum evaporation
holographic grating with preferable groove profile is successively fabricated.