中国科学院机构知识库网格系统: 检索

浏览/检索结果: 共4条，第1-4条

帮助

条数/页：排序方式：
	Roughness analysis of optical surfaces by X-ray scattering (EI CONFERENCE) 会议论文 OAI收割 2011 International Conference on Electronics and Optoelectronics, ICEOE 2011, July 29, 2011 - July 31, 2011, Dalian, China 作者: Chen B.; Chen B. 收藏 \| 浏览/下载：29/0 \| 提交时间：2013/03/25 A grazing incidence x-ray scattering (XRS) method Order perturbation theory (FOPT) is stated briefly and an experimental facility based on an improved X-ray diffraction has been introduced which can work with high performance. The x-ray scattering distributions of two super smooth silicon samples measured at the incidence angle 0.2 degree as the x-ray wavelength is 0.154 nm have been given and analyzed by the FOPT to give information about the surface profiles. As a comparison the root mean square (RMS) surface roughness grey-scale maps and one-dimensional power spectral density (1D PSD) have been derived from the atomic-force microscope (AFM) data. The results evaluated by FOPT are in good agreement with that of AFM which indicates that x-ray scattering method is a practical characterization for the investigation of super smooth surfaces. 2011 IEEE.
	Assessment of surface roughness by use of soft x-ray scattering (EI CONFERENCE) 会议论文 OAI收割 Soft X-Ray Lasers and Applications VIII, August 4, 2009 - August 6, 2009, San Diego, CA, United states Yan-li M.; Yong-gang W.; Shu-yan C.; Bo C. 收藏 \| 浏览/下载：37/0 \| 提交时间：2013/03/25 A soft x-ray reflectometer with laser produced plasma source has been designed which can work from wavelength 8nm to 30 nm and has high performance. Using the soft x-ray reflectometer above the scattering light distribution of silicon and zerodur mirrors which have super-smooth surfaces could be measured at different incidence angle and different wavelength. The measurement when the incidence angle is 2 degree and the wavelength is 1 lnm has been given in this paper. A surface scattering theory of soft x-ray grazing incidence optics based on linear system theory and an inverse scattering mathematical model is introduced. The vector scattering theory of soft x-ray scattering also is stated in detail. The scattering data are analyzed by both the methods above respectively to give information about the surface profiles. On the other hand both the two samples are measured by WYKO surface profiler and the surface roughness of the silicon and zerodur mirror is 1.3 nm and 1.5nm respectively. The calculated results are in quantitative agreement with those measured by WYKO surface profiler which indicates that soft x-ray scattering is a very useful tool for the evaluation of highly polished surfaces. But there still some difference among the results of different theory and WYKO and the possible reasons of such difference have been discussed in detail. 2009 SPIE.
	化学抛光和退火对钛酸锶基片表面改性研究期刊论文 OAI收割人工晶体学报, 2008, 卷号: 37, 期号: 5, 页码: 1107, 1112 陈光珠; 杭寅; 汪隽等收藏 \| 浏览/下载：1119/122 \| 提交时间：2009/09/24 Atomic forces Crystal qualities Mechanical methods Rocking curves SrTiO3 Super-smooth surface
	Developing of in-suit long trance profiler for testing slope error of aspherical optical Elements (EI CONFERENCE) 会议论文 OAI收割 ICO20: Optical Devices and Instruments, August 21, 2005 - August 26, 2005, Changchun, China Zhou C.; Li H.; Chen C.; Zhou C.; Qian S. 收藏 \| 浏览/下载：41/0 \| 提交时间：2013/03/25 Profile error of super smooth surface of optical elements at X-ray/EUV in synchrotron radiation (SR) light beam line is described as slope error of them generally. The Long Trace Profiler (LPT) is used for testing surface slope error of SR optical elements in world generally. It is requisite to use In-suit LTP measuring surface thermal distortion of SR optical elements with high heat under high bright SR source. Authors design an In-suit LTP by means of co-path interferometer with pencil light beam. The instrument not only can be used for testing slope error of mirrors in Lab. also in situation test the distortion of mirror with high heat load at synchrotron light beam line. The device can be used to test various absolute surface figures of optical elements such as aspherieal spherical and plane. It is needless standard reference surface. It is named by LTP-III. This paper describes its basic operating principle optical system mechanical constructions DC serve motor control system array detector data acquisition system and computer system for controlling and data analysis of LTP-III. The Instrument has advantages of high accuracy low cost multifunction and wide application. Length of surface measured of optical element accuracy is 0.04 arcsec.