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CAS IR Grid
机构
物理研究所 [1]
长春光学精密机械与物... [1]
上海应用物理研究所 [1]
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期刊论文 [2]
会议论文 [1]
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2017 [1]
2007 [1]
2005 [1]
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Nanofabrication and characterization of a grating-based condenser for uniform illumination with hard X-rays
期刊论文
OAI收割
JOURNAL OF SYNCHROTRON RADIATION, 2017, 卷号: 24, 页码: 595-599
作者:
Liu, JP
;
Li, X
;
Chen, S
;
Zhang, SC
;
Xie, SS
  |  
收藏
  |  
浏览/下载:23/0
  |  
提交时间:2017/12/08
Condenser
Uniform Illumination
Gratings
Nanofabrication
Hard X-ray Optics
Key techniques of laser direct writing patterns on spherical substrate (EI CONFERENCE)
会议论文
OAI收割
3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies, AOMATT 2007: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, July 8, 2007 - July 12, 2007, Chengdu, China
作者:
Zhao J.-L.
;
Feng X.-G.
收藏
  |  
浏览/下载:23/0
  |  
提交时间:2013/03/25
Comparing with the writing method of plane pattern
spherical pattern' has some remarkable different on several points. Firstly
it is difficult to spin-coated a uniform photoresist film on a spherical substrate
especially the ratio of spherical radius to caliber is smaller
and the spin-coated way must match the ratio of spherical radius to caliber. Secondly
if the sphere couldn't be regarded as a plane
a so-called concentric optical scan movement way must be applied for the generation of spherical pattern
because the reflex of substrate will affect the quantity of illumination. Commonly
an alignment technique is indispensable with pattern generation of spherical surface by the concentric optical scan in order to ensure the orthogonal intersection of focusing laser beam and writing surface. Thirdly
a uniform velocity control must be considered for the laser direct writing method on a spherical substrate. Otherwise
the exposure time of photoresist will be different
and the line widths of pattern will be also different at different areas. Fourthly
commonly
because the errors of concentric machine and substrate surface shape are bigger
so focusing servo-control technique is also needful for writing a pattern on a spherical substrate. Focusing servo-control may keep the focal spot on the spherical surface by a focus detection and control system in the course of writing pattern. Using these techniques
we fabricated a line width of 7m and a period of 600m isometric mesh on the concave of a spherical substrate.
Two-fluid computations of plasma block dynamics for numerical analyze of rippling effect
期刊论文
OAI收割
LASER AND PARTICLE BEAMS, 2005, 卷号: 23, 期号: 4, 页码: 433
Jablonski, S
;
Hora, H
;
Glowacz, S
;
Badziak, J
;
Cang, Y
;
Osman, F
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  |  
浏览/下载:21/0
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提交时间:2013/09/23
INERTIAL FUSION ENERGY
UNIFORM ILLUMINATION
FAST IGNITION
LASER-BEAMS
ACCELERATION
ION
CONFINEMENT
SUPPRESSION
TARGETS