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	High Precision Fabrication Method of Fresnel Diffractive Lenses on Ultrathin Membrane for Imaging Application 期刊论文 OAI收割 IEEE Photonics Journal, 2020, 卷号: 12, 期号: 4, 页码: 2400310-1-10 作者: Liu, Xin; Gong, Changchang; Fan, Bin; Bian, Jiang \| 收藏 \| 浏览/下载：52/0 \| 提交时间：2021/05/11 Flexible Membrane Diffractive Optical Elements Polyimide Contact Lithography Microstructure Morphology Error Wave-front Error
	Computation of misalignment and primary mirror astigmatism figure error of two-mirror telescopes 期刊论文 OAI收割 Journal of Astronomical Telescopes Instruments and Systems, 2018, 卷号: 4, 期号: 1, 页码: 10 作者: Gu, Z. Y. \| 收藏 \| 浏览/下载：146/0 \| 提交时间：2019/09/17 active optics alignment misalignments astigmatic figure error nodal aberration theory two-mirror telescope 5th-order optical aberrations rotational symmetry wave-front systems collimation Engineering Instruments & Instrumentation Optics
	Error analysis for the Fourier domain offset estimation algorithm 期刊论文 OAI收割 OPTICS COMMUNICATIONS, 2016, 卷号: 361, 页码: 110-115 作者: Wei, Ling; He, Jieling; He, Yi; Yang, Jinsheng; Li, Xiqi 收藏 \| 浏览/下载：15/0 \| 提交时间：2016/06/27 Error analysis Offset estimation Shack-Hartmann wave-front sensor
	The detection error analysis of Hartmann-Shack wavefront sensor based on electron multiplying charge-coupled devices 期刊论文 OAI收割 ACTA PHYSICA SINICA, 2010, 卷号: 59, 期号: 8, 页码: 5904-5913 作者: Zhang Yan-Yan; Rao Chang-Hui; Li Mei; Ma Xiao-Yu 收藏 \| 浏览/下载：26/0 \| 提交时间：2015/09/21 adaptive optics electron multiplying charge-coupled devices wave-front sensor centroid detecting error
	Research on automatic Hartmann test of membrane mirror (EI CONFERENCE) 会议论文 OAI收割 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, April 26, 2010 - April 29, 2010, Dalian, China 作者: Zhang P. 收藏 \| 浏览/下载：29/0 \| 提交时间：2013/03/25 Electrostatic membrane mirror is ultra-lightweight and easy to acquire a large diameter comparing with traditional optical elements so its development and usage is the trend of future large mirrors. In order to research the control method of the static stretching membrane mirror the surface configuration must be tested. However membrane mirror's shape is always changed by variable voltages on the electrodes and the optical properties of membrane materials using in our experiment are poor so it is difficult to test membrane mirror by interferometer and null compensator method. To solve this problem an automatic optical test procedure for membrane mirror is designed based on Hartmann screen method. The optical path includes point light source CCD camera splitter and diffuse transmittance screen. The spots' positions on the diffuse transmittance screen are pictured by CCD camera connected with computer and image segmentation and centroid solving is auto processed. The CCD camera's lens distortion is measured and fixing coefficients are given to eliminate the spots' positions recording error caused by lens distortion. To process the low sampling Hartmann test results Zernike polynomial fitting method is applied to smooth the wave front. So low frequency error of the membrane mirror can be measured then. Errors affecting the test accuracy are also analyzed in this paper. The method proposed in this paper provides a reference for surface shape detection in membrane mirror research. 2010 Copyright SPIE - The International Society for Optical Engineering.
	Design and tolerance analysis of compensator for high order aspheric surface testing (EI CONFERENCE) 会议论文 OAI收割 2009 International Conference on Optical Instruments and Technology - Optoelectronic Measurement Technology and Systems, October 19, 2009 - October 22, 2009, Shanghai, China 作者: Chen X.; Liu W.; Chen X.; Chen X. 收藏 \| 浏览/下载：27/0 \| 提交时间：2013/03/25 High accuracy is required in surface testing of 90nm nodal point lithography projecting lens. By comparing various aspheric surface testing methods the structure layout of the compensator is a meniscus positive lens combined with a Plano-convex positive lens. The design results indicate that: primary and high order aberrations are balanced well we adopt Offner null compensator to test the aspheric surface in the point diffraction interferometer at last. In this paper MTF exceeds diffraction limit an Offner compensator is presented on the base of the third order aberration theory to test concave aspheric surface root-mean-square (RMS) of wave front error /167. The F-number of the system can achieve F/1.64. By the analysis of the process of aspheric surface testing with the designed system the optical construction parameters of which is determined by introducing equal-quantities spherical aberration to compensate all orders of aspheric coefficients. The field of view of the system is 0.02 a loosen distribution of the tolerance was presented based on the accuracy of measuring apparatus. 2009 SPIE.
	Based on Householder transform of the Zernike polynomial wave front fitting method to solve active optics correction force (EI CONFERENCE) 会议论文 OAI收割 Infrared Materials, Devices, and Applications, November 12, 2007 - November 15, 2007, Beijing, China 作者: Wu X.-X. 收藏 \| 浏览/下载：26/0 \| 提交时间：2013/03/25 Corrective force solving is a critical technology of the active optics. A method to solve active optics corrective force is introduced which is based on Householder transform of Zernike polynomial wave front fitting this method is different from the traditional least square method and Gram-Schmid orthogonal method because it does not bring ill-conditioned polynomial without constructing normal equation so it can avoid calculation error wave front fitting is precision. Based on the coefficient of the Zernike polynomial and the response function of the each actuator the stiffness matrix of the primary mirror is built and then adopting the damp least square method to calculate corrective force. Based on this method cp400m test mirror is simulated many times the calculation result approve: if the Householder transform is adopted wave front fitting is precision the result is stabilization and corrective effectiveness is better.