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	The automatic photoresist coating machine on the spherical surface (EI CONFERENCE) 会议论文 OAI收割 2009 IEEE International Conference on Mechatronics and Automation, ICMA 2009, August 9, 2009 - August 12, 2009, Changchun, China 作者: Li Y.; Li Y.; Li Y.; Li Y.; Wang H. 收藏 \| 浏览/下载：27/0 \| 提交时间：2013/03/25 The photoresist coating is an important micro machining process widely applied in engineering. The formed film should be uniform and enough thin to assure the quality of final pattern whose line width is micrometer or nanometer. It is more difficult to process it on the spherical surface than on the flat. In this work mathematic model of film thickness on the spherical surface is proposed by using hydromechanics. The key factors that influence the film thickness are obtained from the analysis of coating process. Then the rational parameters which be controlled by the automatic photoresist coating machine can be final set up according to the result of the coating experiments. And the accuracy analysis of the key part which is used for the main process is performed by the error analytics. This machine not only makes the whole coating process automation but also monitors the film quality in real time. It is adequate for aspheric surface also. 2009 IEEE.
	Automatic spin coater for concave spherical substrate (EI CONFERENCE) 会议论文 OAI收割 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies, AOMATT 2007: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, July 8, 2007 - July 12, 2007, Chengdu, China Fengchao L.; Jingsong G.; Xiaoguo F.; Jingli Z.; Zhijun X.; Jun H.; Fenglin X.; Huiqing W.; Xiaohan L. 收藏 \| 浏览/下载：27/0 \| 提交时间：2013/03/25 Coating photoresist film with uniform thickness on concave spherical substrate (CSS) is very important for microfabrication of concave spherical optical elements by lithography technique via a laser direct writer for the uneven photoresist film will result in ununiformity of line width so as to influence the characters of optical elements. For improving the uniformity of photoresist film coating on CSS an automatic spin coater was designed. The process and the mathematical model of spin coating for CSS were analyzed. Difficulties for realizing the spin coater consist of the control of multi-axis motion precisely and collaboratively valves on/ff properly and real-timely. A flexible and well-behaved spinning motion system was achieved by tmeans of principal and subordinate CPUs control. The motion program for spin coating could be created and implemented automatically while the pressure and the valves were was watched and controlled in real time. Film coating and laser direct writing experiments on a CSS with aperture equals to 100 mm and radius equals to 370 mm were performed. Photoresist film with uniform thickness on CSS was obtained by selecting proper spin coating parameters such as rotational speed acceleration and viscosity of the photoresist. After development the section analysis by the atomic force microscope showed that photoresist film thickness was about 517 nm in the center and about 520 nm in the edge of substrate the film thickness error was within 1% and the line width was about 6.0 m with steep sides parallel each other. Experimental results indicate that uniform thickness of thin photoresist film has been coated on CSS by the spin coater which contributes to quality improvement of laser direct writing lines on CSS.
	Method for the fabrication of isometric mesh on the concave of a spherical substrate (EI CONFERENCE) 会议论文 OAI收割 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies - Advanced Optical Manufacturing and Testing Technologies, November 2, 2005 - November 5, 2005, Xian, China 作者: Feng X.-G. 收藏 \| 浏览/下载：39/0 \| 提交时间：2013/03/25 Metallic mesh has been widely used in electromagnetic interference windows. While the duty ratio of curved mesh equals to planar mesh' the theory of planar mesh may be applied to curved mesh according to equivalent-circuit model. So the idea that latitude lines intersect latitude lines to form isometric mesh on the concave of a sphere is put forward and the method of fabricating the mesh by concentric optical scan is introduced. The movement parts of equipment consist of an erection turning a horizontal dividing and a pitching dividing spindle. Firstly a spherical substrate is fixed on the horizontal dividing spindle that has been set horizontally on the erect turning spindle the substrate revolves around the axis of the erect spindle the tube of object lens that is fixed on the pitching dividing spindle steps at pitching direction and a revolving circuit of the substrate corresponds to a step of the tube. Gradually a set of latitude lines is attained. Afterward the substrate makes a quarter turn around the horizontal spindle another orientation latitude lines are also gained. Thus the isometric mesh on the concave of a spherical substrate is gained. The process comprises surface cleaning coating photoresist laser direct writing development evaporated film dissolving photoresist and plating. The fabricated spherical mesh has a line width of 7 m and a period of 600m. Experiment shows that infrared transmission and electromagnetism shield efficiency of the metallic mesh are relatively consistent with theoretical value.