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浏览/检索结果: 共18条，第1-10条 帮助

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Large aperture diffractive optical telescope: A review 期刊论文  OAI收割
Optics and Laser Technology, 2020, 卷号: 130
作者:  Zhang, Haolin;  Liu, Hua;  Xu, Wenbin;  Lu, Zhenwu
  |  收藏  |  浏览/下载：40/0  |  提交时间：2020/06/19
The Impact of Fabrication Errors of Double-layer BOE on Diffraction Efficiency 会议论文  OAI收割
8th international symposium on advanced optical manufacturing and testing technologies (aomatt) - design, manufacturing, and testing of micro- and nano-optical devices and systems; and smart structures and materials, suzhou, peoples r china, 2016-04-26
作者:  Ma Zebin;  Kang Fuzeng;  Wang Hao
收藏  |  浏览/下载：26/0  |  提交时间：2016/12/02
A novel method for the design of diffractive optical elements based on the Rayleigh-Sommerfeld integral 期刊论文  OAI收割
OPTICS AND LASERS IN ENGINEERING, 2015, 卷号: 70, 页码: 38-44
作者:  Pang, Hui;  Yin, Shaoyun;  Deng, Qiling;  Qiu, Qi;  Du, Chunlei
收藏  |  浏览/下载：36/0  |  提交时间：2015/07/10
A novel method for the design of diffractive optical elements based on the Rayleigh-Sommerfeld integral 期刊论文  OAI收割
OPTICS AND LASERS IN ENGINEERING, 2015, 卷号: 70, 页码: 38-44
作者:  Pang, Hui;  Yin, Shaoyun;  Deng, Qiling;  Qiu, Qi;  Du, Chunlei
  |  收藏  |  浏览/下载：20/0  |  提交时间：2018/03/15
Design optimization of highly efficient spectrum-splitting and beam-concentrating diffractive optical element for lateral multijunction solar cells 期刊论文  OAI收割
CHINESE PHYSICS B, 2014, 卷号: 23, 期号: 4
Wang, JZ; Ye, JS; Huang, QL; Xu, X; Li, DM; Meng, QB; Yang, GZ
收藏  |  浏览/下载：22/0  |  提交时间：2015/04/14
A hybrid doubled achromat based on a photon sieve 期刊论文  OAI收割
OPTIK, 2014, 卷号: 125, 期号: 3, 页码: 958-961
作者:  He, Yu;  Zhao, Lixin;  Tang, Yan;  Hu, Song
收藏  |  浏览/下载：40/0  |  提交时间：2015/07/10
A single diffractive optical element implementing spectrum-splitting and beam-concentration functions simultaneously with high diffraction efficiency 期刊论文  OAI收割
CHINESE PHYSICS B, 2013, 卷号: 22, 期号: 3
Ye, JS; Wang, JZ; Huang, QL; Dong, BZ; Zhang, Y; Yang, GZ
收藏  |  浏览/下载：35/0  |  提交时间：2014/01/16
Design and Optimization of Photon Sieves Using Vector Diffractive Theory 期刊论文  OAI收割
JOURNAL OF COMPUTATIONAL AND THEORETICAL NANOSCIENCE, 2012, 卷号: 9, 期号: 3, 页码: 414-418
作者:  Jiang, Wenbo;  Hu, Song;  Zhao, Lixin;  Pu, Yun;  Song, Xiaoxiao
收藏  |  浏览/下载：22/0  |  提交时间：2015/07/10
Optical design of infrared continuous-zoom lenses 期刊论文  OAI收割
JOURNAL OF INFRARED AND MILLIMETER WAVES, 2012, 卷号: 31, 期号: 5, 页码: 421
作者:  Xue H(薛慧);  Li CW(李常伟)
  |  收藏  |  浏览/下载：15/0  |  提交时间：2021/12/06
A design of beam shaping unit for 193nm lithography illumination system using angular spectrum theory (EI CONFERENCE) 会议论文  OAI收割
6th International Symposium on Precision Engineering Measurements and Instrumentation, August 8, 2010 - August 11, 2010, Hangzhou, China
作者:  Zhao Y.;  Zhang W.;  Zhang W.;  Li S.;  Gong Y.
收藏  |  浏览/下载：17/0  |  提交时间：2013/03/25
Off-axis illumination (OAI) technology is widely used to enhance resolution for deep ultraviolet lithography. The realizing methods of OAI include geometrical optics method and physical optics method. However  the former has the disadvantage of weak intensity distribution controlling ability  and the latter introduces simulation errors evidently when dealing with near field diffraction propagation. A diffractive optical element (DOE) designing method using plane wave angular spectrum theory is presented in this paper. Several kinds of OAI modes at near field away from DOE can be realized  and simulation errors and the size of illuminator are also reduced. According to studying the relationships of the sampling point distance of DOE  light beam propagation distance  and the structure of the beam shaping unit  a method of determining the designing parameters is discussed. Using this method  several illumination modes are realized  and simulation results show that all diffraction efficiencies reach up to 84%. The method of DOE manufacturing is analyzed at last  and it is proven to be feasible. 2010 SPIE.