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Chinese Academy of Sciences Institutional Repositories Grid
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CAS IR Grid
机构
长春光学精密机械与物... [5]
福建物质结构研究所 [1]
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OAI收割 [6]
内容类型
会议论文 [5]
期刊论文 [1]
发表日期
2007 [2]
2006 [1]
2005 [3]
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Extended tapes of cyclic water hexamers in an unusual oxalate-bridged one-dimensional copper(II) complex
期刊论文
OAI收割
Crystal Growth & Design, 2007, 卷号: 7, 期号: 7, 页码: 1220-1222
X. Y. Song
;
L. C. Li
;
D. Z. Liao
;
Z. H. Jiang
;
S. P. Yan
收藏
|
浏览/下载:13/0
|
提交时间:2013/04/01
magnetic-properties
crystal-structures
ferromagnetic chain
bidentate
ligand
clusters
acid
network
equals
ox
Automatic spin coater for concave spherical substrate (EI CONFERENCE)
会议论文
OAI收割
3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies, AOMATT 2007: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, July 8, 2007 - July 12, 2007, Chengdu, China
Fengchao L.
;
Jingsong G.
;
Xiaoguo F.
;
Jingli Z.
;
Zhijun X.
;
Jun H.
;
Fenglin X.
;
Huiqing W.
;
Xiaohan L.
收藏
|
浏览/下载:25/0
|
提交时间:2013/03/25
Coating photoresist film with uniform thickness on concave spherical substrate (CSS) is very important for microfabrication of concave spherical optical elements by lithography technique via a laser direct writer
for the uneven photoresist film will result in ununiformity of line width so as to influence the characters of optical elements. For improving the uniformity of photoresist film coating on CSS
an automatic spin coater was designed. The process and the mathematical model of spin coating for CSS were analyzed. Difficulties for realizing the spin coater consist of the control of multi-axis motion precisely and collaboratively
valves on/ff properly and real-timely. A flexible and well-behaved spinning motion system was achieved by tmeans of principal and subordinate CPUs control. The motion program for spin coating could be created and implemented automatically while the pressure and the valves were was watched and controlled in real time. Film coating and laser direct writing experiments on a CSS with aperture equals to 100 mm and radius equals to 370 mm were performed. Photoresist film with uniform thickness on CSS was obtained by selecting proper spin coating parameters such as rotational speed
acceleration and viscosity of the photoresist. After development
the section analysis by the atomic force microscope showed that photoresist film thickness was about 517 nm in the center and about 520 nm in the edge of substrate
the film thickness error was within 1%
and the line width was about 6.0 m with steep sides parallel each other. Experimental results indicate that uniform thickness of thin photoresist film has been coated on CSS by the spin coater
which contributes to quality improvement of laser direct writing lines on CSS.
Method for the fabrication of isometric mesh on the concave of a spherical substrate (EI CONFERENCE)
会议论文
OAI收割
2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies - Advanced Optical Manufacturing and Testing Technologies, November 2, 2005 - November 5, 2005, Xian, China
作者:
Feng X.-G.
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浏览/下载:34/0
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提交时间:2013/03/25
Metallic mesh has been widely used in electromagnetic interference windows. While the duty ratio of curved mesh equals to planar mesh'
the theory of planar mesh may be applied to curved mesh according to equivalent-circuit model. So the idea that latitude lines intersect latitude lines to form isometric mesh on the concave of a sphere is put forward
and the method of fabricating the mesh by concentric optical scan is introduced. The movement parts of equipment consist of an erection turning
a horizontal dividing and a pitching dividing spindle. Firstly
a spherical substrate is fixed on the horizontal dividing spindle that has been set horizontally on the erect turning spindle
the substrate revolves around the axis of the erect spindle
the tube of object lens that is fixed on the pitching dividing spindle steps at pitching direction
and a revolving circuit of the substrate corresponds to a step of the tube. Gradually
a set of latitude lines is attained. Afterward
the substrate makes a quarter turn around the horizontal spindle
another orientation latitude lines are also gained. Thus
the isometric mesh on the concave of a spherical substrate is gained. The process comprises surface cleaning
coating photoresist
laser direct writing
development
evaporated film
dissolving photoresist and plating. The fabricated spherical mesh has a line width of 7 m and a period of 600m. Experiment shows that infrared transmission and electromagnetism shield efficiency of the metallic mesh are relatively consistent with theoretical value.
Computer aided alignment for off-axis asphere null test (EI CONFERENCE)
会议论文
OAI收割
Optical Design and Testing II, November 8, 2004 - November 11, 2004, Beijing, United states
作者:
Zhang X.
;
Zhang X.
;
Zhang X.
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浏览/下载:18/0
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提交时间:2013/03/25
The method of null test is widely used for testing an aspheric mirror. During optical manufacturing process
the mirror has to be moved up and down for testing and fabricating. Because the alignment of null test is difficult and time costing
the efficiency of making aspheric mirror is decreased greatly. In order to solve the problem
we developed a software based on polynomial fitting to calculate the misalignment parameters. By using the software and computer numeric controlled adjusting equipments
the efficiency of testing is increased and the accuracy of test has reached up to /40 RMS where equals to 632.8nm
which has fulfilled the demand of the designer.
Study on LD-pumped Nd:YAG laser cutter (EI CONFERENCE)
会议论文
OAI收割
ICO20: Lasers and Laser Technologies, August 21, 2005 - August 26, 2005, Changchun, China
作者:
Zhang G.
;
Zhang G.
;
Zhang G.
;
Zhang J.
;
Zhang J.
收藏
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浏览/下载:26/0
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提交时间:2013/03/25
The theory of laser cutter and the technology neck is analyzed. We can conclude that it is almost impossible to deal with the waste thick silicon wafers which are yielded in producing silicon wafers by conventional eroding or diamond cutting
when the cutting velocity equals 100mm/min
while it is also unperfected with ecumenical laser cutter without good beam quality or precise laseroptics system. It is represented that high average power and high repetition rate laser with good beam quality and precise laseroptics system are pivotal to obtain excellent cutting effect such as thick groove depth
double-layer 0.75mm thick silicon wafer can be penetrated.. The cross section is fine and the groove is narrow
rapid cutting speed
the cutting quality meets the expecting demand.
fine kerf section without considering the effect of technique. Considering laser medium thermal lens effect and thermal focal length changing with pumping power
using plano-convex high reflectivity mirror as the back cavity mirror to compensate the heat lens influence
a /4 waveplate to compensate heat -induced birefraction
utilize the Nd:YAG self- aperture effect
more than 50 W average power 1.064 um IR output is obtained with beam quality factor (M2) equals 3.19. Through the LD-Pumped Nd:YAG laser cutter we developed with short focus length negative spherical aberration focusing lens
double axis linear step motor positioning system
suitable beam expander multiplying factor
appropriate diameter of exit beam aperture
proper repetition rate
when the cutting velocity equals 400mm/min
0.75mm thick silicon wafer can be penetrated
Research on LD-Pumped dual wavelength Nd:YAG Laser with high beam quality for machining (EI CONFERENCE)
会议论文
OAI收割
ICO20: Lasers and Laser Technologies, August 21, 2005 - August 26, 2005, Changchun, China
作者:
Zhang G.
;
Zhang G.
;
Zhang G.
;
Zhang J.
;
Zhang J.
收藏
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浏览/下载:38/0
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提交时间:2013/03/25
Considering laser medium thermal lens effect and thermal focal length changes with pumping power
conventionally
lasers are designed to operate in the middle of thermal stable zones
where the fundamental mode size is insensitive to thermal perturbation
while this method seems impossible when large fundamental mode size is required. Through self-select mode cavity
lasers are designed to work at the border of stable zone instead
where large fundamental mode size in gain media can be reached. With increase of pumping power and self-aperture mode-selective effect
mode size would grow up automatically to a certain value suitable for monomode resonance. With double 180 W pump modules
acoustic Q-switch and LBO external frequency-doubled
over 28 W which M2 equals 4.5 quasi-CW output green laser and 52W 1.064 um IR output is obtained simultaneity. With the insertion or not of the harmonic separator by footswitch
high beam quality green
IR
and green IR lasers are obtained conveniently.
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