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The optical design of cubic phase plate testing system (EI CONFERENCE) 会议论文  OAI收割
2011 Symposium on Photonics and Optoelectronics, SOPO 2011, May 16, 2011 - May 18, 2011, Wuhan, China
作者:  Zhang X.;  Zhang X.;  Zhang X.;  Zhang Y.
收藏  |  浏览/下载：20/0  |  提交时间：2013/03/25
Computer-generated holograms (CGH) have been widely used for years in optical testing of aspheric surfaces in combination with Fizeau interferometers. With the development of diffraction optics  computer technology  and micro-processing technology  the accuracy of the CGH testing can achieve a hundredth of a wave  and the cost is reduced greatly. CGH is capable of producing an optical wavefront with any desired shape. So it is fascinating and will have good prospects to test free-form surfaces using CGH. As the CGH can create any wavefront shape  it can also be used in unsymmetrical aspherical surfaces testing. Taking the cubic surface as an example  this paper gives a method to test unsymmetrical surfaces. This paper gives the design to test a cubic surface. And the separation of the diffraction orders and the binary process of the continuous CGH phase function are discussed in detail. The alignment tolerance of the test system and the CGH fabrication tolerance are analyzed. We also present an idea using a CGH and two spherical lenses as null lens to test the cubic surface when the surface deviation is great. 2011 IEEE.  
Design and fabrication of CGH for aspheric surface testing and its experimental comparison with null lens (EI CONFERENCE) 会议论文  OAI收割
5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, April 26, 2010 - April 29, 2010, Dalian, China
作者:  Zhao J.
收藏  |  浏览/下载：34/0  |  提交时间：2013/03/25
Computer-generated hologram (CGH) is an effective way to compensate wavefront in null test of aspheric surfaces and freeform surfaces. Our strategies of CGH design and fabrication for optical testing are presented  and an experiment demonstrating the compensation results of CGH and null lens is also reported. In order to design complex CGH  software was developed  with which we can design a CGH including three sections: main section for compensating wavefront in null test  alignment section for adjusting the relative position between CGH and interferometer  and fiducial section for projecting fiducial marks around the optics under test. The design result is represented in GDS II format file which could drive a laser-direct-writer- machine to fabricate a photomask. Then  a 1:1 replication process is applied to duplicate the patterns from photomask to a parallel optical substrate whose surface is error better than /60 rms. Finally  an off-axis aspheric surface was tested with CGH and null lens respectively. The test result with CGH (0.019rms) is almost the same as the result with null lens (0.020 rms). This experiment also demonstrated that fiducial marks projected by CGH can be used to guide the alignment of the optics and measurement of its off-axis distance. 2010 Copyright SPIE - The International Society for Optical Engineering.  
A spherical catadioptric telescope system based on Cooke corrector group (EI CONFERENCE) 会议论文  OAI收割
Novel Optical Systems Design and Optimization XII, August 3, 2009 - August 4, 2009, San Diego, CA, United states
作者:  Zhang J.;  Liu W.;  Zhang J.;  Zhang J.
收藏  |  浏览/下载：31/0  |  提交时间：2013/03/25
To obtain a number of advantages in fabrication  testing and alignment  many designs in which spherical mirrors replace classical Cassegrain-form aspheric mirrors are present in the literature. However  spherical mirrors suffer from substantial spherical aberration and thereby require some form of corrector group. But in this case  the question encountered is that of making the basic optical configuration more complex. In this paper  a new design based on Cooke corrector group is presented for eliminating spherical aberration  which is believed to provide higher performance with less complexity than previous approaches. Besides  the cost and fabrication period will be extremely decreased. The telescope system using corrector group here can achieve good optical performance with f# of 10  full field of 0.5  obscuration of 1/3 and MTF (Modulation Transfer Function) of 0.48 corresponding to 50@lp/mm. 2009 Copyright SPIE - The International Society for Optical Engineering.  
Research on 10.6 m laser beam monitoring in CO2 laser processing system (EI CONFERENCE) 会议论文  OAI收割
Infrared Materials, Devices, and Applications, November 12, 2007 - November 15, 2007, Beijing, China
作者:  Gao Y.;  Shao S.
收藏  |  浏览/下载：27/0  |  提交时间：2013/03/25
It is a key point of CO2 laser beam monitoring in the CO 2 laser processing system to achieve alignment between CO2 laser and PL (pointing and launching) system. By monitoring the angle offset of CO2 laser beam  the compensation can be gotten witch is given to fast-steering mirror to rectify the direction of laser beam. But the normal photoelectric detector can not get the laser signal because of CO2 laser's high energy and long wavelength. Its wavelength is 10.6m and its power can reach kW level. Consequently  it is difficult to detect the high-energy 10.6m laser beam directly. So  we monitored the output mirror of laser resonator superseded the laser beam  indirectly. The laser beam monitoring system could be designed based on CCD laser auto-collimation angular measurement principle and image processing method. In this paper  application of CCD laser auto-collimation angular measurement principle and image processing method for CO2 laser beam monitoring system is introduced particularly  After design  fabrication and alignment  the monitoring system can be used for experimental study that including angular measurement accuracy and angle offset measurement of CO2 laser beam. Angle offset range and angle variation rule of CO2 laser beam is also can be acquired for further research.  
Development of an experimental EUVL system (EI CONFERENCE) 会议论文  OAI收割
3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies, AOMATT 2007: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, July 8, 2007 - July 12, 2007, Chengdu, China
作者:  Wang L.-P.;  Zhang L.-C.;  Jin C.-S.
收藏  |  浏览/下载：20/0  |  提交时间：2013/03/25