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	Surface modification of SiC mirror by IARE method (EI CONFERENCE) 会议论文 OAI收割 7th International Conference on Thin Film Physics and Applications, September 24, 2010 - September 27, 2010, Shanghai, China 作者: Gao J. 收藏 \| 浏览/下载：30/0 \| 提交时间：2013/03/25 A method to prepare high quality SiC coating at low temperature using large aperture E-beam evaporation PVD equipment with ion assistance was developed for the surface modification of SiC mirror for space projects. This method was called Ion Assisted Reactive Evaporation (IARE). The modified SiC coating was prepared using CH4 and Si with Kaufman ion source by IARE at 300C and it had met the requirements of applications. The SiC coating prepared by this method was amorphous. It was dense homogeneous and easy to be polished. The surface modification of a SiC mirror was carried out using SiC coating by this method and achieved a fine surface modification effect. The surface roughness (rms) of the SiC substrate was reduced to 0.862nm the scattering coefficient was reduced to 2.79% and the reflectance coated with Ag film was improved simultaneously after the surface modification. The effect of surface modification using SiC coating was close to that of using Si coating. It can be drawn that this technological method to preparation SiC coating for the surface modification of SiC mirror is reasonable and effective. 2011 SPIE.
	IAD-Si coatings on RB-SiC space mirrors for ultra-smooth surfaces (EI CONFERENCE) 会议论文 OAI收割 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, November 19, 2008 - November 21, 2008, Chengdu, China 作者: Xu L.; Wang X.; Wang X.; Wang X.; Zhang F. 收藏 \| 浏览/下载：37/0 \| 提交时间：2013/03/25 To eliminate surface limitation caused by Silicon impurity in RB-SiC space mirrors a relatively thick Si film is deposited on well finished RB-SiC substrate by a new process-ion assisted depositing (IAD) to provide a better polishable surface. Testing results of IAD-Si properties are provided showing that the amorphous film has great thermal shock resistance. Then polishing experiments on 100.5m thick IAD-Si layers are accomplished focusing on smoother surface. Surface figure and micro-roughness of the coating after polished reach 0.026 RMS (=0.6328nm) and less than 0.5nm RMS respectively. Moreover reflectivity of IAD-Si polished surface with reflective films increases higher than 4.5% than that of RB-SiC in 360-1100nm. High reflectivity and desirable thermal property make IAD-Si an attractive coating material for RB-SiC space mirrors. 2009 SPIE.
	离子束表面改性及其在摩擦学中的应用期刊论文 OAI收割摩擦学学报, 1992, 卷号: 12, 期号: 1, 页码: 8-17 张绪寿; 冶银平收藏 \| 浏览/下载：19/0 \| 提交时间：2014/09/30 离子束表面改性离子束增强沉积离子辅助涂层离子束混合摩擦磨损 ion beam surface modification ion beam enhanced deposition ion assisted coating ion beam mixing friction and wear