中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
首页
机构
成果
学者
登录
注册
登陆
×
验证码:
换一张
忘记密码?
记住我
×
校外用户登录
CAS IR Grid
机构
上海光学精密机械研究... [3]
西安光学精密机械研究... [2]
长春光学精密机械与物... [1]
光电技术研究所 [1]
采集方式
OAI收割 [7]
内容类型
期刊论文 [6]
会议论文 [1]
发表日期
2019 [1]
2017 [1]
2014 [2]
2008 [1]
2007 [1]
2006 [1]
更多
学科主题
激光技术;激光物理与... [1]
筛选
浏览/检索结果:
共7条,第1-7条
帮助
条数/页:
5
10
15
20
25
30
35
40
45
50
55
60
65
70
75
80
85
90
95
100
排序方式:
请选择
题名升序
题名降序
发表日期升序
发表日期降序
提交时间升序
提交时间降序
作者升序
作者降序
Biomimetic anti-adhesive surface microstructures on electrosurgical blade fabricated by long-pulse laser inspired by pangolin scales
期刊论文
OAI收割
Micromachines, 2019, 卷号: 10, 期号: 12
作者:
Li, Chen
;
Yang, Yong
;
Yang, Lijun
;
Shi, Zhen
  |  
收藏
  |  
浏览/下载:38/0
  |  
提交时间:2020/03/06
biomimetic scales
laser microfabrication
anti-adhesion
anti-friction
electrosurgical blade
316L
The effects of profile errors of microlens surfaces on laser beam homogenization
期刊论文
OAI收割
Micromachines, 2017, 卷号: 8, 期号: 2, 页码: 50
作者:
Cao, Axiu
;
Pang, Hui
;
Wang, Jiazhou
;
Zhang, Man
;
Chen, Jian
  |  
收藏
  |  
浏览/下载:42/0
  |  
提交时间:2018/11/20
Errors - Gears - Laser beams - Microanalysis - Microfabrication - Microlenses - Microoptics - Optical instrument lenses
Femtosecond Laser Fabrication of Monolithically Integrated Microfluidic Sensors in Glass
期刊论文
OAI收割
sensors, 2014, 卷号: 14, 期号: 10, 页码: 19402
作者:
He, Fei
;
Liao, Yang
;
Lin, Jintian
;
Song, Jiangxin
;
Qiao, Lingling
收藏
  |  
浏览/下载:27/0
  |  
提交时间:2016/11/28
femtosecond laser
microfabrication
glass material
micro-/nanofluidics
lab-on-a-chip
optofluidics
electrofluidics
surface-enhanced Raman-scattering
lab-on-fiber
Femtosecond Laser Fabrication of Monolithically Integrated Microfluidic Sensors in Glass
期刊论文
OAI收割
sensors, 2014, 卷号: 14, 期号: 10, 页码: 19402
作者:
He, Fei
;
Liao, Yang
;
Lin, Jintian
;
Song, Jiangxin
;
Qiao, Lingling
收藏
  |  
浏览/下载:33/0
  |  
提交时间:2016/11/28
femtosecond laser
microfabrication
glass material
micro-/nanofluidics
lab-on-a-chip
optofluidics
electrofluidics
surface-enhanced Raman-scattering
lab-on-fiber
Surface-enhanced Raman scattering substrate fabricated by femtosecond laser direct writing
期刊论文
OAI收割
jpn. j. appl. phys., 2008, 卷号: 47, 期号: 1, 页码: 189, 192
Zhou Zenghui
;
Xu Jian
;
程亚
;
徐至展
;
Sugioka Koji
;
Midorikawa Katsumi
收藏
  |  
浏览/下载:976/147
  |  
提交时间:2009/09/18
femtosecond laser
surface-enhanced Raman scattering
microfabrication
Automatic spin coater for concave spherical substrate (EI CONFERENCE)
会议论文
OAI收割
3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies, AOMATT 2007: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, July 8, 2007 - July 12, 2007, Chengdu, China
Fengchao L.
;
Jingsong G.
;
Xiaoguo F.
;
Jingli Z.
;
Zhijun X.
;
Jun H.
;
Fenglin X.
;
Huiqing W.
;
Xiaohan L.
收藏
  |  
浏览/下载:26/0
  |  
提交时间:2013/03/25
Coating photoresist film with uniform thickness on concave spherical substrate (CSS) is very important for microfabrication of concave spherical optical elements by lithography technique via a laser direct writer
for the uneven photoresist film will result in ununiformity of line width so as to influence the characters of optical elements. For improving the uniformity of photoresist film coating on CSS
an automatic spin coater was designed. The process and the mathematical model of spin coating for CSS were analyzed. Difficulties for realizing the spin coater consist of the control of multi-axis motion precisely and collaboratively
valves on/ff properly and real-timely. A flexible and well-behaved spinning motion system was achieved by tmeans of principal and subordinate CPUs control. The motion program for spin coating could be created and implemented automatically while the pressure and the valves were was watched and controlled in real time. Film coating and laser direct writing experiments on a CSS with aperture equals to 100 mm and radius equals to 370 mm were performed. Photoresist film with uniform thickness on CSS was obtained by selecting proper spin coating parameters such as rotational speed
acceleration and viscosity of the photoresist. After development
the section analysis by the atomic force microscope showed that photoresist film thickness was about 517 nm in the center and about 520 nm in the edge of substrate
the film thickness error was within 1%
and the line width was about 6.0 m with steep sides parallel each other. Experimental results indicate that uniform thickness of thin photoresist film has been coated on CSS by the spin coater
which contributes to quality improvement of laser direct writing lines on CSS.
Design of Superresolved Phase Plates
期刊论文
OAI收割
journal of laser micro nanoengineering, 2006, 卷号: 1, 期号: 3, 页码: 281-287
作者:
Tan, Youhua
;
Guo, Rui
;
Xiao, Shizhou
;
Cheng, Guanghua
;
Huang, Wenhao
收藏
  |  
浏览/下载:58/0
  |  
提交时间:2015/08/17
superresolution
superresolved phase plate
laser microfabrication
optimization algorithm
compression ratio