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苏州纳米技术与纳米仿... [1]
长春光学精密机械与物... [1]
数学与系统科学研究院 [1]
西安光学精密机械研究... [1]
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OAI收割 [4]
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期刊论文 [3]
会议论文 [1]
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2024 [1]
2019 [1]
2009 [1]
2006 [1]
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Adaptive Kalman Filter Based on Online ARW Estimation for Compensating Low-Frequency Error of MHD ARS
期刊论文
OAI收割
IEEE Transactions on Instrumentation and Measurement, 2024, 卷号: 73, 页码: 1-10
作者:
Su, Yunhao
;
Han, Junfeng
;
Ma, Caiwen
;
Wu, Jianming
;
Wang, Xuan
  |  
收藏
  |  
浏览/下载:23/0
  |  
提交时间:2024/07/22
Angular random walk (ARW)
magnetohydrodynamic angular rate sensor (MHD ARS)
microelectromechanical system (MEMS) gyroscope
Sage-Husa adaptive Kalman filter(SHAKF)
signal fusion
Twisting Sliding Mode Control of an Electrostatic MEMS Micromirror for a Laser Scanning System
期刊论文
OAI收割
IEEE-CAA JOURNAL OF AUTOMATICA SINICA, 2019, 卷号: 6, 期号: 4, 页码: 1060-1067
作者:
Chen Hui
;
Sun Zhendong
;
Sun Weijie
;
Yeow John Tze Wei
  |  
收藏
  |  
浏览/下载:25/0
  |  
提交时间:2021/01/14
PULL-IN
ADAPTIVE-CONTROL
DESIGN
STABILIZATION
MIRRORS
ORDER
Electrostatic micromirror
imaging
microelectromechanical system (MEMS)
twisting algorithm
Fabrication of Large-Area Suspended MEMS Structures Using GaN-on-Si Platform
期刊论文
OAI收割
IEEE ELECTRON DEVICE LETTERS, 2009, 卷号: 30, 期号: 10, 页码: 1045-1047
作者:
Zhang BS(张宝顺)
;
Lin WK (林文魁)
;
Cai Y (蔡勇)
收藏
  |  
浏览/下载:228/63
  |  
提交时间:2010/01/15
Accelerometer
gallium nitride (GaN)
microelectromechanical system (MEMS)
piezosensitivity
sensor
Research and development on the valve-less piezoelectric pump with unsymmetrical corrugation chamber bottom (EI CONFERENCE)
会议论文
OAI收割
2006 IEEE International Conference on Information Acquisition, ICIA 2006, August 20, 2006 - August 23, 2006, Weihai, Shandong, China
作者:
Zhang J.
;
Li D.
;
Zhang J.
;
Zhang J.
收藏
  |  
浏览/下载:17/0
  |  
提交时间:2013/03/25
The valve-less piezoelectric pump is more suitable for minimization and microminiaturization than the valve piezoelectric pump
especially for the Microelectromechanical System (MEMS) because of its simple structure. However
in order to control the flow direction of the fluid through the pump
some assembles have to be attached outside the chamber. And it is no doubt that these assembles will take some space and hinder its further microminiaturization. In this paper
a novel valve-less piezoelectric pump with unsymmetrical corrugation chamber bottom (UCCB) is presented. It ingeniously takes advantage of the space of the chamber by developing its bottom into a unsymmetrical corrugation shape along the axis of the inlet and outlet. As a result
a series of diffuse pipes and nozzle pipes (or wedge-shaped pipes)
which substitute the regular diffuse/nozzle elements fitted outside the chamber
are alternatively formed between the unsymmetrical corrugation chamber bottom (UCCB) and the piezoelectric vibrator. The piezoelectric vibrator is opposite to the UCCB. And these diffuse pipes and nozzle pipes are able to force the fluid in the chamber to flow along a single direction when the pump works. And then the mathematic model is established to present the relationship between the mean energy loss and the flow rate of the pump. Basing on the mathematic model
the theory on the pump working is analysed. Finally
a real UCCB valve-less piezoelectric pump is manufactured
and the test with it is carried out to verify the theory above-mentioned. 2006 IEEE.