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Adaptive Kalman Filter Based on Online ARW Estimation for Compensating Low-Frequency Error of MHD ARS 期刊论文  OAI收割
IEEE Transactions on Instrumentation and Measurement, 2024, 卷号: 73, 页码: 1-10
作者:  
Su, Yunhao;  Han, Junfeng;  Ma, Caiwen;  Wu, Jianming;  Wang, Xuan
  |  收藏  |  浏览/下载:23/0  |  提交时间:2024/07/22
Twisting Sliding Mode Control of an Electrostatic MEMS Micromirror for a Laser Scanning System 期刊论文  OAI收割
IEEE-CAA JOURNAL OF AUTOMATICA SINICA, 2019, 卷号: 6, 期号: 4, 页码: 1060-1067
作者:  
Chen Hui;  Sun Zhendong;  Sun Weijie;  Yeow John Tze Wei
  |  收藏  |  浏览/下载:25/0  |  提交时间:2021/01/14
Fabrication of Large-Area Suspended MEMS Structures Using GaN-on-Si Platform 期刊论文  OAI收割
IEEE ELECTRON DEVICE LETTERS, 2009, 卷号: 30, 期号: 10, 页码: 1045-1047
作者:  
Zhang BS(张宝顺);  Lin WK (林文魁);  Cai Y (蔡勇)
收藏  |  浏览/下载:228/63  |  提交时间:2010/01/15
Research and development on the valve-less piezoelectric pump with unsymmetrical corrugation chamber bottom (EI CONFERENCE) 会议论文  OAI收割
2006 IEEE International Conference on Information Acquisition, ICIA 2006, August 20, 2006 - August 23, 2006, Weihai, Shandong, China
作者:  
Zhang J.;  Li D.;  Zhang J.;  Zhang J.
收藏  |  浏览/下载:17/0  |  提交时间:2013/03/25
The valve-less piezoelectric pump is more suitable for minimization and microminiaturization than the valve piezoelectric pump  especially for the Microelectromechanical System (MEMS) because of its simple structure. However  in order to control the flow direction of the fluid through the pump  some assembles have to be attached outside the chamber. And it is no doubt that these assembles will take some space and hinder its further microminiaturization. In this paper  a novel valve-less piezoelectric pump with unsymmetrical corrugation chamber bottom (UCCB) is presented. It ingeniously takes advantage of the space of the chamber by developing its bottom into a unsymmetrical corrugation shape along the axis of the inlet and outlet. As a result  a series of diffuse pipes and nozzle pipes (or wedge-shaped pipes)  which substitute the regular diffuse/nozzle elements fitted outside the chamber  are alternatively formed between the unsymmetrical corrugation chamber bottom (UCCB) and the piezoelectric vibrator. The piezoelectric vibrator is opposite to the UCCB. And these diffuse pipes and nozzle pipes are able to force the fluid in the chamber to flow along a single direction when the pump works. And then the mathematic model is established to present the relationship between the mean energy loss and the flow rate of the pump. Basing on the mathematic model  the theory on the pump working is analysed. Finally  a real UCCB valve-less piezoelectric pump is manufactured  and the test with it is carried out to verify the theory above-mentioned. 2006 IEEE.