中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
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A nanometer scale alignment method of concentric spherical mirrors based on interferometry (EI CONFERENCE) 会议论文  OAI收割
4th IEEE International Nanoelectronics Conference, INEC 2011, June 21, 2011 - June 24, 2011, Tao-Yuan, Taiwan
作者:  
Xu T.
收藏  |  浏览/下载:16/0  |  提交时间:2013/03/25
Grain size effects on the austenitization process in a nanostructured ferritic steel 期刊论文  OAI收割
Acta Materialia, 2011, 卷号: 59, 期号: 9, 页码: 3710-3719
L. M. Wang; Z. B. Wang; K. Lu
收藏  |  浏览/下载:25/0  |  提交时间:2012/04/13
Physical design methodology for godson-2g microprocessor 期刊论文  iSwitch采集
Journal of computer science and technology, 2010, 卷号: 25, 期号: 2, 页码: 225-231
作者:  
Zhao, Ji-Ye;  Liu, Dong;  Huan, Dan-Dan;  Su, Meng-Hao;  Xiao, Bin
收藏  |  浏览/下载:27/0  |  提交时间:2019/05/10
Physical Design Methodology for Godson-2G Microprocessor 期刊论文  OAI收割
JOURNAL OF COMPUTER SCIENCE AND TECHNOLOGY, 2010, 卷号: 25, 期号: 2, 页码: 225-231
作者:  
Zhao, Ji-Ye;  Liu, Dong;  Huan, Dan-Dan;  Su, Meng-Hao;  Xiao, Bin
  |  收藏  |  浏览/下载:9/0  |  提交时间:2019/12/16
The automatic photoresist coating machine on the spherical surface (EI CONFERENCE) 会议论文  OAI收割
2009 IEEE International Conference on Mechatronics and Automation, ICMA 2009, August 9, 2009 - August 12, 2009, Changchun, China
作者:  
Li Y.;  Li Y.;  Li Y.;  Li Y.;  Wang H.
收藏  |  浏览/下载:21/0  |  提交时间:2013/03/25
The photoresist coating is an important micro machining process widely applied in engineering. The formed film should be uniform and enough thin to assure the quality of final pattern whose line width is micrometer or nanometer. It is more difficult to process it on the spherical surface than on the flat. In this work  mathematic model of film thickness on the spherical surface is proposed by using hydromechanics. The key factors that influence the film thickness are obtained from the analysis of coating process. Then  the rational parameters which be controlled by the automatic photoresist coating machine can be final set up according to the result of the coating experiments. And the accuracy analysis of the key part which is used for the main process is performed by the error analytics. This machine not only makes the whole coating process automation  but also monitors the film quality in real time. It is adequate for aspheric surface also. 2009 IEEE.