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	NOVEL MULTILEVEL PRECONDITIONERS FOR THE SYSTEMS ARISING FROM PLANE WAVE DISCRETIZATION OF HELMHOLTZ EQUATIONS WITH LARGE WAVE NUMBERS 期刊论文 OAI收割 SIAM JOURNAL ON SCIENTIFIC COMPUTING, 2017, 卷号: 39, 期号: 4, 页码: A1675-A1709 作者: \| 收藏 \| 浏览/下载：37/0 \| 提交时间：2018/07/30 Helmholtz equation large wave numbers plane wave methods multilevel overlapping domain decomposition multilevel overlapping preconditioner smoothers
	EFFICIENT MULTILEVEL PRECONDITIONERS FOR THREE-DIMENSIONAL PLANE WAVE HELMHOLTZ SYSTEMS WITH LARGE WAVE NUMBERS 期刊论文 OAI收割 MULTISCALE MODELING & SIMULATION, 2017, 卷号: 15, 期号: 3, 页码: 1242-1266 作者: Hu, Qiya; Li, Xuan \| 收藏 \| 浏览/下载：29/0 \| 提交时间：2018/07/30 Helmholtz equation large wave numbers plane wave methods overlapping domain decomposition multilevel preconditioners 3-level smoothers
	A design of beam shaping unit for 193nm lithography illumination system using angular spectrum theory (EI CONFERENCE) 会议论文 OAI收割 6th International Symposium on Precision Engineering Measurements and Instrumentation, August 8, 2010 - August 11, 2010, Hangzhou, China 作者: Zhao Y.; Zhang W.; Zhang W.; Li S.; Gong Y. 收藏 \| 浏览/下载：17/0 \| 提交时间：2013/03/25 Off-axis illumination (OAI) technology is widely used to enhance resolution for deep ultraviolet lithography. The realizing methods of OAI include geometrical optics method and physical optics method. However the former has the disadvantage of weak intensity distribution controlling ability and the latter introduces simulation errors evidently when dealing with near field diffraction propagation. A diffractive optical element (DOE) designing method using plane wave angular spectrum theory is presented in this paper. Several kinds of OAI modes at near field away from DOE can be realized and simulation errors and the size of illuminator are also reduced. According to studying the relationships of the sampling point distance of DOE light beam propagation distance and the structure of the beam shaping unit a method of determining the designing parameters is discussed. Using this method several illumination modes are realized and simulation results show that all diffraction efficiencies reach up to 84%. The method of DOE manufacturing is analyzed at last and it is proven to be feasible. 2010 SPIE.
	Rigorous vector analysis of diffractive microlens by using of finitedifference time-domain method (EI CONFERENCE) 会议论文 OAI收割 2009 International Conference on Optical Instruments and Technology, OIT 2009, October 19, 2009 - October 22, 2009, Shanghai, China 作者: Liu Y.; Liu H.; Liu H.; Liu H.; Liu Y. 收藏 \| 浏览/下载：32/0 \| 提交时间：2013/03/25 We use finite difference time domain (FDFD) method as rigorous vector analysis model to simulate the focusing process of diffractive microlens (DML). Differing with most analysis model which the near field distributions are calculated by FDTD and then far field are obtained by using of propagation method we obtain the fields in whole computational space by using of FDTD only. The advantages are that all the results are vector based and the computational time is saved greatly. In this paper we present two methods to obtain wave amplitude one is comparison method and the other is integral method. Depending on wave amplitude in the whole computational space one can conveniently obtain distributions of electric field intensity and calculate the time-average Poynting vector. We also present the formulation for calculating diffractive efficiency of DML based on time-average Poynting vector which denotes energy flow. As demonstration a DML is analyzed by using of these algorithms. The time depended graphic results of FDTD show the process of wave propagation. The distribution of electric field intensity illustrates the focusing of the normal incident light. The focus pattern in the focal plane is also show. The diffractive efficiency of the DML is calculated by using of the energy flow method in this paper. The results show the high accuracy and efficiency of the model. 2009 SPIE.