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	Experimental and theoretical investigation of radiation and dynamics properties in laser-produced carbon plasmas 期刊论文 OAI收割 JOURNAL OF QUANTITATIVE SPECTROSCOPY & RADIATIVE TRANSFER, 2018, 卷号: 210, 页码: 189-196 作者: Su, Maogen; Wang, Bo; Cao, Shiquan; Sun, Duixiong; Dong, Chenzhong \| 收藏 \| 浏览/下载：29/0 \| 提交时间：2018/06/06 Laser-produced carbon plasma Spatio-temporally resolved emission spectroscopy technique Radiation hydrodynamics model Time-dependent collisional radiative model
	Generation of 1.5-12 ns width-tunable 532 nm pulses by adopting laser-induced plasma shutter technique 期刊论文 OAI收割 optik, 2009, 卷号: 120, 期号: 5, 页码: 237, 241 张芳佩; 楼祺洪; 董景星; Han Wenjie; Xing Yuhua; Zhang Wenping; Dou Feifei; Hu Yongzhao; Shen Yan 收藏 \| 浏览/下载：1402/181 \| 提交时间：2009/09/18 Wave clipping Laser-induced plasma shutter technique Width-tunable pulse
	Development of an experimental EUVL system (EI CONFERENCE) 会议论文 OAI收割 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies, AOMATT 2007: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, July 8, 2007 - July 12, 2007, Chengdu, China 作者: Wang L.-P.; Zhang L.-C.; Jin C.-S. 收藏 \| 浏览/下载：19/0 \| 提交时间：2013/03/25 An experimental EUVL system has been developed to investigate EUV imaging system design component fabrication assembly technique and experimental process. The system includes a laser produced plasma (LPP) source an ellipsoidal condenser a transmission mask a reduced projection optics and vacuum system. We designed a 10:1 reduction projection optics using Schwarzschild system with spherical mirrors to achieve 0.1m resolution. The Schwarzschild optics coated with Mo/Si multilayers was assembled with wavefront error (WFE) of 0.014 waves RMS at 632.8nm wavelength under computer-aided alignment method. Using this system a fine pattern of less than 0.25m covering a 0.1mm diameter image field of view was clearly replicated on resist-coated wafer.
	355 nm脉冲激光诱导等离子体开关削波期刊论文 OAI收割中国激光, 2007, 卷号: 34, 期号: 6, 页码: 759, 764 张芳沛; 楼祺洪; 董景星; 周军; 赵宏明; 何兵; 魏运荣; 朱健强; 王之江收藏 \| 浏览/下载：939/194 \| 提交时间：2009/09/18 激光技术削波等离子体开关脉宽压缩 laser technique wave clipping plasma shutter pulse compression
	Improved oxidation resistance of NiCrAlY coatings 期刊论文 OAI收割 Materials Letters, 2003, 卷号: 57, 期号: 16-17, 页码: 2404-2408 Y. N. Wu; M. Qin; Z. C. Feng; Y. Liang; C. Sun; F. H. Wang 收藏 \| 浏览/下载：24/0 \| 提交时间：2012/04/14 Al2O3 NiCrAlY plasma-laser technique oxidation resistance thermal-barrier coatings mcraly coatings behavior alloy superalloy