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	Research Progress of the Mineralization of Carbonate-Hosted Pb-Zn Deposits in the Sichuan-Yunnan-Guizhou Pb-Zn Metallogenic Province, Southwest China 期刊论文 OAI收割 Acta Geologica Sinica, 2015, 卷号: 89, 期号: 1, 页码: 307-308 ZHOU Jiaxi; HUANG Zhilong; YE Lin; BAO Zhiwei; LIU Yun; XIA Yong 收藏 \| 浏览/下载：23/0 \| 提交时间：2017/02/22 Guizhou Yangtze reserves sedimentary proven Southwest metamorphic carbonate basement Jurassic
	A design of beam shaping unit for 193nm lithography illumination system using angular spectrum theory (EI CONFERENCE) 会议论文 OAI收割 6th International Symposium on Precision Engineering Measurements and Instrumentation, August 8, 2010 - August 11, 2010, Hangzhou, China 作者: Zhao Y.; Zhang W.; Zhang W.; Li S.; Gong Y. 收藏 \| 浏览/下载：19/0 \| 提交时间：2013/03/25 Off-axis illumination (OAI) technology is widely used to enhance resolution for deep ultraviolet lithography. The realizing methods of OAI include geometrical optics method and physical optics method. However the former has the disadvantage of weak intensity distribution controlling ability and the latter introduces simulation errors evidently when dealing with near field diffraction propagation. A diffractive optical element (DOE) designing method using plane wave angular spectrum theory is presented in this paper. Several kinds of OAI modes at near field away from DOE can be realized and simulation errors and the size of illuminator are also reduced. According to studying the relationships of the sampling point distance of DOE light beam propagation distance and the structure of the beam shaping unit a method of determining the designing parameters is discussed. Using this method several illumination modes are realized and simulation results show that all diffraction efficiencies reach up to 84%. The method of DOE manufacturing is analyzed at last and it is proven to be feasible. 2010 SPIE.
	Recent progress on asphere manufacturing and testing at CIOM (EI CONFERENCE) 会议论文 OAI收割 Advanced Optical Manufacturing and Testing Technology 2000, November 1, 2000 - November 3, 2000, Chengdu, China 作者: Zhang X.; Yu J.; Zhang X.; Zhang X. 收藏 \| 浏览/下载：28/0 \| 提交时间：2013/03/25 The manufacturing procedure of a 500 mm in diameter f/2 hyperbolic primary mirror based on Computer-Controlled Polishing is introduced in detail. The mirror was finally polished to the shape accuracy of 13 nm rms and the surface roughness of 2 nm Ra. Testing methods and data analysis for different stages ranging from grinding to polishing are discussed. Some critical factors affecting the efficiency and accuracy of the grinding/polishing procedure are summarized. In addition the preliminary work to make large off-axis asphere mirrors is presented. The difficulties in polishing and testing for both circular aperture and rectangular aperture mirrors are previewed and a possible solution is given. To control the geometrical parameters such as radius of curvature and conic constant a new profiler has been built and it has proven very useful to improve the grinding efficiency. Finally the manufacturing of small aspheres using deterministic grinding tool is also introduced. The fine grinding procedure of LOH's asphere grinding machine is presented.
	Buildup of high particle flux and high solid density circulating conveying flow 会议论文 OAI收割 Hamburg, Germany, May 13, 2008 - May 16, 2008 作者: Liu, Xinhua; Sun, Guang; Sun, Guogang; Suda, Toshiyuki; Xu, Guangwen \| 收藏 \| 浏览/下载：0/0 \| 提交时间：2023/06/16 Air - Silica - Silica sand - Conveying - Proven reserves - Fluidized beds - Fluidized bed process