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	Two dimensional surface slope metrology with enhanced spatial resolution based on wavefront coding method 期刊论文 OAI收割 8TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES: SUBNANOMETER ACCURACY MEASUREMENT FOR SYNCHROTRON OPTICS AND X-RAY OPTICS, 2016, 卷号: 9687, 页码: - 作者: Zhang, XW; Li, M; Li M(李明); Yang, FG; Zhang XW(张晓伟) \| 收藏 \| 浏览/下载：28/0 \| 提交时间：2017/07/24 slope profiler X-ray optics wavefront coding spatial modulator
	Design of co-path scanning long trace profiler for measurement of X-ray space optical elements (EI CONFERENCE) 会议论文 OAI收割 6th International Symposium on Precision Engineering Measurements and Instrumentation, August 8, 2010 - August 11, 2010, Hangzhou, China Shun L.; Yan G.; Wei Z.; Yang Z. 收藏 \| 浏览/下载：28/0 \| 提交时间：2013/03/25 The Long Trace Profiler (LTP) is a precision surface slope error measurement instrument used in synchrotron radiation optics for many years. By making some modifications to the LTP system we developed a co-path scanning LTP (CSLTP) system to test the cylindrical aspherical surface which used in X-ray space optics. To reduce the mistake caused by air turbulence and manufacture faults of optical elements used the CSLTP is designed with the least difference between the testing beam path and the reference beam path. Also it uses multiple-beam interference but double beam interference to reduce the width of beam fringe. This improves the position precision of the beam fringe on the image plane. 2010 SPIE.
	In situ long trace profiler for measurement of Wolter type-I mirror (EI CONFERENCE) 会议论文 OAI收割 Advances in Metrology for X-Ray and EUV Optics III, August 1, 2010 - August 2, 2010, San Diego, CA, United states 作者: Chen B.; Chen B. 收藏 \| 浏览/下载：27/0 \| 提交时间：2013/03/25 The surface profile of Wolter type-I mirror has a great impact on the performance of Solar X-ray Telescope. According to the existing fabrication instrument and experimental conditions in our lab an in situ Long Trace Profiler is developed and set up on the fabrication instrument in order to measure the surface profile of Wolter mirror in real time during fabrication process. Its working mechanism structural parameters and data processing algorithm are investigated. The prototype calibrated by a standard plane mirror is used to measure a sample of Wolter type-I mirror. The results show that our prototype can achieve an accuracy of 2.6rad rms for slope error with a stability of 1.33rad during the whole measurement period. This can meet further fabrication requirements. 2010 Copyright SPIE - The International Society for Optical Engineering.
	Developing of in-suit long trance profiler for testing slope error of aspherical optical Elements (EI CONFERENCE) 会议论文 OAI收割 ICO20: Optical Devices and Instruments, August 21, 2005 - August 26, 2005, Changchun, China Zhou C.; Li H.; Chen C.; Zhou C.; Qian S. 收藏 \| 浏览/下载：35/0 \| 提交时间：2013/03/25 Profile error of super smooth surface of optical elements at X-ray/EUV in synchrotron radiation (SR) light beam line is described as slope error of them generally. The Long Trace Profiler (LPT) is used for testing surface slope error of SR optical elements in world generally. It is requisite to use In-suit LTP measuring surface thermal distortion of SR optical elements with high heat under high bright SR source. Authors design an In-suit LTP by means of co-path interferometer with pencil light beam. The instrument not only can be used for testing slope error of mirrors in Lab. also in situation test the distortion of mirror with high heat load at synchrotron light beam line. The device can be used to test various absolute surface figures of optical elements such as aspherieal spherical and plane. It is needless standard reference surface. It is named by LTP-III. This paper describes its basic operating principle optical system mechanical constructions DC serve motor control system array detector data acquisition system and computer system for controlling and data analysis of LTP-III. The Instrument has advantages of high accuracy low cost multifunction and wide application. Length of surface measured of optical element accuracy is 0.04 arcsec.