中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
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1.3-mu m in(ga)as quantum-dot vcsels fabricated by dielectric-free approach with surface-relief process 期刊论文  iSwitch采集
Ieee photonics technology letters, 2011, 卷号: 23, 期号: 2, 页码: 91-93
作者:  
Xu, D. W.;  Yoon, S. F.;  Ding, Y.;  Tong, C. Z.;  Fan, W. J.
收藏  |  浏览/下载:27/0  |  提交时间:2019/05/12
1.3-mu m In(Ga)As Quantum-Dot VCSELs Fabricated by Dielectric-Free Approach With Surface-Relief Process 期刊论文  OAI收割
ieee photonics technology letters, 2011, 卷号: 23, 期号: 2, 页码: 91-93
Xu DW; Yoon SF; Ding Y; Tong CZ; Fan WJ; Zhao LJ
收藏  |  浏览/下载:120/2  |  提交时间:2011/07/05
Application of photoresist melting method to the fabrication of holographic grating (EI CONFERENCE) 会议论文  OAI收割
ICO20: Optical Devices and Instruments, August 21, 2005 - August 26, 2005, Changchun, China
作者:  
Li W.;  Tang Y.;  Yu H.;  Gao J.;  Li W.
收藏  |  浏览/下载:63/0  |  提交时间:2013/03/25
A new technique of reducing surface roughness of photoresist grating is presented. In this paper  photoresist melting method  which is low-cost  short-period and easy realization  is presented. In addition  the influence of photoresist melting on the groove profile of the photoresist grating is investigated. Experimental results show that the surface roughness reduces due to surface tension  when developed photoresist is heated to be melting state by this method. In experiment  when the melted photoresist grating is etched by ion beam  the surface relief grating possessing preferable groove profile is obtained on K9 glass substrate  then the surface is evaporated by aluminum using vacuum evaporation  holographic grating with preferable groove profile is successively fabricated.