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CAS IR Grid
机构
半导体研究所 [2]
长春光学精密机械与物... [1]
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期刊论文 [2]
会议论文 [1]
发表日期
2011 [2]
2005 [1]
学科主题
半导体材料 [1]
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1.3-mu m in(ga)as quantum-dot vcsels fabricated by dielectric-free approach with surface-relief process
期刊论文
iSwitch采集
Ieee photonics technology letters, 2011, 卷号: 23, 期号: 2, 页码: 91-93
作者:
Xu, D. W.
;
Yoon, S. F.
;
Ding, Y.
;
Tong, C. Z.
;
Fan, W. J.
收藏
  |  
浏览/下载:27/0
  |  
提交时间:2019/05/12
Dielectric-free approach
Quantum dot (qd)
Surface-relief technique
Vertical-cavity surface-emitting lasers (vcsels)
1.3-mu m In(Ga)As Quantum-Dot VCSELs Fabricated by Dielectric-Free Approach With Surface-Relief Process
期刊论文
OAI收割
ieee photonics technology letters, 2011, 卷号: 23, 期号: 2, 页码: 91-93
Xu DW
;
Yoon SF
;
Ding Y
;
Tong CZ
;
Fan WJ
;
Zhao LJ
收藏
  |  
浏览/下载:120/2
  |  
提交时间:2011/07/05
Dielectric-free approach
quantum dot (QD)
surface-relief technique
vertical-cavity surface-emitting lasers (VCSELs)
EMITTING LASERS
Application of photoresist melting method to the fabrication of holographic grating (EI CONFERENCE)
会议论文
OAI收割
ICO20: Optical Devices and Instruments, August 21, 2005 - August 26, 2005, Changchun, China
作者:
Li W.
;
Tang Y.
;
Yu H.
;
Gao J.
;
Li W.
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  |  
浏览/下载:63/0
  |  
提交时间:2013/03/25
A new technique of reducing surface roughness of photoresist grating is presented. In this paper
photoresist melting method
which is low-cost
short-period and easy realization
is presented. In addition
the influence of photoresist melting on the groove profile of the photoresist grating is investigated. Experimental results show that the surface roughness reduces due to surface tension
when developed photoresist is heated to be melting state by this method. In experiment
when the melted photoresist grating is etched by ion beam
the surface relief grating possessing preferable groove profile is obtained on K9 glass substrate
then the surface is evaporated by aluminum using vacuum evaporation
holographic grating with preferable groove profile is successively fabricated.