机构

• 上海微系统与信息技术... [2]
• 长春光学精密机械与物... [1]
• 大连化学物理研究所 [1]
• 中国科学院大学 [1]
• 自动化研究所 [1]

采集方式

• OAI收割 [5]
• iSwitch采集 [1]

内容类型

• 期刊论文 [5]
• 会议论文 [1]

发表日期

• 2020 [1]
• 2015 [1]
• 2007 [2]
• 2006 [1]
• 2003 [1]

学科主题

• Electroche... [1]
• Engineerin... [1]

筛选

浏览/检索结果: 共6条，第1-6条 帮助 条数/页： 5101520253035404550556065707580859095100 排序方式： 请选择题名升序题名降序提交时间升序提交时间降序作者升序作者降序发表日期升序发表日期降序 Scheduling Dual-Arm Cluster Tools With Multiple Wafer Types and Residency Time Constraints 期刊论文  OAI收割 IEEE/CAA Journal of Automatica Sinica, 2020, 卷号: 7, 期号: 3, 页码: 776-789 作者:  Jipeng Wang;  Hesuan Hu;  Chunrong Pan;  Yuan Zhou;  Liang Li   |  收藏  |  浏览/下载：22/0  |  提交时间：2021/03/11 Cluster tools  multiple wafer types  scheduling  semiconductor manufacturing  wafer fabrication   Length-extensional resonating gas sensors with ic-foundry compatible low-cost fabrication in non-soi single-wafer 期刊论文  iSwitch采集 Microelectronic engineering, 2015, 卷号: 136, 页码: 1-7 作者:  Yu, Feng;  Xu, Pengcheng;  Wang, Jiachou;  Li, Xinxin 收藏  |  浏览/下载：78/0  |  提交时间：2019/05/10 Resonant gas sensor  Extensional bulk resonance mode  Non-soi wafer  Low-cost fabrication  Integrated-circuit foundry  Organo-phosphorous pesticide   Development of an experimental EUVL system (EI CONFERENCE) 会议论文  OAI收割 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies, AOMATT 2007: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, July 8, 2007 - July 12, 2007, Chengdu, China 作者:  Wang L.-P.;  Zhang L.-C.;  Jin C.-S. 收藏  |  浏览/下载：18/0  |  提交时间：2013/03/25 An experimental EUVL system has been developed to investigate EUV imaging system design  component fabrication  assembly technique and experimental process. The system includes a laser produced plasma (LPP) source  an ellipsoidal condenser  a transmission mask  a reduced projection optics  and vacuum system. We designed a 10:1 reduction projection optics using Schwarzschild system with spherical mirrors to achieve 0.1m resolution. The Schwarzschild optics coated with Mo/Si multilayers was assembled with wavefront error (WFE) of 0.014 waves RMS at 632.8nm wavelength under computer-aided alignment method. Using this system a fine pattern of less than 0.25m covering a 0.1mm diameter image field of view was clearly replicated on resist-coated wafer.   A preliminary study of a miniature planar 6-cell PEMFC stack combined with a small hydrogen storage canister 期刊论文  OAI收割 JOURNAL OF POWER SOURCES, 2007, 卷号: 166, 期号: 2, 页码: 441-444 Zhang, XG; Zheng, D; Wang, T; Chen, C; Cao, JY; Yan, J; Wang, WM; Liu, JY; Liu, HH; Tian, J; Li, XX; Yang, H; Xia, BJ 收藏  |  浏览/下载：16/0  |  提交时间：2011/12/17 METHANOL FUEL-CELL  SILICON-WAFER  FABRICATION  DESIGN  POWER  REFORMER   A self-breathing proton-exchange-membrane fuel-cell pack with optimal design and microfabrication 期刊论文  OAI收割 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2006, 卷号: 15, 期号: 5, 页码: 1088-1097 Chen,C; Li,XX; Wang,T; Zhang,XG; Li,JF; Dong,PT; Zheng,D; Xia,BJ 收藏  |  浏览/下载：19/0  |  提交时间：2011/12/17 POROUS SILICON  FABRICATION  PERFORMANCE  TECHNOLOGY  ELECTRODES  TRANSPORT  WAFER   Fabrication of miniature silicon wafer fuel cells with improved performance 期刊论文  OAI收割 journal of power sources, 2003, 卷号: 124, 期号: 1, 页码: 40-46 作者:  Yu, JR;  Cheng, P;  Ma, ZQ;  Yi, BL 收藏  |  浏览/下载：30/0  |  提交时间：2015/11/09 proton exchange membrane fuel cell  miniature fuel cell  micro-fabrication  silicon wafer  Cu/Au current collector