机构

• 西安光学精密机械研究... [2]
• 长春光学精密机械与物... [1]
• 光电技术研究所 [1]

采集方式

• OAI收割 [4]

内容类型

• 会议论文 [4]

发表日期

• 2023 [1]
• 2020 [1]
• 2014 [1]
• 2010 [1]

学科主题

• Density (o... [1]

筛选

浏览/检索结果: 共4条，第1-4条 帮助 限定条件 内容类型：会议论文     条数/页： 5101520253035404550556065707580859095100 排序方式： 请选择提交时间升序提交时间降序发表日期升序发表日期降序题名升序题名降序作者升序作者降序 Annular sampling cylindrical vector beam polarization measurement error analysis based on the Stokes parameter method 会议论文  OAI收割 Beijing, China, 2023-07-25 作者:  Chang, Lingying;  Chi, Liang;  Chen, Kui;  Qiu, Yuehong;  Li, Jiayi   |  收藏  |  浏览/下载：2/0  |  提交时间：2024/02/07 cylindrical vector beams  polarization detection  measurement error  AOP   The design and fabrication of freeform lenses for generating complex illumination patterns on curved surfaces 会议论文  OAI收割 Xian, PEOPLES R CHINA, 2020-10-15 作者:  Zhang, Yupeng;  Mao, Xianglong;  Xie, Yongjun;  Li, Jinpeng;  Wang, Fengbiao   |  收藏  |  浏览/下载：19/0  |  提交时间：2021/07/23 freeform optics  nonimaging optics  illumination design  diamond machining   A hybrid algorithm for the design of diffractive optical element for beam shaping 会议论文  OAI收割 Proceedings of SPIE: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design Manufacturing, and Testing of Micro- and Nano-Optical Devices, and Systems, 2014 作者:  Yin, Kewei;  Huang, Zhiqiang;  Lin, Wumei;  Xing, Tingwen 收藏  |  浏览/下载：12/0  |  提交时间：2016/11/23 A design of beam shaping unit for 193nm lithography illumination system using angular spectrum theory (EI CONFERENCE) 会议论文  OAI收割 6th International Symposium on Precision Engineering Measurements and Instrumentation, August 8, 2010 - August 11, 2010, Hangzhou, China 作者:  Zhao Y.;  Zhang W.;  Zhang W.;  Li S.;  Gong Y. 收藏  |  浏览/下载：16/0  |  提交时间：2013/03/25 Off-axis illumination (OAI) technology is widely used to enhance resolution for deep ultraviolet lithography. The realizing methods of OAI include geometrical optics method and physical optics method. However  the former has the disadvantage of weak intensity distribution controlling ability  and the latter introduces simulation errors evidently when dealing with near field diffraction propagation. A diffractive optical element (DOE) designing method using plane wave angular spectrum theory is presented in this paper. Several kinds of OAI modes at near field away from DOE can be realized  and simulation errors and the size of illuminator are also reduced. According to studying the relationships of the sampling point distance of DOE  light beam propagation distance  and the structure of the beam shaping unit  a method of determining the designing parameters is discussed. Using this method  several illumination modes are realized  and simulation results show that all diffraction efficiencies reach up to 84%. The method of DOE manufacturing is analyzed at last  and it is proven to be feasible. 2010 SPIE.