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• 上海微系统与信息技术... [8]

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• OAI收割 [8]

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• 期刊论文 [6]
• 会议论文 [2]

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• 2011 [2]
• 2010 [1]
• 2007 [1]
• 2005 [1]
• 2001 [1]
• 1999 [1]
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浏览/检索结果: 共8条，第1-8条 帮助 限定条件 专题：上海微系统与信息技术研究所    第一署名单位    第一作者单位    通讯作者单位     条数/页： 5101520253035404550556065707580859095100 排序方式： 请选择提交时间升序提交时间降序发表日期升序发表日期降序题名升序题名降序作者升序作者降序 Thermopile IR detector with filter cointegrated by wafer bonding technique 会议论文  OAI收割 IEEE MEMS 2011:the 24th IEEE Conference on Micro Electro mechanicsal Systems, 2011 Xu, D. H.; Xiong, B.; Jing, E. R.; Wu, G. Q.; Wang, Y. L. 收藏  |  浏览/下载：22/0  |  提交时间：2012/05/04 SELF-ASSEMBLY AND TRANSFERRING OF PHOTORESIST AS PLANAR LAYER FOR FABRICATION OF TSV AND FREE STANDING BEAMS 会议论文  OAI收割 Transducers’11:The 16th International Conference on Solid-State Sensors, Actuators and Microsystems, 2011 Z. Y. Wu, H. Yang, C. G. Dou, Y. H. Wu, X. X. Li and Y. L. Wang 收藏  |  浏览/下载：9/0  |  提交时间：2012/05/04 Fast speed nano-sized macropore formation on highly-doped n-type silicon via strong oxidizers 期刊论文  OAI收割 ELECTROCHEMISTRY COMMUNICATIONS, 2010, 卷号: 12, 期号: 2 Pages, 页码: 603 D. H. Ge, J. W. Jiao, S. Zhang, Y. L. Wang 收藏  |  浏览/下载：10/0  |  提交时间：2012/05/12 A novel approach to compare the charge buildup induced by Co-60 and X-ray radiation in SOI buried oxides 期刊论文  OAI收割 ICSICT-2006: 2006 8th International Conference on Solid-State and Integrated Circuit Technology, Proceedings, ICSICT-2006: 2006 8th International Conference on Solid-State and Integrated Circuit Technology, Proceedings, 2007, p 257-259, 2007, 页码: 257-259 Tian, H. (State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences); Zhang, Zh.X.; Zhang, E.X.; He, W.; Yang, H.; Yu, W.J.; Wang, X 收藏  |  浏览/下载：7/0  |  提交时间：2012/06/13 Electron emission suppression characteristic of molybdenum grid coated with Hf by ion beam assisted deposition 期刊论文  OAI收割 Gongneng Cailiao/Journal of Functional Materials, v 36, n 11, November, 2005, p 1673-1675 Language: Chinese, 2005, 卷号: 36, 期号: 11, 页码: 1673-1675 J. Jiang; B. Y. Jiang; C. X. Re; T. Feng; . Wang X. H. Liu; S. C. Zou 收藏  |  浏览/下载：6/0  |  提交时间：2012/06/13 Effect of implant dose and energy on formation of thin SOI structure in SIMOX using water plasma 期刊论文  OAI收割 Presentation at 2001 IEEE Internation SOI Conference, 2001, 页码: 43-44 J. Chen, M. Chen, X. Wang, Y. M. Dong, Z. H. Zheng, X. Wang 收藏  |  浏览/下载：12/0  |  提交时间：2012/05/31 Effects of titanium and aluminum incorporations on the structure of boron nitride thin films 期刊论文  OAI收割 Diamond and Related Materials 8(1999)386-390；Presented at the Diamond'98,Conference Information: 9th European Conference on Diamond, Diamond-like Materials, Nitrides and Silicon Carbide (Diamond 1998), SEP 13-18, 1998 IRAKLION, GREECE, 1999, 卷号: 8, 页码: 386-390 A. Kolitsch, X. Wang, D. Manova, W. Fukarek, H. Reuther and W. Moeller 收藏  |  浏览/下载：25/0  |  提交时间：2012/06/19 Filed emission from amorphous diamond films prepared by filtered arc deposition 期刊论文  OAI收割 Presented at 10th Inter. Conf. on Thin Films, Spain, 1996, 1998, 卷号: 317, 期号: 1-2, 页码: 356-358 X. Wang, J. P. Zhao, Z. Y. Chen, S. Q. Yang, T. S. Shi and X. H. Liu 收藏  |  浏览/下载：2/0  |  提交时间：2012/06/19