中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
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  • 2018 [3]
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Effect of Non-Ionic Surfactant on Chemical Mechanical Planarization Performance in Alkaline Copper Slurry 期刊论文  OAI收割
INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING, 2018
作者:  
Chen L(陈岚);  Cao H(曹鹤);  Xu QZ(徐勤志);  Yang F(杨飞)
  |  收藏  |  浏览/下载:15/0  |  提交时间:2019/04/25
An Oxide Chemical Mechanical Planarization Model for HKMG Structures 期刊论文  OAI收割
ECS Journal of Solid State Science and Technology, 2018
作者:  
Sun Y(孙艳);  Liu HW(刘宏伟);  Chen L(陈岚);  Xu QZ(徐勤志);  Yang F(杨飞)
  |  收藏  |  浏览/下载:8/0  |  提交时间:2019/04/25
Integral Equation Prediction of the Structure of Alternating Copolymer Nanocomposites near a Substrate 期刊论文  OAI收割
Langmuir, 2018
作者:  
Chen L(陈岚);  Xu QZ(徐勤志);  Yang F(杨飞);  Cao H(曹鹤)
  |  收藏  |  浏览/下载:13/0  |  提交时间:2019/04/25