机构

• 光电技术研究所 [10]

采集方式

• OAI收割 [10]

内容类型

• 期刊论文 [10]

发表日期

• 2020 [3]
• 2019 [3]
• 2016 [1]
• 2015 [3]

学科主题

• Cost effec... [1]

筛选

浏览/检索结果: 共10条，第1-10条 帮助 条数/页： 5101520253035404550556065707580859095100 排序方式： 请选择题名升序题名降序提交时间升序提交时间降序作者升序作者降序发表日期升序发表日期降序 Facile large-area uniform photolithography of membrane diffractive lens based on vacuum assisted self contact method 期刊论文  OAI收割 SCIENTIFIC REPORTS, 2020, 卷号: 10, 期号: 1, 页码: 9005-1-8 作者:  Gao, Guohan;  Wang, Lihua;  Shi, Heng;  Liu, Dun;  Fan, Bin   |  收藏  |  浏览/下载：16/0  |  提交时间：2021/05/11 Simulation of Discharge Characteristics for the Plasma Etching of Large Area SiO2 Substrates 期刊论文  OAI收割 JOURNAL OF RUSSIAN LASER RESEARCH, 2020, 卷号: 41, 期号: 3, 页码: 258-267 作者:  Zhang, Jingwen;  Fan, Bin;  Li, Zhiwei;  Gao, Guohan;  Li, Bincheng   |  收藏  |  浏览/下载：30/0  |  提交时间：2021/05/11 Reactive Ion Etching  Capacitive Coupled Discharge  Fluid Simulation  Discharge Parameter  Large Area Sio2 Substrates  Plasma Radial Uniformity   Investigation of Photoelastic Property and Stress Analysis for Optical Polyimide Membrane through Stress Birefringence Method 期刊论文  OAI收割 COATINGS, 2020, 卷号: 10, 期号: 1, 页码: 10010056-1-10 作者:  Gao, Guohan;  Mao, Danbo;  Jiang, Renkui;  Li, Zhiwei;  Liu, Xin   |  收藏  |  浏览/下载：21/0  |  提交时间：2021/05/11 Optical Polyimide Membrane  Stress Analysis  Photoelastic Property  Stress Birefringence   Highly accurate positioned, rapid figure correction by reactive ion etching for large aperture lightweight membrane optical elements 期刊论文  OAI收割 OSA Continuum, 2019, 卷号: 2, 期号: 12, 页码: 3350-3357 作者:  Li, Zhiwei;  Shao, Junming   |  收藏  |  浏览/下载：37/0  |  提交时间：2021/05/06 Effect of Wet Expansion Behavior on Polyimide Membrane Diffractive Lens 期刊论文  OAI收割 COATINGS, 2019, 卷号: 9, 期号: 9 作者:  Gao, Guohan;  Mao, Danbo;  Fan, Bin;  Guan, Chunlin   |  收藏  |  浏览/下载：14/0  |  提交时间：2021/05/06 optical polyimide membrane  diffractive lens  coefficient of wet expansion (CWE)  wave-front errors   Fabrication of polyimide films with imaging quality using a spin-coating method for potential optical applications 期刊论文  OAI收割 Journal of Polymer Engineering, 2019 作者:  Mao, Danbo;  Lv, Gang;  Gao, Guohan;  Fan, Bin   |  收藏  |  浏览/下载：23/0  |  提交时间：2021/05/06 Large area and deep sub-wavelength interference lithography employing odd surface plasmon modes 期刊论文  OAI收割 Scientific Reports, 2016, 卷号: 6 作者:  Liu, Liqin;  Luo, Yunfei;  Zhao, Zeyu;  Zhang, Wei;  Gao, Guohan 收藏  |  浏览/下载：26/0  |  提交时间：2016/10/27 Squeezing Bulk Plasmon Polaritons through Hyperbolic Metamaterials for Large Area Deep Subwavelength Interference Lithography 期刊论文  OAI收割 ADVANCED OPTICAL MATERIALS, 2015, 卷号: 3, 期号: 9, 页码: 1248-1256 作者:  Liang, Gaofeng;  Wang, Changtao;  Zhao, Zeyu;  Wang, Yanqin;  Yao, Na 收藏  |  浏览/下载：42/0  |  提交时间：2015/12/04 Squeezing Bulk Plasmon Polaritons through Hyperbolic Metamaterials for Large Area Deep Subwavelength Interference Lithography 期刊论文  OAI收割 Advanced Optical Materials, 2015, 卷号: 3, 期号: 9, 页码: 1248-1256 作者:  Liang, Gaofeng;  Wang, Changtao;  Zhao, Zeyu;  Wang, Yanqin;  Yao, Na 收藏  |  浏览/下载：28/0  |  提交时间：2016/11/22 Enhancing aspect profile of half-pitch 32 nm and 22 nm lithography with plasmonic cavity lens 期刊论文  OAI收割 APPLIED PHYSICS LETTERS, 2015, 卷号: 106, 期号: 9, 页码: 93110 作者:  Gao, Ping;  Yao, Na;  Wang, Changtao;  Zhao, Zeyu;  Luo, Yunfei 收藏  |  浏览/下载：25/0  |  提交时间：2016/11/22