中国科学院机构知识库网格系统: 检索

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	Optimization on benzocyclobutene-based CMUT fabrication with an inverse structure 期刊论文 OAI收割 SENSORS AND ACTUATORS A-PHYSICAL, 2018, 卷号: 281, 页码: 1-8 作者: Li, Zhenhao; Na, Shuai; Chen, Albert I. H.; Wong, Lawrence L. P.; Sun, Zhendong \| 收藏 \| 浏览/下载：38/0 \| 提交时间：2018/11/16 Capacitive micromachined ultrasonic transducer Adhesive wafer bonding Photosensitive benzocyclobutene Resonator
	Development of a Novel CMUT-Based Concentric Dual-Element Ultrasonic Transducer: Design, Fabrication, and Characterization 期刊论文 OAI收割 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2018, 卷号: 27, 期号: 3, 页码: 538-546 作者: Zheng, Zhou; Na, Shuai; Chen, Albert I. -Hsiang; Li, Zhenhao; Wong, Lawrence L. P. \| 收藏 \| 浏览/下载：46/0 \| 提交时间：2018/07/30 Annular element capacitive micromachined ultrasonic transducer (CMUT) concentric deep reactive-ion etching dual-element hybrid transducer
	Numerical and experimental study of radiation induced conductivity change of carbon nanotube filled polymers 期刊论文 OAI收割 NANOTECHNOLOGY, 2017, 卷号: 28, 期号: 25, 页码: 10 作者: Liu, Fangjun; Sun, Yonghai; Sun, Weijie; Sun, Zhendong; Yeow, John T. W. \| 收藏 \| 浏览/下载：22/0 \| 提交时间：2018/07/30 carbon nanotube electrical conductivity radiation sensor 3D model alignment
	Closed-loop control of a 2-D mems micromirror with sidewall electrodes for a laser scanning microscope system 期刊论文 OAI收割 INTERNATIONAL JOURNAL OF OPTOMECHATRONICS, 2016, 卷号: 10, 期号: 1, 页码: 1-13 作者: Chen, Hui; Chen, Albert; Sun, Wei Jie; Sun, Zhen Dong; Yeow, John T. W. \| 收藏 \| 浏览/下载：23/0 \| 提交时间：2018/07/30 micromirror adaptive algorithm sidewall electrodes 2-D image SMC MEMS laser scanning microscope