中国科学院机构知识库网格系统: 检索

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	Design of Optical System for Ultra-Large Range Line-Sweep Spectral Confocal Displacement Sensor 期刊论文 OAI收割 SENSORS, 2024, 卷号: 24, 期号: 3 作者: Yang, Weiguang; Du, Jian; Qi, Meijie; Yan, Jiayue; Cheng, Mohan \| 收藏 \| 浏览/下载：17/0 \| 提交时间：2024/03/15 spectral confocal precision measurement dispersive objective optical design imaging spectrometer
	Design of a large-range dispersive objective for line-sweep spectral confocal displacement sensors 会议论文 OAI收割 Nanjing, China, 2023-10-22 作者: Yang, Weiguang; Qi, Meijie; Yan, Jiayue; Cheng, Mohan; Zhang, Zhoufeng \| 收藏 \| 浏览/下载：5/0 \| 提交时间：2024/08/27 spectral confocal precision measurement dispersive objective double telecentric lens optical design
	Signal fluctuation suppression in confocal measurements by laser modulation and power monitoring 期刊论文 OAI收割 MEASUREMENT, 2023, 卷号: 214, 页码: 8 作者: Wang, Shaoyi; Li, Shoujie; Ye, Wangquan; Song, Wenhua; Zhang, Xuanbo \| 收藏 \| 浏览/下载：17/0 \| 提交时间：2023/12/13 Signal fluctuation suppression Confocal measurement Power monitoring Laser modulation Tomography
	Subsurface Damage Measurement in Silicon Wafers with Cross-Polarisation Confocal Microscopy 期刊论文 OAI收割 International Journal of Nanomanufacturing, 2006, 卷号: 1, 期号: 2, 页码: 272-282 - 收藏 \| 浏览/下载：24/0 \| 提交时间：2016/06/05 cross-polarisation confocal microscopy grinding manufacturing damage measurement nondestructive evaluation NDE silicon wafers subsurface damage SSD semiconductor devices nanomanufacturing
	Noninterferometric measurement of lead zirconate titanate inverse piezoelectric extension 期刊论文 OAI收割 opt. eng., 2001, 卷号: 40, 期号: 6, 页码: 909, 913 Yang LS; Liu L; Wang GY; 徐至展收藏 \| 浏览/下载：1041/38 \| 提交时间：2009/09/18 PZT actuator inverse piezoelectric extension measurement differential confocal microscopy