机构

• 长春光学精密机械与物... [2]
• 力学研究所 [1]
• 中国科学院大学 [1]

采集方式

• OAI收割 [3]
• iSwitch采集 [1]

内容类型

• 会议论文 [2]
• 期刊论文 [2]

发表日期

• 2025 [1]
• 2010 [1]
• 2007 [2]

学科主题

筛选

浏览/检索结果: 共4条，第1-4条 帮助 条数/页： 5101520253035404550556065707580859095100 排序方式： 请选择提交时间升序提交时间降序发表日期升序发表日期降序题名升序题名降序作者升序作者降序 Numerical investigation of particle transport and deposition mechanisms driven by multiphase explosion coupling with buffer gas stream 期刊论文  OAI收割 INTERNATIONAL JOURNAL OF MULTIPHASE FLOW, 2025, 卷号: 192, 页码: 32 作者:  Liu, Leqi;  Meng BQ(孟宝清);  Teng, Honghui;  Tian, Baolin   |  收藏  |   Analysis of measuring errors for the visible light phase-shifting point diffraction interferometer (EI CONFERENCE) 会议论文  OAI收割 2010 OSA-IEEE-COS Advances in Optoelectronics and Micro/Nano-Optics, AOM 2010, December 3, 2010 - December 6, 2010, Guangzhou, China 作者:  Zhang Y. 收藏  |   Pattern density dependence of thermal deformation of extreme ultraviolet mask and its impact on full field lithography performance 期刊论文  iSwitch采集 Japanese journal of applied physics part 1-regular papers brief communications & review papers, 2007, 卷号: 46, 期号: 8a, 页码: 5104-5111 作者:  Li, Yanqiu;  Zhou, Pengfei;  Fei, Zhang 收藏  |   Development of an experimental EUVL system (EI CONFERENCE) 会议论文  OAI收割 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies, AOMATT 2007: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, July 8, 2007 - July 12, 2007, Chengdu, China 作者:  Wang L.-P.;  Zhang L.-C.;  Jin C.-S. 收藏  |