机构

• 沈阳自动化研究所 [4]

采集方式

• OAI收割 [4]

内容类型

• 会议论文 [4]

发表日期

• 2018 [1]
• 2015 [1]
• 2014 [1]
• 2013 [1]

学科主题

筛选

浏览/检索结果: 共4条，第1-4条 帮助 条数/页： 5101520253035404550556065707580859095100 排序方式： 请选择题名升序题名降序提交时间升序提交时间降序作者升序作者降序发表日期升序发表日期降序 Design and implementation of FA networking control software that accords with SEMI standards 会议论文  OAI收割 Qingdao, China, November 2-4, 2018 作者:  Liu MZ(刘明哲);  Wang CX(王晨曦);  Xu AD(徐皑冬);  Jin N(金妮)   |  收藏  |  浏览/下载：23/0  |  提交时间：2019/03/30 IC equipment  SEMI  FA   Research on the Factory Automation Software Based on the SEMI Standard 会议论文  OAI收割 2015 3rd International Conference on Material, Mechanical and Manufacturing Engineering (IC3ME 2015), Guangzhou, China, June 27-28, 2015 作者:  Wang CX(王晨曦);  Liu MZ(刘明哲);  Xu AD(徐皑冬);  Jin N(金妮) 收藏  |  浏览/下载：18/0  |  提交时间：2015/12/19 IC equipment  SEMI  FA   Research and development of a multiple data source curve drawing software for IC equipment 会议论文  OAI收割 2014 International Conference on Manufacturing and Engineering Technology (ICMET), Sanya, China, October 17-19, 2014 作者:  Jin N(金妮);  Xu AD(徐皑冬);  Liu MZ(刘明哲);  Wang K(王锴);  Wang CX(王晨曦) 收藏  |  浏览/下载：32/0  |  提交时间：2014/12/29 IC equipment  control system  C# language   Design and Development of Open Graphical User Interface Software for IC Equipment 会议论文  OAI收割 2013 International Conference on Electrical, Control and Automation Engineering (ECAE2013), Hongkong, China, December 1-2, 2013 作者:  Jin N(金妮);  Xu AD(徐皑冬);  Liu MZ(刘明哲);  Wang K(王锴) 收藏  |  浏览/下载：30/0  |  提交时间：2014/12/29 IC equipment  Control system  Graphical user interface