中国科学院机构知识库网格系统: 检索

浏览/检索结果: 共7条，第1-7条

帮助

条数/页：排序方式：
	Desensitization design method of unobscured three-mirror anastigmatic optical systems with an adjustment-optimization-evaluation process 期刊论文 OAI收割 Applied Optics, 2018, 卷号: 57, 期号: 6, 页码: 1472-1481 作者: Meng, Q. Y.; Wang, H. Y.; Wang, W.; Yan, Z. Q. \| 收藏 \| 浏览/下载：23/0 \| 提交时间：2019/09/17 freeform telescope misalignment aberrations surfaces mirror integration field lens Optics
	Ocular Anterior Segment Biometry and High-Order Wavefront Aberrations During Accommodation 期刊论文 OAI收割 INVESTIGATIVE OPHTHALMOLOGY & VISUAL SCIENCE, 2013, 卷号: 54, 期号: 10, 页码: 7028-7037 作者: Yuan, Yimin; Shao, Yilei; Tao, Aizhu; Shen, Meixiao; Wang, Jianhua 收藏 \| 浏览/下载：30/0 \| 提交时间：2015/04/17 accommodation optical coherence tomography aberrations anterior segment crystalline lens pupil
	Design and tolerance analysis of compensator for high order aspheric surface testing (EI CONFERENCE) 会议论文 OAI收割 2009 International Conference on Optical Instruments and Technology - Optoelectronic Measurement Technology and Systems, October 19, 2009 - October 22, 2009, Shanghai, China 作者: Chen X.; Liu W.; Chen X.; Chen X. 收藏 \| 浏览/下载：29/0 \| 提交时间：2013/03/25 High accuracy is required in surface testing of 90nm nodal point lithography projecting lens. By comparing various aspheric surface testing methods the structure layout of the compensator is a meniscus positive lens combined with a Plano-convex positive lens. The design results indicate that: primary and high order aberrations are balanced well we adopt Offner null compensator to test the aspheric surface in the point diffraction interferometer at last. In this paper MTF exceeds diffraction limit an Offner compensator is presented on the base of the third order aberration theory to test concave aspheric surface root-mean-square (RMS) of wave front error /167. The F-number of the system can achieve F/1.64. By the analysis of the process of aspheric surface testing with the designed system the optical construction parameters of which is determined by introducing equal-quantities spherical aberration to compensate all orders of aspheric coefficients. The field of view of the system is 0.02 a loosen distribution of the tolerance was presented based on the accuracy of measuring apparatus. 2009 SPIE.
	Coma measurement by use of an alternating phase-shifting mask mark with a specific phase width 期刊论文 OAI收割 appl. optics, 2009, 卷号: 48, 期号: 2, 页码: 261, 269 Qiu Zicheng; 王向朝; Yuan Qiongyan; Wang Fan 收藏 \| 浏览/下载：1153/199 \| 提交时间：2009/09/18 LITHOGRAPHY SIMULATION ABERRATION MEASUREMENT PROJECTION OPTICS LENS ABERRATIONS TOOLS
	Design of dual-FOV refractive/diffractive LWIR optical system (EI CONFERENCE) 会议论文 OAI收割 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies, AOMATT 2007: Advanced Optical Manufacturing Technologies, July 8, 2007 - July 12, 2007, Chengdu, China 作者: Wang L.-J.; Zhang J.-P.; Wang L.-J.; Zhang X.; Zhang X. 收藏 \| 浏览/下载：33/0 \| 提交时间：2013/03/25 An infrared-optical zoom system using binary element is proposed in this paper. The two main advantages of the zoom system introducing here are: bigger F-number and lower cost. The primary optical properties are: F/#=1 Second Others zoom ratio =1:4 binary element is used to correct the chromatical aberration by taking the advantage of negative dispersion characteristics and the cost of the system is lower than that of conventional ones with Zinc Selenide (Znse) material at the same level. In the binary element is rotational symmetric with one step which is easy to fabricate in order to balance 5th spherical aberration and dual field are 26.6 and 5.6respectively. Wider field of view is used for search and the smaller one is used for imaging details. This system uses un-cooled infrared detector with 320240 pixels and 45m pixel size. The F-number matches the sensitivity range of the detector array. Three aspects are considered during design process to make the system more satisfactory and more achievable. First 5th coma aberration and 5th astigmatic aberration the manner of zoom is accomplished by exchanging tow lenses into the smaller field of view system layout. The lens exchange manner faces the requirement of simple system structure and good image quality in both focal points. It can also make the system more feasible in the alignment process than mechanical-zooming manner and optical-zooming manner high-order asphere surfaces with 2th order to 10 th order are also hired in the system. Asphere surface is useful in compressing the system and improving optical system transmittance. This kind asphere surface is on industrial level featuring low cost and easy to fabricate. It is shown that good image quality can achieved by implementing five Germanium lenses and the transmittance of system is 72%. All aberrations are diffraction-limited both spherical aberration and astigmatic aberration are corrected. When the field of view(FOV) is 26.6 and the focal length is 152mm MTF at Nyquist frequency(11lp/mm) is great than 0.7. The spherical aberration is -0.0073. The coma aberration is 0.0978 and the astigmatic aberration is -0.013. When the field of view(FOV) is 5.6 and the focal length is 38mm MTF at Nyquist frequency is great than 0.8 with spherical aberration -0.0046 the coma aberration 0.055 and astigmatic aberration 0.034.
	Coma measurement using a PSM and transmission image sensor 期刊论文 OAI收割 optik, 2006, 卷号: 117, 期号: 1, 页码: 21, 25 Wang F; Wang XZ; 马明英; Zhang DQ; Shi WJ; Hu HM 收藏 \| 浏览/下载：1757/343 \| 提交时间：2009/09/18 optical lithography aberrations projection lens image quality Zernike coefficients
	Measurement technique for in situ characterizing aberrations of projection optics in lithographic tools 期刊论文 OAI收割 appl. optics, 2006, 卷号: 45, 期号: 24, 页码: 6086, 6093 Wang Fan; 王向朝; 马明英收藏 \| 浏览/下载：1509/169 \| 提交时间：2009/09/18 LENS ABERRATIONS METROLOGY ALIGNMENT IMAGE