中国科学院机构知识库网格系统: 检索

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	Beam Scanning and Capture of Micro Laser Communication Terminal Based on MEMS Micromirrors 期刊论文 OAI收割 MICROMACHINES, 2023, 卷号: 14, 期号: 7 作者: Wang, Xuan; Han, Junfeng; Wang, Chen; Xie, Meilin; Liu, Peng \| 收藏 \| 浏览/下载：28/0 \| 提交时间：2023/08/18 free-space optical communication MEMS micromirror laser scanning and capture
	Twisting Sliding Mode Control of an Electrostatic MEMS Micromirror for a Laser Scanning System 期刊论文 OAI收割 IEEE-CAA JOURNAL OF AUTOMATICA SINICA, 2019, 卷号: 6, 期号: 4, 页码: 1060-1067 作者: Chen Hui; Sun Zhendong; Sun Weijie; Yeow John Tze Wei \| 收藏 \| 浏览/下载：25/0 \| 提交时间：2021/01/14 PULL-IN ADAPTIVE-CONTROL DESIGN STABILIZATION MIRRORS ORDER Electrostatic micromirror imaging microelectromechanical system (MEMS) twisting algorithm
	Closed-loop control of a 2-D mems micromirror with sidewall electrodes for a laser scanning microscope system 期刊论文 OAI收割 INTERNATIONAL JOURNAL OF OPTOMECHATRONICS, 2016, 卷号: 10, 期号: 1, 页码: 1-13 作者: Chen, Hui; Chen, Albert; Sun, Wei Jie; Sun, Zhen Dong; Yeow, John T. W. \| 收藏 \| 浏览/下载：22/0 \| 提交时间：2018/07/30 micromirror adaptive algorithm sidewall electrodes 2-D image SMC MEMS laser scanning microscope
	A MEMS micromirror driven by electrostatic force 期刊论文 OAI收割 JOURNAL OF ELECTROSTATICS, 2010, 卷号: 68, 期号: 3, 页码: 237-242 作者: Hu, Fangrong; Yao, Jun; Qiu, Chuankai; Ren, Hao 收藏 \| 浏览/下载：37/0 \| 提交时间：2015/09/21 MEMS Micromirror Electrostatic force Pull-in effect Large stroke Out of plane actuation