中国科学院机构知识库网格系统: 检索

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	Development of wafer level glass frit bonding by using barrier trench technology and precision screen printing 期刊论文 OAI收割 MICROELECTRONIC ENGINEERING, 2012, 卷号: 100, 页码: 6-11 Chen, X; Yan, PL; Tang, JJ; Xu, GW; Luo, L 收藏 \| 浏览/下载：29/0 \| 提交时间：2013/04/23 MEMS WLP Glass frit bonding Barrier trench technology (BTT)
	Design, fabrication and analysis of microrobotic insect wings and thorax with different materials by MEMS technology 会议论文 OAI收割 2011 International Conference on Advanced Engineering Materials and Technology, AEMT 2011, Sanya, China, July 29-31, 2011 作者: Chi PC(迟鹏程); Zhang WP(张卫平); Chen WY(陈文元); Li HY(李洪谊); Meng K(孟坤) 收藏 \| 浏览/下载：32/0 \| 提交时间：2017/03/14 Mechanical Microrobot MEMS technology
	Fabrication of high-frequency moire gratings for microscopic deformation measurement using focused ion beam milling 期刊论文 OAI收割 JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2010, 卷号: 20, 期号: 5 Li, YJ; Xie, HM; Guo, BQ; Luo, Q; Gu, CZ; Xu, MQ 收藏 \| 浏览/下载：15/0 \| 提交时间：2013/09/17 MECHANICAL-PROPERTIES MICRO-DEFORMATION MEMS TECHNOLOGY FILMS STRESS
	Proposal and investigation for a planar MOEMS 18 wavelength-selective switch (EI CONFERENCE) 会议论文 OAI收割 MEMS/MOEMS Technologies and Applications III, November 12, 2007 - November 14, 2007, Beijing, China 作者: Li W.; Li W. 收藏 \| 浏览/下载：102/0 \| 提交时间：2013/03/25 This paper presents a new wavelength-selective switch by combining silicon micromaching and microassembly techniques. The 18 wavelength-selective switch (WSS) based on micro electro mechanical systems (MEMS) technology is proposed and fabricated with micro electromagnetic actuators 8 WXC prototype node is implemented by using 18 WSSs as building elements. The working principle and the configuration of the micro electromagnetic actuator are illuminated. By analysis reflecting prisms and narrow-band thin films filters. And a 8 the property suits for the application when the inputs are 2V and the best fiber-to-fiber insertion loss 5dB is gotten.
	Preparation of Pt nanoparticle modified porous silicon electrode and its electrocatalytic performance 期刊论文 OAI收割 ACTA PHYSICO-CHIMICA SINICA, 2007, 卷号: 23, 期号: 1, 页码: 68-72 Tian,J; Zheng,D; Zhang,XG; Zhang,BH; Xia,BJ; Yang,H杨辉收藏 \| 浏览/下载：9/0 \| 提交时间：2011/12/17 FUEL-CELLS PART I TECHNOLOGY METHANOL SOLDIER SYSTEM MEMS