中国科学院机构知识库网格系统: 检索

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	High Q Single Crystal Silicon Micromechanical Resonators With Hybrid Etching Process 期刊论文 OAI收割 IEEE SENSORS JOURNAL, 2012, 卷号: 12, 期号: 7, 页码: 2414-2415 Wu, GQ; Xu, DH; Xiong, B; Wang, YL 收藏 \| 浏览/下载：24/0 \| 提交时间：2013/04/23 Dry release fabrication hybrid etching micromechanical resonators pre-etched cavity
	Wheatstone bridge piezoresistive sensing for bulk-mode micromechanical resonator 期刊论文 OAI收割 APPLIED PHYSICS LETTERS, 2012, 卷号: 101, 期号: 19, 页码: 193505 Wu, GQ; Xu, DH; Xiong, B; Wang, YL 收藏 \| 浏览/下载：18/0 \| 提交时间：2013/04/23 micromechanical resonators microsensors piezoresistive devices
	Disentangling mechanical and mass effects on nanomechanical resonators 期刊论文 iSwitch采集 Applied physics letters, 2010, 卷号: 96, 期号: 2, 页码: 3 作者: Grueter, R. R.; Khan, Z.; Paxman, R.; Ndieyira, J. W.; Dueck, B. 收藏 \| 浏览/下载：34/0 \| 提交时间：2019/05/12 Adsorbed layers Micromechanical resonators Microsensors Nanomechanics
	Disentangling mechanical and mass effects on nanomechanical resonators 期刊论文 OAI收割 applied physics letters, 2010, 卷号: 96, 期号: 2, 页码: art. no. 023113 Gruter RR; Khan Z; Paxman R; Ndieyira JW; Dueck B; Bircher BA; Yang JL; Drechsler U; Despont M; McKendry RA; Hoogenboom BW 收藏 \| 浏览/下载：326/96 \| 提交时间：2010/04/13 adsorbed layers micromechanical resonators microsensors nanomechanics CRYSTAL SILICON CANTILEVERS BIOLOGICAL DETECTION FREQUENCY ARRAYS RESONANCE BINDING
	Simulation and fabrication of the SiC-based clamped-clamped filter 会议论文 OAI收割 9th international conference on solid-state and integrated-circuit technology, beijing, peoples r china, oct 20-23, 2008 Zhao, YM; Ning, J; Sun, GS; Liu, XF; Wang, L; Ji, G; Wang, L; Zhao, WS; Li, JM; Yang, FH 收藏 \| 浏览/下载：47/0 \| 提交时间：2010/03/09 MICROMECHANICAL RESONATORS FREQUENCY