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MOEMS集成波长选择开关的设计及研究 期刊论文  OAI收割
微纳电子技术, 2017, 页码: 597-604+626
作者:  
时建;  梁静秋;  陈成;  吕金光;  秦余欣
  |  收藏  |  浏览/下载:25/0  |  提交时间:2018/04/09
微纳光通信器件与系统 成果  OAI收割
吉林省技术发明奖: 三等奖, 2014
梁静秋; 王维彪; 梁中翥; 秦余欣; 田超; 崔乃迪; 吕金光; 陈松
收藏  |  浏览/下载:141/0  |  提交时间:2015/02/12
柔性LED阵列器件的结构设计及制备研究 学位论文  OAI收割
硕士: 中国科学院大学, 2013
高丹
收藏  |  浏览/下载:33/0  |  提交时间:2014/03/15
Simulation and experiment of the static FTIR based on micro multi-step mirrors (EI CONFERENCE) 会议论文  OAI收割
International Symposium on Photoelectronic Detection and Imaging 2011: Sensor and Micromachined Optical Device Technologies, May 24, 2011 - May 26, 2011, Beijing, China
作者:  
Liang Z.-Z.;  Zhang J.;  Zhang J.;  Zhang J.;  Zhu W.-B.
收藏  |  浏览/下载:33/0  |  提交时间:2013/03/25
In recent years  Fourier transform spectrometer (FTS) with small size and low mass is required in many applications with growing need for real-time and small platform spectral detection. In this paper  a micro Fourier transform infrared spectrometer (FTIR) based on spatial modulation mode was designed. This spectrometer has the advantages of high stability and simplified configuration. It also promises optical path differences (OPD) with high precision  as MOEMS technology is used in manufacturing the key components. The simulation and the experiments with regard to this FTIR configuration have been done. Firstly  the diffraction effect of the micro multi-step mirrors (MMSMs) is studied. We discuss the influence to the reversed spectrum by different mirror widths and different diffraction distances. Secondly  we simulate and analyze the influence of the source solid angle to the spectral resolution. Thirdly  we set up the theoretical model of the collimation error which is mainly from the defocus of the optical system and analyze the result caused by the collimation error. Fourthly  a new discrete Fourier transform arithmetic using least-squares cosines progression (LSCP) is proposed which can reconstruct the spectrum with nonuniform sampled signals. Finally  the MMSMs are fabricated used the MOEMS technology and the structural parameters are tested. 2011 Copyright Society of Photo-Optical Instrumentation Engineers (SPIE).  
Optical MEMS Technologies for Electrically Tunable Multi-spectral Short-wave Infrared Sensors and Arrays 期刊论文  OAI收割
International Journal of High Speed Electronics and Systems, 2008, 卷号: 18, 期号: 4, 页码: 1035-1044
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收藏  |  浏览/下载:20/0  |  提交时间:2016/05/16
The packaging technology of optical switch arrays (EI CONFERENCE) 会议论文  OAI收割
ICO20: MEMS, MOEMS, and NEMS, August 21, 2005 - August 26, 2005, Changchun, China
作者:  
Chen W.;  Wang W.;  Zhao L.;  Wang W.;  Wang L.
收藏  |  浏览/下载:29/0  |  提交时间:2013/03/25
新型高灵敏度低功耗的磁场传感器设计与模拟 会议论文  OAI收割
传感技术学报, 2006
刘玉菲; 赵本刚; 吴亚明; 王跃林
收藏  |  浏览/下载:17/0  |  提交时间:2012/01/18
InAs/GaAs表面量子点的压电调制反射光谱研究 期刊论文  OAI收割
物理学报, 2006, 期号: 09
余晨辉; 王茺; 龚谦; 张波; 陆卫
收藏  |  浏览/下载:29/0  |  提交时间:2012/01/06
二维MOEMS阵列光开关的封装技术研究 会议论文  OAI收割
中国广东四会
作者:  
王立军;  梁静秋;  张军;  张军
收藏  |  浏览/下载:35/0  |  提交时间:2013/03/19
Study of dynamic response on a MOEMS 22 optical switch (EI CONFERENCE) 会议论文  OAI收割
Optical Transmission, Switching, and Subsystems II, November 9, 2004 - November 11, 2004, Beijing, China
作者:  
Wang G.;  Chen W.
收藏  |  浏览/下载:31/0  |  提交时间:2013/03/25
The MOEMS 22 optical switch with slant lower electrode and with torsion beam on silicon is designed and analyzed theoretically. Analytical formulae for the squeeze film damping coefficient and the squeeze film damping moment on the cantilever beam of the optical switch are derived. Based on the torsion dynamics theory  the technique and relative results are presented for analyzing the actuating voltage and the switch time. The optimized result of parameters is as: length  width and thickness of the torsion beam are 700  12 and 10 m  length and width of the cantilever beam are 1900 and 1000 m  length and width of the balance beam are 100 and 1000 m  shortest spacing between the upper and lower electrodes is 0.05 m  and highness of the lower electrode is 55 m  respectively. The actuating voltage is less than 10 V  and the switching time of Ton and Toff are 1.30ms and 1.25ms  respectively. The computed results show that the air squeeze film damping is an important factor for the study of dynamic response on MOEMS optical switch.