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CAS IR Grid
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长春光学精密机械与... [11]
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波导光学与集成光学技... [1]
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MOEMS集成波长选择开关的设计及研究
期刊论文
OAI收割
微纳电子技术, 2017, 页码: 597-604+626
作者:
时建
;
梁静秋
;
陈成
;
吕金光
;
秦余欣
  |  
收藏
  |  
浏览/下载:25/0
  |  
提交时间:2018/04/09
波分复用
波长选择开关
微光机电系统(Moems)
光通信
电磁驱动
微纳光通信器件与系统
成果
OAI收割
吉林省技术发明奖: 三等奖, 2014
梁静秋
;
王维彪
;
梁中翥
;
秦余欣
;
田超
;
崔乃迪
;
吕金光
;
陈松
收藏
  |  
浏览/下载:141/0
  |  
提交时间:2015/02/12
光通信
MOEMS
波长信道选择
双面反射棱镜光开关
光子晶体
波导
柔性LED阵列器件的结构设计及制备研究
学位论文
OAI收割
硕士: 中国科学院大学, 2013
高丹
收藏
  |  
浏览/下载:33/0
  |  
提交时间:2014/03/15
微型柔性LED阵列
AlGaInP
聚酰亚胺
MOEMS技术
隔离沟槽
Simulation and experiment of the static FTIR based on micro multi-step mirrors (EI CONFERENCE)
会议论文
OAI收割
International Symposium on Photoelectronic Detection and Imaging 2011: Sensor and Micromachined Optical Device Technologies, May 24, 2011 - May 26, 2011, Beijing, China
作者:
Liang Z.-Z.
;
Zhang J.
;
Zhang J.
;
Zhang J.
;
Zhu W.-B.
收藏
  |  
浏览/下载:33/0
  |  
提交时间:2013/03/25
In recent years
Fourier transform spectrometer (FTS) with small size and low mass is required in many applications with growing need for real-time and small platform spectral detection. In this paper
a micro Fourier transform infrared spectrometer (FTIR) based on spatial modulation mode was designed. This spectrometer has the advantages of high stability and simplified configuration. It also promises optical path differences (OPD) with high precision
as MOEMS technology is used in manufacturing the key components. The simulation and the experiments with regard to this FTIR configuration have been done. Firstly
the diffraction effect of the micro multi-step mirrors (MMSMs) is studied. We discuss the influence to the reversed spectrum by different mirror widths and different diffraction distances. Secondly
we simulate and analyze the influence of the source solid angle to the spectral resolution. Thirdly
we set up the theoretical model of the collimation error which is mainly from the defocus of the optical system and analyze the result caused by the collimation error. Fourthly
a new discrete Fourier transform arithmetic using least-squares cosines progression (LSCP) is proposed which can reconstruct the spectrum with nonuniform sampled signals. Finally
the MMSMs are fabricated used the MOEMS technology and the structural parameters are tested. 2011 Copyright Society of Photo-Optical Instrumentation Engineers (SPIE).
Optical MEMS Technologies for Electrically Tunable Multi-spectral Short-wave Infrared Sensors and Arrays
期刊论文
OAI收割
International Journal of High Speed Electronics and Systems, 2008, 卷号: 18, 期号: 4, 页码: 1035-1044
-
收藏
  |  
浏览/下载:20/0
  |  
提交时间:2016/05/16
Fabry-Perot
infrared
MEMS
MOEMS
microspectrometer
The packaging technology of optical switch arrays (EI CONFERENCE)
会议论文
OAI收割
ICO20: MEMS, MOEMS, and NEMS, August 21, 2005 - August 26, 2005, Changchun, China
作者:
Chen W.
;
Wang W.
;
Zhao L.
;
Wang W.
;
Wang L.
收藏
  |  
浏览/下载:29/0
  |  
提交时间:2013/03/25
Optical switch is one of key supporting technologies in all-optical-network (AON). And electrostatic MOEMS (Micro-Optical-Electro-Mechanical Systems) switch plays a very important role in all the researched switches
because of their excellent features
including low insertion
low crosstalk and scalability. But the packaging technology has been limiting the development of optical switch. In this paper
the authors study the laser beam propagating during the free space and select collimator
design the pedestal to packaging and address aspects of the insertion loss that are most important loss mechanisms for the 2D cross-connect switch.
新型高灵敏度低功耗的磁场传感器设计与模拟
会议论文
OAI收割
传感技术学报, 2006
刘玉菲
;
赵本刚
;
吴亚明
;
王跃林
收藏
  |  
浏览/下载:17/0
  |  
提交时间:2012/01/18
MOEMS技术 磁场传感器 扭转微镜面 双光纤准直器
InAs/GaAs表面量子点的压电调制反射光谱研究
期刊论文
OAI收割
物理学报, 2006, 期号: 09
余晨辉
;
王茺
;
龚谦
;
张波
;
陆卫
收藏
  |  
浏览/下载:29/0
  |  
提交时间:2012/01/06
MOEMS技术
磁场传感器
扭转微镜面
双光纤准直器
二维MOEMS阵列光开关的封装技术研究
会议论文
OAI收割
中国广东四会
作者:
王立军
;
梁静秋
;
张军
;
张军
收藏
  |  
浏览/下载:35/0
  |  
提交时间:2013/03/19
MOEMS
二维光开关
插损
凸角补偿
球透镜
Study of dynamic response on a MOEMS 22 optical switch (EI CONFERENCE)
会议论文
OAI收割
Optical Transmission, Switching, and Subsystems II, November 9, 2004 - November 11, 2004, Beijing, China
作者:
Wang G.
;
Chen W.
收藏
  |  
浏览/下载:31/0
  |  
提交时间:2013/03/25
The MOEMS 22 optical switch with slant lower electrode and with torsion beam on silicon is designed and analyzed theoretically. Analytical formulae for the squeeze film damping coefficient and the squeeze film damping moment on the cantilever beam of the optical switch are derived. Based on the torsion dynamics theory
the technique and relative results are presented for analyzing the actuating voltage and the switch time. The optimized result of parameters is as: length
width and thickness of the torsion beam are 700
12 and 10 m
length and width of the cantilever beam are 1900 and 1000 m
length and width of the balance beam are 100 and 1000 m
shortest spacing between the upper and lower electrodes is 0.05 m
and highness of the lower electrode is 55 m
respectively. The actuating voltage is less than 10 V
and the switching time of Ton and Toff are 1.30ms and 1.25ms
respectively. The computed results show that the air squeeze film damping is an important factor for the study of dynamic response on MOEMS optical switch.