中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
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CAS IR Grid
机构
上海微系统与信息技术... [4]
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OAI收割 [4]
内容类型
期刊论文 [4]
发表日期
2005 [4]
学科主题
Atomic [1]
Engineerin... [1]
Instrument... [1]
Materials ... [1]
Molecular ... [1]
Nuclear [1]
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Fabrication of strained silicon on insulator by strain transfer process
期刊论文
OAI收割
APPLIED PHYSICS LETTERS, 2005, 卷号: 87, 期号: 5, 页码: 51921-51921
Jin, B
;
Wang, X
;
Chen, J
;
Cheng, XL
;
Chen, ZJ
收藏
  |  
浏览/下载:25/0
  |  
提交时间:2012/03/24
HOLE MOBILITY ENHANCEMENT
SI N-MOSFETS
LAYER TRANSFER
SUBSTRATE
ELECTRON
SI1-XGEX
Fabrication of SGOI material by oxidation of an epitaxial SiGe layer on an SOI wafer with H ions implantation
期刊论文
OAI收割
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2005, 卷号: 234, 期号: 3, 页码: 243-248
Cheng,XL
;
Chen,ZJ
;
Wang,YJ
;
Jin,B
;
Zhang,F
;
Zou,SC
收藏
  |  
浏览/下载:29/0
  |  
提交时间:2012/03/24
HOLE MOBILITY ENHANCEMENT
HIGH-GE FRACTION
STRAINED-SI
INSULATOR SUBSTRATE
N-MOSFETS
ELECTRON
ULTRATHIN
Relaxed SiGe-on-insulator fabricated by dry oxidation of sandwiched Si/SiGe/Si structure
期刊论文
OAI收割
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 2005, 卷号: 124, 页码: 153-157
Di, ZF
;
Zhang, M
;
Liu, WL
;
Zhu, M
;
Lin, CL
;
Chu, PK
收藏
  |  
浏览/下载:19/0
  |  
提交时间:2012/03/24
ELECTRON-MOBILITY ENHANCEMENT
FIELD-EFFECT TRANSISTORS
STRAINED-SI
LAYER TRANSFER
N-MOSFETS
GERMANIUM
STABILITY
SUBSTRATE
EPITAXY
ALLOYS
Fabrication and mechanism of relaxed SiGe-on-insulator by modified Ge condensation
期刊论文
OAI收割
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2005, 卷号: 23, 期号: 4, 页码: 1637-1640
Di, ZF
;
Zhang, M
;
Liu, WL
;
Luo, SH
;
Song, ZT
;
Lin, CL
;
Huang, AP
;
Chu, PK
收藏
  |  
浏览/下载:23/0
  |  
提交时间:2012/03/24
HOLE MOBILITY ENHANCEMENT
STRAINED-SI
OXIDATION BEHAVIOR
HIGH-PERFORMANCE
COMPLIANT OXIDE
N-MOSFETS
GERMANIUM
SUBSTRATE
ELECTRON
ISLANDS