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	Bulge testing and fracture properties of plasma-enhanced chemical vapor deposited silicon nitride thin films 期刊论文 OAI收割 thin solid films, 2009, 卷号: 517, 期号: 6, 页码: 1989-1994 作者: Li Y 收藏 \| 浏览/下载：370/38 \| 提交时间：2010/03/08 Bulge test Fracture property Silicon nitride Weibull distribution function
	Fracture properties of silicon carbide thin films charcterized by bulge test of long membranes 会议论文 OAI收割 3rd ieee international conference of nano/micro engineered and molecular systems, sanya, peoples r china, jan 06-09, 2008 Zhou, W; Yang, JL; Sun, GS; Liu, XF; Yang, FH; Li, JM 收藏 \| 浏览/下载：55/0 \| 提交时间：2010/03/09 bulge test fracture property silicon carbide thin films Weibull distribution function
	Fracture properties of PECVD silicon nitride thin films by long rectangular memrane bulge test 会议论文 OAI收割 3rd ieee international conference of nano/micro engineered and molecular systems, sanya, peoples r china, jan 06-09, 2008 Zhou, W; Yang, JL; Li, Y; Yang, FH 收藏 \| 浏览/下载：51/0 \| 提交时间：2010/03/09 bulge test fracture property silicon nitride Weibull distribution function
	Fracture Properties of LPCVD Silicon Nitride and Thermally Grown Silicon Oxide Thin Films From the Load-Deflection of Long Si3N4 and SiO2/Si3N4 Diaphragms 期刊论文 OAI收割 journal of microelectromechanical systems, 2008, 卷号: 17, 期号: 5, 页码: 1120-1134 Yang, JL; Gaspar, J; Paul, O 收藏 \| 浏览/下载：35/0 \| 提交时间：2010/03/08 Bulge test fracture pooled Weibull analysis silicon nitride (Si3N4) silicon oxide (SiO2)
	Fracture properties of silicon carbide thin films by bulge test of long rectangular membrane 期刊论文 OAI收割 journal of microelectromechanical systems, 2008, 卷号: 17, 期号: 2, 页码: 453-461 Zhou, W; Yang, JL; Sun, GS; Liu, XF; Yang, FH; Li, JM 收藏 \| 浏览/下载：59/0 \| 提交时间：2010/03/08 bulge test fracture property microelectromechanical systems (MEMS) silicon carbide (SiC) thin films Weibull distribution function