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Chinese Academy of Sciences Institutional Repositories Grid
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CAS IR Grid
机构
近代物理研究所 [2]
金属研究所 [1]
长春光学精密机械与物... [1]
采集方式
OAI收割 [4]
内容类型
期刊论文 [3]
会议论文 [1]
发表日期
2024 [1]
2004 [3]
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Bulk ytterbium aluminosilicate glass with excellent mechanical properties and plasma etching resistance
期刊论文
OAI收割
JOURNAL OF NON-CRYSTALLINE SOLIDS, 2024, 卷号: 642, 页码: 7
作者:
Zhang, Yongheng
;
Chen, Jixin
;
Zhang, Hao
;
Lei, Yiming
  |  
收藏
  |  
浏览/下载:1/0
  |  
提交时间:2025/04/27
Ytterbium aluminosilicate glass
Bulk materials
Embedding method
Mechanical properties
Plasma etching resistance
Bulk and track etching of PET studied by spectrophotometer
期刊论文
OAI收割
RADIATION MEASUREMENTS, 2004, 卷号: 38, 期号: 4, 页码: 255-261
作者:
Zhu, ZY
;
Duan, JL
;
Maekawa, Y
;
Koshikawa, H
;
Yoshida, M
  |  
收藏
  |  
浏览/下载:51/0
  |  
提交时间:2010/10/29
polyethyleneterephthalate
bulk and track etching
UV light illumination
spectrophotometer
Role of UV light illumination and DMF soaking in production of PET ion track membranes
期刊论文
OAI收割
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2004, 卷号: 217, 页码: 449-456
作者:
Zhu, Z
;
Maekawa, Y
;
Koshikawa, H
;
Suzuki, Y
;
Yonezawa, N
  |  
收藏
  |  
浏览/下载:29/0
  |  
提交时间:2018/05/31
polyethyleneterephthalate
bulk etching
track etching
UV light illumination
track membrane
Study on optical parts of MOEMS optical switch with low insertion loss (EI CONFERENCE)
会议论文
OAI收割
MEMS/MOEMS Technologies and Applications II, November 10, 2004 - November 12, 2004, Beijing, China
作者:
Wang W.
;
Wang L.
;
Wang L.
;
Wang L.
;
Chen W.
收藏
  |  
浏览/下载:54/0
  |  
提交时间:2013/03/25
We study insertion losses of optical switch when the laser beam is propagating during the free space between two single mode fibers (SMFs) and the related assemblage challenges
Then a new packaging structure is developed for the hybrid-integration of free-space MOEMS (micro-opto-electro-mechanical systems) chip with a silicon micromachined submount to improve alignment accuracy. The submount is designed to accommodate various free-space MOEMS chips with minimal active optical alignment
thus reducing the packaging cost. The silicon submount has a central recess to place the MOEMS chip in
sixteen V-grooves for optical fibers
and micropits for micro ball lenses
all bulk micromachined at the same time by a single anisotropic wet etching step. A corner compensation technique is employed to prevent erosion of the convex corners
where different geometries meet. Through this assembling method
the fiber
micro ball lens can be aligned preciously thus reduced lateral and angular misalignment between them. Then total insertion losses can be decreased.