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	A composite hardness stamp in 184 PDMS for nanostructures transfer in high fidelity (EI CONFERENCE) 会议论文 OAI收割 2012 12th IEEE International Conference on Nanotechnology, NANO 2012, August 20, 2012 - August 23, 2012, Birmingham, United kingdom 作者: Du J.; Shi L.; Li S. 收藏 \| 浏览/下载：20/0 \| 提交时间：2013/03/25 To improve the fidelity of nanostructures in transfer process a composite stamp with reasonable hardness distribution in 184 PDMS used to nanoimprint was studied. The stamp is composed of a stiff 184 PDMS structured layer and a soft 184 PDMS supporter layer. We studied the relationship between the hardness of the 184 PDMS and the proportion of each component in 184 PDMS. The appropriate components proportions of prepolymer and curing agent corresponding to the different region of the composite stamp were presented. The fabrication method of the stamp is also presented. Corresponding experiments were carried out by using this stamp. Kinds of nanostructures were transferred in one inch diameter area with good fidelity. The feature sizes of the structures were less than 100 nm. 2012 IEEE.
	Athermal design of hybrid refractive/harmonic diffractive optical system for far-infrared multi-band (EI CONFERENCE) 会议论文 OAI收割 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, November 19, 2008 - November 21, 2008, Chengdu, China 作者: Liu Y.; Liu Y.; Zhang H.; Zhang H.; Sun Q. 收藏 \| 浏览/下载：34/0 \| 提交时间：2013/03/25 In order to get enough information about the target avoid big chromatic aberration as a result of wide spectrum and the complexity of optical system and adapt different special environment temperature a hybrid refractive/harmonic diffractive optical system in far-infrared multi-band is described in the paper. This diffractive optical system has been designed an athermalized multi-band imaging system with harmonic diffractive element in 15-50m spectrum based on larger 1dispersion capability and particular thermal dispersive power of harmonic diffractive element. Then at the temperature range from 0C to 40C this design can simultaneously meet with all requirements of the imaging system in five harmonic wave bands including15.8-16.2m 18.5-20m 23-25m 30.5-33.5m and 46-50m. In each harmonic wave band the magnification changes as a function of wavelength which creates image registration error. To compensate this shortcoming a zoom optical system is designed with three lenses by means of optical two- component method. The design results show that the hybrid refractive/harmonic diffractive optical system can realize athermalized and achromatic design and the zoom optical system makes half image height at 3.53mm in every harmonic wave band and still realizes aberration compensation action. In the five harmonic wave bands each optical transfer function approaches the diffraction limit at ambient temperature range of 0C to 40C. Finally the system realizes the requirements of portability mini-type and ease for fabrication. 2009 SPIE.
	Deformation Of Pdms Membrane And Microcantilever By A Water Droplet: Comparison Between Mooney-Rivlin And Linear Elastic Constitutive Models 期刊论文 OAI收割 Journal of Colloid and Interface Science, 2009, 卷号: 332, 期号: 2, 页码: 467-476 作者: Yu YS(余迎松); Zhao YP(赵亚溥); Zhao YP 收藏 \| 浏览/下载：1395/84 \| 提交时间：2009/08/03 Mooney-Rivlin Constitutive Model Hyperelastic Material Pdms Membrane Surface Tension Vertical Component Water Droplet Microcantilever Force Microscope Cantilevers System Polydimethylsiloxane Fabrication Evaporation Simulation Micropump Flow
	Development of an experimental EUVL system (EI CONFERENCE) 会议论文 OAI收割 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies, AOMATT 2007: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, July 8, 2007 - July 12, 2007, Chengdu, China 作者: Wang L.-P.; Zhang L.-C.; Jin C.-S. 收藏 \| 浏览/下载：21/0 \| 提交时间：2013/03/25 An experimental EUVL system has been developed to investigate EUV imaging system design component fabrication assembly technique and experimental process. The system includes a laser produced plasma (LPP) source an ellipsoidal condenser a transmission mask a reduced projection optics and vacuum system. We designed a 10:1 reduction projection optics using Schwarzschild system with spherical mirrors to achieve 0.1m resolution. The Schwarzschild optics coated with Mo/Si multilayers was assembled with wavefront error (WFE) of 0.014 waves RMS at 632.8nm wavelength under computer-aided alignment method. Using this system a fine pattern of less than 0.25m covering a 0.1mm diameter image field of view was clearly replicated on resist-coated wafer.
	Study of microsphere plate photomultiplier tube (EI CONFERENCE) 会议论文 OAI收割 ICO20: Remote Sensing and Infrared Devices and Systems, August 21, 2005 - August 26, 2005, Changchun, China 作者: Wang X.; Li Y.; Li Y.; Li Y.; Li Y. 收藏 \| 浏览/下载：34/0 \| 提交时间：2013/03/25 The photomultiplier tube (PMT) that can work in different wavelength is an important detector device in remote sense technology. Microsphere plate using glass beads 50to 70m in diameter sintered together is the core component of the microsphere plate photomultiplier tube It is a novel two-dimension electron multiplier. The electrons gain for a single plate is about 1017 and do not have the phenomenon of ion-feedback. Furthermore the fabrication process is very easy. In this paper much interest was put on the microsphere plate photomultiplier tube. Based on the analyses from the theory and the experiment result we point out the key technology for fabricating PMT is how to obtain glass beads with narrow range in diameter and how to sinter the glass beads with a sufficient pylome. Factors affect the gradating technology and sintering process along with the solution to them is presented. In the last the structure scheme and technological characteristic for fabricating microsphere plate photomultiplier tube were given. The pulse rising-time of MSP-PMT is below 400ps suitable to the detection of high-speed pulse. As easy to be fabricated and has great advantage over MCP multiplier in the ratio of performance to price the microsphere plate photomultiplier tube is a promising dim-light detector.