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	Morphological and structural damage investigation of nanostructured molybdenum fuzzy surface after pulsed plasma bombardment 期刊论文 OAI收割 CHINESE PHYSICS B, 2022, 卷号: 31 作者: Luo, Yu-Chuan; Yan, Rong; Pu, Guo; Wang, Hong-Bin; Wang, Zhi-Jun \| 收藏 \| 浏览/下载：63/0 \| 提交时间：2022/05/05 molybdenum nanostructured fuzz pulsed-H plasma edge localized mode etching process
	The application of the scallop nanostructure in deep silicon etching 期刊论文 OAI收割 NANOTECHNOLOGY, 2020, 卷号: 31, 期号: 31, 页码: 1-11 作者: Lin, Yuanwei; Yuan, Renzhi; Zhou, Ce; Dong, Zihan; Su, Ziduo \| 收藏 \| 浏览/下载：36/0 \| 提交时间：2021/09/14 deep silicon etching Bosch process scallop nanostructure fluorocarbon polymer minimum effect
	Synthesis of Porous Amorphous FePO4 Nanotubes and Their Lithium Storage Properties 期刊论文 OAI收割 CHEMISTRY-A EUROPEAN JOURNAL, 2013, 卷号: 19, 期号: 5, 页码: 1568-1572 作者: Cai, R; Du, YP; Zhang, WY; Tan, HT; Zeng, T 收藏 \| 浏览/下载：36/0 \| 提交时间：2016/04/08 a-FePO4 etching process lithium ion batteries mesoporous materials porous nanotubes
	Manufacturing and testing of the line-array fiber-optic image slicer based on silicon V-grooves (EI CONFERENCE) 会议论文 OAI收割 MEMS/MOEMS Technologies and Applications III, November 12, 2007 - November 14, 2007, Beijing, China 作者: Zhu Y. 收藏 \| 浏览/下载：23/0 \| 提交时间：2013/03/25 Linear fiber-optic image slicer is used more and more in spatial exploration and imaging system. In this paper a plane arranging method of fiber-optic array based on Si-V grooves is established in order to improve the accuracy and reduce the cost of manufacturing. Firstly the Si-V groove array is micro-machined with anisotropic etching process then optical fibers are placed in the grooves orderly with plane arranging method. Secondly the end surfaces of the device are polished also the linear fiber-optic image slicer is packaged. Finally some parameters are tested including structure parameters transmittivity and vibration test. Experimental results indicate that the maximum error accumulated in 2000 periods of the Si-V grooves is 0.5 m the error of the height in Si-V grooves is less than 0.15m the roughness of the end surface is less than 0.9nm. The transmittivity of the linear fiber-optic image slicer that without optical film is 51.46% at the wavelength of 632.8nm. After random vibration experiment the ratio of the broken fiber increased by 0.1%. While the temperature reached 320C the stress of epoxy will be 130Mpa which is close to the limit resistance stress of 139Mpa some cracks appeared.
	Fabrication of multilayer laminar grating with high efficiency for extreme ultraviolet (EI CONFERENCE) 会议论文 OAI收割 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies, AOMATT 2007: Advanced Optical Manufacturing Technologies, July 8, 2007 - July 12, 2007, Chengdu, China 作者: Jin C.-S.; Zhang L.-C. 收藏 \| 浏览/下载：22/0 \| 提交时间：2013/03/25 The main goal for investigations on multilayer laminar gratings working at the EUV region is to enhance their efficiency. In this article second third we demonstrate a routine to fabricate multilayer laminar gratings with high efficiency. This routine comprises three steps: first optimizing fabricating techniques to obtain multilayer coatings with high reflectivity strictly controlling errors of multilayer grating parameters to ensure the coinciding of the optical performance with the expectation. Results demonstrate that this routine is feasible. The measured peak efficiency of -1 order at 12.8nm was 14.3%. Some related issues about efficiency curves such as wavelength separation and suppression of zero order are discussed. preparing grating substrates with ideal groove profile and low roughness by holographic recording and ion beam etching process