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	Ion beam sputter deposition of zirconia thin films (EI CONFERENCE) 会议论文 OAI收割 International Symposium on Photoelectronic Detection and Imaging, ISPDI 2007: Optoelectronic System Design, Manufacturing, and Testings, September 9, 2007 - September 12, 2007, Beijing, China 作者: Liu L.; Yang H.; Liu L. 收藏 \| 浏览/下载：20/0 \| 提交时间：2013/03/25 We determined the optical constants (the refractive index n and the extinction coefficient k) of ion beam sputter deposited zirconia thin films with spectroscopic ellipsometry (SE). First we obtained the structure information (the layer thickness surface roughness and layer diffusion) by fitting the grazing x-ray reflection (GXRR) spectra. The fitted surface roughness is verified by atomic force micrometer (AFM) measurement. Second based on the acquired structure information the measured ellipsometry spectra are fitted in the range of 240-800nm at an incident angle of 70.25 degree. The optical constants are solved based on the Tauc-Lorentz dispersion. The optical band gap extracted by SE is 4.79eV. Finally the optical band gap is verified by Taue plot method which is well consistent with that of SE.
	Optical characteristic of ion beam sputter deposited aluminum thin films (EI CONFERENCE) 会议论文 OAI收割 International Symposium on Photoelectronic Detection and Imaging, ISPDI 2007: Optoelectronic System Design, Manufacturing, and Testings, September 9, 2007 - September 12, 2007, Beijing, China 作者: Yang H.; Liu L.; Liu L. 收藏 \| 浏览/下载：28/0 \| 提交时间：2013/03/25 Aluminum is a typical active metal very easy to oxidize. An oxide surface layer of about 2-6nm quickly formed in air which adds difficulty to the optical constants determination. An ex-situ method is used to determine the optical constants of aluminum thin films. First Second Third alumina (Al2O3) thin film is deposited by ion beam sputter deposition. The optical constants and thickness are determined by spectral ellipsoemtry (SE). The thickness is verified by grazing x-ray reflection (GXRR) fitting method Al thin film with an Al2O3 cap layer on top is deposited. This cap layer is of the same deposition condition with the first step. By fitting the GXRR spectra based on the acquired structure information the structure information (the thickness of the aluminum and the cap layer the ellipsometric spectra are fitted. The optical constants of the aluminum layer are extracted with the aid of the Drude model. Finally surface roughness and the diffusion between Al-Al2O 3) is obtained an induced transmission filter (ITF) is designed and deposited.
	Determination of optical constants of zirconia and silica thin films in UV to visible range (EI CONFERENCE) 会议论文 OAI收割 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies, AOMATT 2007: Advanced Optical Manufacturing Technologies, July 8, 2007 - July 12, 2007, Chengdu, China 作者: Liu L.; Yang H.; Liu L. 收藏 \| 浏览/下载：27/0 \| 提交时间：2013/03/25 A curve fitting method for determining the optical constants of some dielectric thin films is described with dispersion theory in the paper. A computer program based on Matlab is developed and optimized. The fitting errors are analyzed with theoretical data which gives very high accurate results. A program is applied to fitting the measured photometric spectra of ion sputtered zirconia and silica thin films in 200-850nm spectra range. The thickness is verified with the method of grazing x-ray diffraction. With the thickness known the optical constants of zirconia films near the absorption range are obtained with single-wavelength method. As a result quite good fitting results are obtained with high accuracy. Finally an ultraviolet (UV) high-pass optical filter is designed with optical constants extracted by this method. The transmission and reflection spectra of the filter are measured and compared to designed spectra. A good coherence was derived.
	Steady state ion acceleration by a circularly polarized laser pulse 期刊论文 OAI收割 phys. lett. a, 2007, 卷号: 369, 期号: 4, 页码: 339, 344 张晓梅; 沈百飞; Cang Yu; Li Xuemei; Jin Zhangying; Wang Fengchao 收藏 \| 浏览/下载：1172/177 \| 提交时间：2009/09/18 steady state circularly polarized laser pulse electrostatic shock ion reflection
	Carbonization process of si(100) by ion-beam bombardment 期刊论文 iSwitch采集 Journal of crystal growth, 2001, 卷号: 233, 期号: 3, 页码: 446-450 作者: Liao, MY; Chai, CL; Yao, ZY; Yang, SY; Liu, ZK 收藏 \| 浏览/下载：28/0 \| 提交时间：2019/05/12 Diffusion Growth models Ion bombardment Reflection high energy electron diffraction Physical vapor phase deposition Semiconducting silicon compounds
	Carbonization process of Si(100) by ion-beam bombardment 期刊论文 OAI收割 journal of crystal growth, 2001, 卷号: 233, 期号: 3, 页码: 446-450 Liao MY; Chai CL; Yao ZY; Yang SY; Liu ZK; Wang ZG 收藏 \| 浏览/下载：94/8 \| 提交时间：2010/08/12 diffusion growth models ion bombardment reflection high energy electron diffraction physical vapor phase deposition semiconducting silicon compounds CUBIC GAN GROWTH DEPOSITION EPITAXY SILICON DIAMOND