中国科学院机构知识库网格系统: 检索

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	Monolithic integration of tandem-FAIMS based on overlapping ion peak separation and weak ion peak discovery for gas detection 期刊论文 OAI收割 SENSORS AND ACTUATORS B-CHEMICAL, 2022, 卷号: 362 作者: Liu, Shaomin; Li, Shan; Liu, Youjiang; Jin, Jiao; Ma, He \| 收藏 \|
	Design of a high precision digital interface circuit for capacitive MEMS accelerometers with floating point 期刊论文 OAI收割 INTEGRATION-THE VLSI JOURNAL, 2017, 卷号: 59, 页码: 247-254 作者: Li, Zongwei; Xiong, Xingyin; Liu, Xiong; Han, Kedu; Cong, Ning \| 收藏 \|
	Design of MEMS-based micro-filter integrating grating and tunable Fabry-Perot cavity 期刊论文 OAI收割 INTERNATIONAL JOURNAL OF NANOTECHNOLOGY, 2015, 卷号: 12, 期号: 10-12, 页码: 829-837 作者: Shi, Zhendong; Fang, Liang; Zhou, Chongxi 收藏 \|
	Patent Analysis and Technology Foresight on Micro/Nano Power Generation 会议论文 OAI收割 the 2nd global techmining conference, montreal, canada, 2012-09-05 作者: Zhang X(张娴); Zhang X(张娴); Zhang X(张娴); Zhang X(张娴) 收藏 \|
	Proposal and investigation for a planar MOEMS 18 wavelength-selective switch (EI CONFERENCE) 会议论文 OAI收割 MEMS/MOEMS Technologies and Applications III, November 12, 2007 - November 14, 2007, Beijing, China 作者: Li W.; Li W. 收藏 \|
	The packaging technology of optical switch arrays (EI CONFERENCE) 会议论文 OAI收割 ICO20: MEMS, MOEMS, and NEMS, August 21, 2005 - August 26, 2005, Changchun, China 作者: Chen W.; Wang W.; Zhao L.; Wang W.; Wang L. 收藏 \|
	Study on optical parts of MOEMS optical switch with low insertion loss (EI CONFERENCE) 会议论文 OAI收割 MEMS/MOEMS Technologies and Applications II, November 10, 2004 - November 12, 2004, Beijing, China 作者: Wang W.; Wang L.; Wang L.; Wang L.; Chen W. 收藏 \|