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光电技术研究所 [3]
西安光学精密机械研究... [2]
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OAI收割 [9]
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期刊论文 [6]
会议论文 [3]
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Design of a high-resolution compact optical system applied to micro-nano satellites
会议论文
OAI收割
Nanjing, China, 2020-10-20
作者:
Qiao, Jiang
;
Wu, Cuigang
  |  
收藏
  |  
浏览/下载:22/0
  |  
提交时间:2021/01/20
High resolution
compact optical imaging system
Micro-Nano satellites
Photonic Nanojet Sub-Diffraction Nano-Fabrication With in situ Super-Resolution Imaging
期刊论文
OAI收割
IEEE TRANSACTIONS ON NANOTECHNOLOGY, 2019, 卷号: 18, 页码: 226-233
作者:
Wen YD(文扬东)
;
Li WJ(李文荣)
;
Liu LQ(刘连庆)
;
Wang XD(王晓朵)
;
Wang FF(王飞飞)
  |  
收藏
  |  
浏览/下载:71/0
  |  
提交时间:2019/03/09
Photonic Nanojet
nano-scale processing
laser processing
super-resolution imaging
Efficient Super-Resolution Imaging Method for Micro-Nano Structure Based On Structured Illumination Modulation
会议论文
OAI收割
Chengdu, PEOPLES R CHINAChengdu, PEOPLES R CHINA, JUN 26-29, 2018JUN 26-29, 2018
作者:
Yang Kejun
;
Tang Yan
;
Hu Song
;
Chen Chuyi
  |  
收藏
  |  
浏览/下载:38/0
  |  
提交时间:2019/08/23
Super-resolution imaging
image reconstruction
structured illumination
optical measurement
micro-nano structure
phase shifting
Formation, distribution, and photoreaction of nano-sized vanadium oxide cluster anions
期刊论文
OAI收割
INTERNATIONAL JOURNAL OF MASS SPECTROMETRY, 2016, 卷号: 407, 页码: 62-68
作者:
Yuan, Zhen
;
Liu, Qing-Yu
;
Li, Xiao-Na
;
He, Sheng-Gui
收藏
  |  
浏览/下载:24/0
  |  
提交时间:2016/12/29
High-resolution
Tandem mass spectrometry
Nano-sized metal oxide clusters
Photoreaction
Plasmonic Structures, Materials and Lenses for Optical Lithography beyond the Diffraction Limit: A Review
期刊论文
OAI收割
MICROMACHINES, 2016, 卷号: 7, 期号: 7
作者:
Wang, Changtao
;
Zhang, Wei
;
Zhao, Zeyu
;
Wang, Yanqin
;
Gao, Ping
收藏
  |  
浏览/下载:29/0
  |  
提交时间:2016/11/15
surface plasmon polaritons
bulk plasmon polaritons
diffraction limit
subwavelength optics
near-field optics
metamaterial
super resolution
nano optical lithography
nanostructure fabrication
Patterning of nanodot-arrays using EUV achromatic Talbot lithography at the Swiss Light Source and Shanghai Synchrotron Radiation Facility
期刊论文
OAI收割
MICROELECTRONIC ENGINEERING, 2016, 卷号: 155, 页码: 55-60
作者:
Fan, D
;
Buitrago, E
;
Yang, SM
;
Karim, W
;
Wu, YQ
收藏
  |  
浏览/下载:16/0
  |  
提交时间:2017/03/02
EUV
Interference lithography
High resolution
Nano-lithography
Achromatic Talbot lithography
A real-time axial activeanti-drift device with high-precision
期刊论文
OAI收割
acta physica sinica, 2015, 卷号: 64, 期号: 2, 页码: 028701
作者:
Huo Ying-Dong
;
Cao Bo
;
Yu Bin
;
Chen Dan-Ni
;
Niu Han-Ben
收藏
  |  
浏览/下载:17/0
  |  
提交时间:2015/07/14
nano-resolution
quadrant detector
axial anti-drift
Immersed nanospheres super-lithography for the fabrication of sub-70nm nanoholes with period below 700nm (EI CONFERENCE)
会议论文
OAI收割
2012 12th IEEE International Conference on Nanotechnology, NANO 2012, August 20, 2012 - August 23, 2012, Birmingham, United kingdom
作者:
Li S.
;
Du J.
;
Shi L.
收藏
  |  
浏览/下载:136/0
  |  
提交时间:2013/03/25
A maskless nano-lithography method by using polystyrene spheres (PSs) self-assembled on silver slab (NSSL) was proposed in [optics express
Vol. 16
No. 19 (2008) 14397]. Following that
to break the limitations in resolution and PSs period of NSSL method
in this paper
we present PSs immersed super-resolution lithography (NSISL) technology by embedding the PSs into appropriate material to improve the efficiency of the surface plasmon excitation. The energy modulating mechanism and the rules of the resolution affected by silver slab were studied by calculating and analysing the energy distribution. The curve of the lithography resolution versus the silver thickness was presented. In order to verify this method
contrast analysis was carried out with NSSL. The results show that the lithography resolution is improved efficiently. Taking a specific configuration with PS diameter of 600nm as an example
the resolution was improved to 54nm from 190nm with Ag thickness of 25nm. Based on the calculation results
we carried out the experiments. Nano holes with dimension of 75nm and period of 600nm were obtained. 2012 IEEE.
Surface plasmon polariton radiation from metallic photonic crystal slabs breaking the diffraction limit: Nano-storage and nano-fabrication
期刊论文
OAI收割
MODERN PHYSICS LETTERS B, 2004, 卷号: 18, 期号: 18, 页码: 945-953
作者:
Luo, XG
;
Shi, JP
;
Wang, H
;
Yu, GB
收藏
  |  
浏览/下载:14/0
  |  
提交时间:2015/09/21
resolution
metallic nanostructures
plasmonics
nano-optics