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	Optimization of pencil beam f-theta lens for high-accuracy metrology 期刊论文 OAI收割 OPTICAL ENGINEERING, 2018, 卷号: 57, 期号: 1, 页码: - 作者: Peng, CQ; He, YM; Wang, J \| 收藏 \| 浏览/下载：30/0 \| 提交时间：2018/09/06 Long Trace Profiler Surface Profiler Deflectometry Ellipse Mirrors Circle Range
	Normal tracing deflectometry using a secondary light source 期刊论文 OAI收割 JOURNAL OF SYNCHROTRON RADIATION, 2017, 卷号: 24, 期号: -, 页码: 765-774 作者: Peng, CQ; He, YM; Wang, J \| 收藏 \| 浏览/下载：19/0 \| 提交时间：2018/08/30 Surface Profiler Accuracy Mirrors
	Nano-accuracy measurement technology of optical-surface profiles 会议论文 OAI收割 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT) - Subnanometer Accuracy Measurement for Synchrotron Optics and X-Ray Optics, Suzhou, PEOPLES R CHINA, APR 26-29, 2016 作者: Qian, SN; Gao, B 收藏 \| 浏览/下载：24/0 \| 提交时间：2017/03/02 surface profiler profilometer nano-accuracy preccise measurement
	Design of co-path scanning long trace profiler for measurement of X-ray space optical elements (EI CONFERENCE) 会议论文 OAI收割 6th International Symposium on Precision Engineering Measurements and Instrumentation, August 8, 2010 - August 11, 2010, Hangzhou, China Shun L.; Yan G.; Wei Z.; Yang Z. 收藏 \| 浏览/下载：27/0 \| 提交时间：2013/03/25 The Long Trace Profiler (LTP) is a precision surface slope error measurement instrument used in synchrotron radiation optics for many years. By making some modifications to the LTP system we developed a co-path scanning LTP (CSLTP) system to test the cylindrical aspherical surface which used in X-ray space optics. To reduce the mistake caused by air turbulence and manufacture faults of optical elements used the CSLTP is designed with the least difference between the testing beam path and the reference beam path. Also it uses multiple-beam interference but double beam interference to reduce the width of beam fringe. This improves the position precision of the beam fringe on the image plane. 2010 SPIE.
	In situ long trace profiler for measurement of Wolter type-I mirror (EI CONFERENCE) 会议论文 OAI收割 Advances in Metrology for X-Ray and EUV Optics III, August 1, 2010 - August 2, 2010, San Diego, CA, United states 作者: Chen B.; Chen B. 收藏 \| 浏览/下载：27/0 \| 提交时间：2013/03/25 The surface profile of Wolter type-I mirror has a great impact on the performance of Solar X-ray Telescope. According to the existing fabrication instrument and experimental conditions in our lab an in situ Long Trace Profiler is developed and set up on the fabrication instrument in order to measure the surface profile of Wolter mirror in real time during fabrication process. Its working mechanism structural parameters and data processing algorithm are investigated. The prototype calibrated by a standard plane mirror is used to measure a sample of Wolter type-I mirror. The results show that our prototype can achieve an accuracy of 2.6rad rms for slope error with a stability of 1.33rad during the whole measurement period. This can meet further fabrication requirements. 2010 Copyright SPIE - The International Society for Optical Engineering.
	Assessment of surface roughness by use of soft x-ray scattering (EI CONFERENCE) 会议论文 OAI收割 Soft X-Ray Lasers and Applications VIII, August 4, 2009 - August 6, 2009, San Diego, CA, United states Yan-li M.; Yong-gang W.; Shu-yan C.; Bo C. 收藏 \| 浏览/下载：27/0 \| 提交时间：2013/03/25 A soft x-ray reflectometer with laser produced plasma source has been designed which can work from wavelength 8nm to 30 nm and has high performance. Using the soft x-ray reflectometer above the scattering light distribution of silicon and zerodur mirrors which have super-smooth surfaces could be measured at different incidence angle and different wavelength. The measurement when the incidence angle is 2 degree and the wavelength is 1 lnm has been given in this paper. A surface scattering theory of soft x-ray grazing incidence optics based on linear system theory and an inverse scattering mathematical model is introduced. The vector scattering theory of soft x-ray scattering also is stated in detail. The scattering data are analyzed by both the methods above respectively to give information about the surface profiles. On the other hand both the two samples are measured by WYKO surface profiler and the surface roughness of the silicon and zerodur mirror is 1.3 nm and 1.5nm respectively. The calculated results are in quantitative agreement with those measured by WYKO surface profiler which indicates that soft x-ray scattering is a very useful tool for the evaluation of highly polished surfaces. But there still some difference among the results of different theory and WYKO and the possible reasons of such difference have been discussed in detail. 2009 SPIE.
	Developing of in-suit long trance profiler for testing slope error of aspherical optical Elements (EI CONFERENCE) 会议论文 OAI收割 ICO20: Optical Devices and Instruments, August 21, 2005 - August 26, 2005, Changchun, China Zhou C.; Li H.; Chen C.; Zhou C.; Qian S. 收藏 \| 浏览/下载：35/0 \| 提交时间：2013/03/25 Profile error of super smooth surface of optical elements at X-ray/EUV in synchrotron radiation (SR) light beam line is described as slope error of them generally. The Long Trace Profiler (LPT) is used for testing surface slope error of SR optical elements in world generally. It is requisite to use In-suit LTP measuring surface thermal distortion of SR optical elements with high heat under high bright SR source. Authors design an In-suit LTP by means of co-path interferometer with pencil light beam. The instrument not only can be used for testing slope error of mirrors in Lab. also in situation test the distortion of mirror with high heat load at synchrotron light beam line. The device can be used to test various absolute surface figures of optical elements such as aspherieal spherical and plane. It is needless standard reference surface. It is named by LTP-III. This paper describes its basic operating principle optical system mechanical constructions DC serve motor control system array detector data acquisition system and computer system for controlling and data analysis of LTP-III. The Instrument has advantages of high accuracy low cost multifunction and wide application. Length of surface measured of optical element accuracy is 0.04 arcsec.
	Recent progress on asphere manufacturing and testing at CIOM (EI CONFERENCE) 会议论文 OAI收割 Advanced Optical Manufacturing and Testing Technology 2000, November 1, 2000 - November 3, 2000, Chengdu, China 作者: Zhang X.; Yu J.; Zhang X.; Zhang X. 收藏 \| 浏览/下载：22/0 \| 提交时间：2013/03/25 The manufacturing procedure of a 500 mm in diameter f/2 hyperbolic primary mirror based on Computer-Controlled Polishing is introduced in detail. The mirror was finally polished to the shape accuracy of 13 nm rms and the surface roughness of 2 nm Ra. Testing methods and data analysis for different stages ranging from grinding to polishing are discussed. Some critical factors affecting the efficiency and accuracy of the grinding/polishing procedure are summarized. In addition the preliminary work to make large off-axis asphere mirrors is presented. The difficulties in polishing and testing for both circular aperture and rectangular aperture mirrors are previewed and a possible solution is given. To control the geometrical parameters such as radius of curvature and conic constant a new profiler has been built and it has proven very useful to improve the grinding efficiency. Finally the manufacturing of small aspheres using deterministic grinding tool is also introduced. The fine grinding procedure of LOH's asphere grinding machine is presented.