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Chinese Academy of Sciences Institutional Repositories Grid
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CAS IR Grid
机构
光电技术研究所 [11]
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OAI收割 [11]
内容类型
期刊论文 [9]
会议论文 [2]
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2020 [1]
2018 [1]
2017 [2]
2016 [1]
2015 [1]
2013 [2]
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专题:光电技术研究所
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Fabrication of Ultralow Stress TiO2/SiO(2)Optical Coatings by Plasma Ion-Assisted Deposition
期刊论文
OAI收割
COATINGS, 2020, 卷号: 10, 期号: 8, 页码: 10080720-1-13
作者:
Guo, Chun
;
Kong, Mingdong
  |  
收藏
  |  
浏览/下载:22/0
  |  
提交时间:2021/05/11
Stress
Plasma Ion-assisted Deposition
Tio(2)Film
Sio(2)Film
Annealing Treatment
Performance optimization of 93 nm antireflective coatings with wide incident angle ranges on strongly curved spherical substrates
期刊论文
OAI收割
OPTICS EXPRESS, 2018, 卷号: 26, 期号: 15, 页码: 19524-19533
作者:
Liu, Cunding
;
Kong, Mingdong
;
Li, Bincheng
  |  
收藏
  |  
浏览/下载:34/0
  |  
提交时间:2019/08/23
Antireflection coatings
Atomic force microscopy
Film thickness
Lanthanum compounds
Magnesium compounds
Refractive index
Spheres
Characterization of surface defects of silicon substrates by the total scattering and absorption
会议论文
OAI收割
作者:
Zhang, Kepeng
;
Zhang, Xingxin
;
Huang, Wei
  |  
收藏
  |  
浏览/下载:34/0
  |  
提交时间:2018/12/20
Absorption - Atomic force microscopy - Brillouin scattering - Light scattering - Microscopes - Optical systems - Photonics - Reflection - Silicon - Substrates - Surface roughness - Surface scattering
Measurement and analysis of the surface roughness of Ag film used in plasmonic lithography
期刊论文
OAI收割
Chinese Physics B, 2017, 卷号: 26, 期号: 1, 页码: 016801
作者:
Liang, Gao-Feng
;
Jiao, Jiao
;
Luo, Xian-Gang
;
Zhao, Qing
  |  
收藏
  |  
浏览/下载:15/0
  |  
提交时间:2018/11/20
Atomic force microscopy - Deposition - Lithography - Photolithography - Plasmons - Substrates - Surface roughness
The effect of the surface energy and structure of the SiC substrate on epitaxial graphene growth
期刊论文
OAI收割
RSC Advances, 2016, 卷号: 6, 期号: 103, 页码: 100908-100915
作者:
Sun, Li
;
Chen, Xiufang
;
Yu, Wancheng
;
Sun, Honggang
;
Zhao, Xian
  |  
收藏
  |  
浏览/下载:16/0
  |  
提交时间:2018/06/14
Atomic Force Microscopy
Interfacial Energy
Microelectronics
Silicon
Silicon Carbide
Light scattering to investigate the surface quality of silicon substrates
会议论文
OAI收割
Proceedings of SPIE - The International Society for Optical Engineering, 2015
作者:
Zhang, Xingxin
;
Huang, Wei
;
Hu, Xiaochuan
收藏
  |  
浏览/下载:18/0
  |  
提交时间:2016/11/25
Microstructure-related properties of magnesium fluoride films at 193nm by oblique-angle deposition
期刊论文
OAI收割
Optics Express, 2013, 卷号: 21, 期号: 1, 页码: 960-967
作者:
Guo, Chun
;
Kong, Mingdong
;
Lin, Dawei
;
Liu, Cunding
;
Li, Bincheng
收藏
  |  
浏览/下载:14/0
  |  
提交时间:2016/11/21
Simultaneous determination of optical constants, thickness, and surface roughness of thin film from spectrophotometric measurements
期刊论文
OAI收割
Optics Letters, 2013, 卷号: 38, 期号: 1, 页码: 40-42
作者:
Guo, Chun
;
Kong, Mingdong
;
Gao, Weidong
;
Li, Bincheng
收藏
  |  
浏览/下载:7/0
  |  
提交时间:2016/11/21
Linear and nonlinear optical properties of RF sputtered (Pb,La)(Zr,Ti)O-3 ferroelectric thin films
期刊论文
OAI收割
JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2007, 卷号: 18, 期号: 8, 页码: 887-892
作者:
Leng, Wenjian
;
Yang, Chuanren
;
Ji, Hong
;
Zhang, Jihua
;
Tang, Jinlong
收藏
  |  
浏览/下载:10/0
  |  
提交时间:2015/09/21
Suppression of pinhole defects in fullerene molecular electron beam resists
期刊论文
OAI收割
MICROELECTRONIC ENGINEERING, 2007, 卷号: 84, 期号: 5-8, 页码: 1066-1070
作者:
Chen, X.
;
Robinson, A. P. G.
;
Manickam, M.
;
Preece, J. A.
收藏
  |  
浏览/下载:7/0
  |  
提交时间:2015/09/21
molecular resist
fullerene
electron beam lithography
pinholes