中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
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  • 微电子研究所 [20]
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Investigation and optimization of Pirani Vacuum Gauges with Monocrystal silicon heaters and heat sinks 期刊论文  OAI收割
Journal of Microelectromechanical Systems, 2017
作者:  
Zhang LM(张乐民);  Jiao BB(焦斌斌);  Yun SC(云世昌);  Kong YM(孔延梅);  Chen DP(陈大鹏)
  |  收藏  |  浏览/下载:12/0  |  提交时间:2018/07/09
A CMOS Compatible MEMS Pirani Vacuum Gauge with Monocrystal Silicon Heaters and Heat Sinks 期刊论文  OAI收割
CHIN.PHYS.LETT, 2017
作者:  
Zhang LM(张乐民);  Jiao BB(焦斌斌);  Yun SC(云世昌);  Kong YM(孔延梅);  Chen DP(陈大鹏)
  |  收藏  |  浏览/下载:15/0  |  提交时间:2018/07/09
An electrical test method for quality detecting of wafer level eutetic bonding 期刊论文  OAI收割
Journal of Micromechanics and Microengineering, 2017
作者:  
Zhang LM(张乐民);  Jiao BB(焦斌斌);  Kong YM(孔延梅);  Yun SC(云世昌);  Chen DP(陈大鹏)
  |  收藏  |  浏览/下载:8/0  |  提交时间:2018/07/09
Thermopile Infrared Detector with Detectivity Greater Than 10(8) cmHz((1/2))/W 外文期刊  OAI收割
2010
作者:  
Xue, CY;  Wang, KQ;  Liang, T;  Jiao, BB;  Zhang, WD
  |  收藏  |  浏览/下载:17/0  |  提交时间:2010/11/26
Optical sensitivity analysis of deformed mirrors for microcantilever array IR imaging 外文期刊  OAI收割
2009
作者:  
Cheng, T;  Mao, L;  Qian, J;  Zhang, QC;  Shi, HT
  |  收藏  |  浏览/下载:8/0  |  提交时间:2010/11/26
Optical sensitivity analysis of a bent micro reflector array in uncooled infrared imaging 外文期刊  OAI收割
2009
作者:  
Gao, J;  Zhang, QC;  Jiao, BB;  Chen, DP
  |  收藏  |  浏览/下载:6/0  |  提交时间:2010/11/26
Optical readout sensitivity of deformed microreflector for uncooled infrared detector: theoretical model and experimental validation 外文期刊  OAI收割
2009
作者:  
Zhang, QC;  Wu, XP;  Chen, DP;  Jiao, BB;  Cheng, T
  |  收藏  |  浏览/下载:12/0  |  提交时间:2010/11/26
EFFECT OF REFLECTOR DEFORMATION ON OPTICAL DETECTION SENSITIVITY FOR OPTICAL READOUT INFRARED IMAGING SYSTEM 外文期刊  OAI收割
2009
作者:  
Wu, XP;  Cheng, T;  Qian, J;  Shi, HT;  Chen, DP
  |  收藏  |  浏览/下载:15/0  |  提交时间:2010/11/26
Design  Array  
Uncooled infrared imaging device based on optimized optomechanical micro-cantilever array 外文期刊  OAI收割
2008
作者:  
Li, CB;  Dong, FL;  Zhang, QC;  Chen, DP;  Miao, ZY
  |  收藏  |  浏览/下载:19/0  |  提交时间:2010/11/26
Uncooled Infrared Imaging Using a Substrate-Free Focal-Plane Array 外文期刊  OAI收割
2008
作者:  
Zhang, QC;  Cheng, T;  Wu, XP;  Chen, DP;  Jiao, BB
  |  收藏  |  浏览/下载:9/0  |  提交时间:2010/11/26