中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
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浏览/检索结果: 共19条,第1-10条 帮助

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Interface effects on the properties of Cu-Nb nanolayered composites 期刊论文  OAI收割
JOURNAL OF MATERIALS RESEARCH, 2020, 卷号: 35, 期号: 20, 页码: 2684-2700
作者:  
  |  收藏  |  浏览/下载:98/0  |  提交时间:2021/02/02
Programmable uniformity correction by using plug-in finger arrays in advanced lithography system 期刊论文  OAI收割
Opt. Commun., 2017, 卷号: 392, 页码: 77
作者:  
Yang, Baoxi;  Huang, Huijie;  Zeng, Aijun;  Zhu, Jing;  Zhang, Yunbo
收藏  |  浏览/下载:26/0  |  提交时间:2017/12/25
Measurement precision improvement for excimer laser pulse energy sensor based on a special finite impulse response filter 期刊论文  OAI收割
J. Opt. Technol., 2017, 卷号: 84, 期号: 5, 页码: 346
作者:  
Zhu, Jing;  Xie, Chengke;  Huang, Huijie;  Chen, Ming;  Yang, Baoxi
收藏  |  浏览/下载:25/0  |  提交时间:2017/12/25
Programmable uniformity correction by using plug-in finger arrays in advanced lithography system 期刊论文  OAI收割
Opt. Commun., 2017, 卷号: 392, 页码: 77
作者:  
Zhang, Yunbo;  Zhu, Jing;  Yang, Baoxi;  Zeng, Aijun;  Huang, Huijie
收藏  |  浏览/下载:26/0  |  提交时间:2017/12/25
Measurement precision improvement for excimer laser pulse energy sensor based on a special finite impulse response filter 期刊论文  OAI收割
J. Opt. Technol., 2017, 卷号: 84, 期号: 5, 页码: 346
作者:  
Yang, Baoxi
收藏  |  浏览/下载:21/0  |  提交时间:2017/12/25
Flat Gauss illumination for the step-and-scan lithographic system 期刊论文  OAI收割
Opt. Commun., 2016, 卷号: 372, 页码: 201
作者:  
Zhu, Jing;  Huang, Huijie;  Yang, Baoxi;  Zeng, Aijun;  Wang, Ying
收藏  |  浏览/下载:16/0  |  提交时间:2017/12/25
Method of pupil shaping for off-axis illumination in optical lithography 期刊论文  OAI收割
J. Opt. Technol., 2016, 卷号: 83, 期号: 3, 页码: 154
作者:  
Chen, Ming;  Huang, Huijie;  Yang, Baoxi;  Zhu, Jing;  Zeng, Aijun
收藏  |  浏览/下载:12/0  |  提交时间:2017/12/25
Flat Gauss illumination for the step-and-scan lithographic system 期刊论文  OAI收割
Opt. Commun., 2016, 卷号: 372, 页码: 201
作者:  
Zhu, Jing;  Huang, Huijie;  Yang, Baoxi;  Chen, Ming;  Wang, Ying
收藏  |  浏览/下载:10/0  |  提交时间:2017/12/25
Method of pupil shaping for off-axis illumination in optical lithography 期刊论文  OAI收割
J. Opt. Technol., 2016, 卷号: 83, 期号: 3, 页码: 154
作者:  
Huang, Huijie;  Chen, Ming;  Zhang, Fang;  Zeng, Aijun;  Zhu, Jing
收藏  |  浏览/下载:16/0  |  提交时间:2017/12/25
Linearity estimation of high accurate energy detector for excimer laser 期刊论文  OAI收割
optik, 2015, 卷号: 126, 期号: 7_8, 页码: 817
作者:  
Xie, Chengke;  Chen, Ming;  Zhu, Jing;  Yang, Baoxi;  Huang, Huijie
收藏  |  浏览/下载:20/0  |  提交时间:2016/11/28