中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
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CAS IR Grid
机构
光电技术研究所 [37]
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OAI收割 [37]
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期刊论文 [35]
会议论文 [2]
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2020 [1]
2019 [2]
2017 [1]
2016 [1]
2015 [8]
2014 [10]
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浏览/检索结果:
共37条,第1-10条
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存缴方式:oaiharvest
专题:光电技术研究所
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Intensity modulation based optical proximity optimization for the maskless lithography
期刊论文
OAI收割
OPTICS EXPRESS, 2020, 卷号: 28, 期号: 1, 页码: 548-557
作者:
Liu, Jianghui
;
Liu, Junbo
;
Deng, Qingyuan
;
Feng, Jinhua
;
Zhou, Shaolin
  |  
收藏
  |  
浏览/下载:14/0
  |  
提交时间:2021/05/11
Large range nano alignment for proximity lithography using complex grating
期刊论文
OAI收割
Optics and Laser Technology, 2019, 卷号: 112, 页码: 101-106
作者:
Tang, Yan
;
Liu, Junbo
;
Yang, Yong
;
Hu, Song
;
Zhao, Lixin
  |  
收藏
  |  
浏览/下载:8/0
  |  
提交时间:2021/05/06
Design and fabrication of an artificial compound eye for multi-spectral imaging
期刊论文
OAI收割
Micromachines, 2019, 卷号: 10, 期号: 3
作者:
Cao, Axiu
;
Pang, Hui
;
Zhang, Man
;
Shi, Lifang
;
Deng, Qiling
  |  
收藏
  |  
浏览/下载:18/0
  |  
提交时间:2021/05/06
artificial compound eye
multi-spectral imaging
lithography
spectral splitting
Proximity correction and resolution enhancement of plasmonic lens lithography far beyond the near field diffraction limit
期刊论文
OAI收割
RSC Advances, 2017, 卷号: 7, 期号: 20, 页码: 12366-12373
作者:
Luo, Yunfei
;
Liu, Ling
;
Zhang, Wei
;
Kong, Weijie
;
Zhao, Chengwei
  |  
收藏
  |  
浏览/下载:23/0
  |  
提交时间:2018/11/20
Plasmons - Scanning probe microscopy
UV spectrum-integral Talbot lithography for amplitude periodic micro-grating fabrication
期刊论文
OAI收割
Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials, 2016, 卷号: 9685, 页码: 96850M
作者:
Deng, Qian
;
Liu, Junbo
;
Zhou, Shaolin
;
Tang, Yan
;
Zhao, Lixin
  |  
收藏
  |  
浏览/下载:34/0
  |  
提交时间:2018/06/14
Crystal Symmetry
Frequency Doublers
Lithography
Manufacture
Microoptics
Optical Devices
Phase Shift
Ultraviolet Spectroscopy
Spectrum-Integral Talbot Effect for UV Photolithography With Extended DOF
期刊论文
OAI收割
IEEE PHOTONICS TECHNOLOGY LETTERS, 2015, 卷号: 27, 期号: 20, 页码: 2201-2204
作者:
Liu, Junbo
;
Zhou, Shaolin
;
Hu, Song
;
Gao, Hongtao
;
He, Yu
收藏
  |  
浏览/下载:23/0
  |  
提交时间:2015/12/04
Diffraction
depth-of-focus
Talbot lithography
microfabrication
Moire fringe alignment using composite circular-line gratings for proximity lithography
期刊论文
OAI收割
OPTICS EXPRESS, 2015, 卷号: 23, 期号: 16, 页码: 20905-20915
作者:
Xu, Feng
;
Zhou, Shaolin
;
Hu, Song
;
Jiang, Wenbo
;
Luo, Liang
收藏
  |  
浏览/下载:13/0
  |  
提交时间:2015/12/04
Adjustment Strategy for Inclination Moire Fringes in Lithography by Spatial Frequency Decomposition
期刊论文
OAI收割
IEEE PHOTONICS TECHNOLOGY LETTERS, 2015, 卷号: 27, 期号: 4
作者:
Zhu, Jiangping
;
Hu, Song
;
Su, Xianyu
;
You, Zhisheng
收藏
  |  
浏览/下载:14/0
  |  
提交时间:2015/07/10
Proximity lithography
mask-wafer alignment
phase analysis
spatial frequency
Gap-optimized Moire phase imaging alignment for proximity lithography
期刊论文
OAI收割
OPTICAL ENGINEERING, 2015, 卷号: 54, 期号: 1
作者:
Zhu, Jiangping
;
Hu, Song
;
You, Zhisheng
;
Su, Xianyu
收藏
  |  
浏览/下载:20/0
  |  
提交时间:2015/07/10
lithography
alignment
Moire techniques
Moiré fringe alignment using composite circular-line gratings for proximity lithography
期刊论文
OAI收割
Optics Express, 2015, 卷号: 23, 期号: 16, 页码: 20905-20915
作者:
Xu, Feng
;
Zhou, Shaolin
;
Hu, Song
;
Jiang, Wenbo
;
Luo, Liang
收藏
  |  
浏览/下载:12/0
  |  
提交时间:2016/11/23