中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
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  • 光电技术研究所 [37]
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  • OAI收割 [37]
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Intensity modulation based optical proximity optimization for the maskless lithography 期刊论文  OAI收割
OPTICS EXPRESS, 2020, 卷号: 28, 期号: 1, 页码: 548-557
作者:  
Liu, Jianghui;  Liu, Junbo;  Deng, Qingyuan;  Feng, Jinhua;  Zhou, Shaolin
  |  收藏  |  浏览/下载:14/0  |  提交时间:2021/05/11
Large range nano alignment for proximity lithography using complex grating 期刊论文  OAI收割
Optics and Laser Technology, 2019, 卷号: 112, 页码: 101-106
作者:  
Tang, Yan;  Liu, Junbo;  Yang, Yong;  Hu, Song;  Zhao, Lixin
  |  收藏  |  浏览/下载:8/0  |  提交时间:2021/05/06
Design and fabrication of an artificial compound eye for multi-spectral imaging 期刊论文  OAI收割
Micromachines, 2019, 卷号: 10, 期号: 3
作者:  
Cao, Axiu;  Pang, Hui;  Zhang, Man;  Shi, Lifang;  Deng, Qiling
  |  收藏  |  浏览/下载:18/0  |  提交时间:2021/05/06
Proximity correction and resolution enhancement of plasmonic lens lithography far beyond the near field diffraction limit 期刊论文  OAI收割
RSC Advances, 2017, 卷号: 7, 期号: 20, 页码: 12366-12373
作者:  
Luo, Yunfei;  Liu, Ling;  Zhang, Wei;  Kong, Weijie;  Zhao, Chengwei
  |  收藏  |  浏览/下载:23/0  |  提交时间:2018/11/20
UV spectrum-integral Talbot lithography for amplitude periodic micro-grating fabrication 期刊论文  OAI收割
Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials, 2016, 卷号: 9685, 页码: 96850M
作者:  
Deng, Qian;  Liu, Junbo;  Zhou, Shaolin;  Tang, Yan;  Zhao, Lixin
  |  收藏  |  浏览/下载:34/0  |  提交时间:2018/06/14
Spectrum-Integral Talbot Effect for UV Photolithography With Extended DOF 期刊论文  OAI收割
IEEE PHOTONICS TECHNOLOGY LETTERS, 2015, 卷号: 27, 期号: 20, 页码: 2201-2204
作者:  
Liu, Junbo;  Zhou, Shaolin;  Hu, Song;  Gao, Hongtao;  He, Yu
收藏  |  浏览/下载:23/0  |  提交时间:2015/12/04
Moire fringe alignment using composite circular-line gratings for proximity lithography 期刊论文  OAI收割
OPTICS EXPRESS, 2015, 卷号: 23, 期号: 16, 页码: 20905-20915
作者:  
Xu, Feng;  Zhou, Shaolin;  Hu, Song;  Jiang, Wenbo;  Luo, Liang
收藏  |  浏览/下载:13/0  |  提交时间:2015/12/04
Adjustment Strategy for Inclination Moire Fringes in Lithography by Spatial Frequency Decomposition 期刊论文  OAI收割
IEEE PHOTONICS TECHNOLOGY LETTERS, 2015, 卷号: 27, 期号: 4
作者:  
Zhu, Jiangping;  Hu, Song;  Su, Xianyu;  You, Zhisheng
收藏  |  浏览/下载:14/0  |  提交时间:2015/07/10
Gap-optimized Moire phase imaging alignment for proximity lithography 期刊论文  OAI收割
OPTICAL ENGINEERING, 2015, 卷号: 54, 期号: 1
作者:  
Zhu, Jiangping;  Hu, Song;  You, Zhisheng;  Su, Xianyu
收藏  |  浏览/下载:20/0  |  提交时间:2015/07/10
Moiré fringe alignment using composite circular-line gratings for proximity lithography 期刊论文  OAI收割
Optics Express, 2015, 卷号: 23, 期号: 16, 页码: 20905-20915
作者:  
Xu, Feng;  Zhou, Shaolin;  Hu, Song;  Jiang, Wenbo;  Luo, Liang
收藏  |  浏览/下载:12/0  |  提交时间:2016/11/23