机构

• 光电技术研究所 [10]
• 地球化学研究所 [4]

采集方式

• OAI收割 [14]

内容类型

• 期刊论文 [12]
• 会议论文 [2]

发表日期

• 2020 [1]
• 2016 [1]
• 2015 [1]
• 2014 [3]
• 2013 [1]
• 2012 [5]
• 更多

学科主题

• Focusing; ... [1]
• High numer... [1]
• Microlense... [1]
• 环境地球化学 [1]

筛选

浏览/检索结果: 共14条，第1-10条 帮助 条数/页： 5101520253035404550556065707580859095100 排序方式： 请选择题名升序题名降序提交时间升序提交时间降序作者升序作者降序发表日期升序发表日期降序 Measurement of Wafer Focus by Grating Shearing Interferometry 期刊论文  OAI收割 Applied Sciences-Basel, 2020, 卷号: 10, 期号: 3, 页码: 10217467-1-8 作者:  Wang, Jian;  Hu, Song;  Zhu, Xianchang   |  收藏  |  浏览/下载：29/0  |  提交时间：2021/05/11 Focusing  Grating  Shearing Interferometry  Lithography   Design and simulation of large field plate lithography lens 期刊论文  OAI收割 Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials, 2016, 卷号: 9685, 页码: 96850V 作者:  Deng, Chao;  Xing, Tingwen;  Lin, Wumei;  Zhu, Xianchang   |  收藏  |  浏览/下载：29/0  |  提交时间：2018/06/14 Fits And Tolerances  Lithography  Manufacture  Materials Testing  Optical Design  Optical Devices  Optical Systems   Wafer focusing measurement of optical lithography system based on Hartmann-Shack wavefront testing 期刊论文  OAI收割 OPTICS AND LASERS IN ENGINEERING, 2015, 卷号: 66, 页码: 128-131 作者:  Zhu, Xianchang;  Hu, Song;  Zhao, Lixin 收藏  |  浏览/下载：26/0  |  提交时间：2016/11/22 Focal length measurement of a microlens-array by grating shearing interferometry 期刊论文  OAI收割 APPLIED OPTICS, 2014, 卷号: 53, 期号: 29, 页码: 6663-6669 作者:  Zhu, Xianchang;  Hu, Song;  Zhao, Lixin 收藏  |  浏览/下载：26/0  |  提交时间：2015/07/10 Focal length measurement of a microlens-array by grating shearing interferometry 期刊论文  OAI收割 Applied Optics, 2014, 卷号: 53, 期号: 29, 页码: 6663-6669 作者:  Zhu, Xianchang;  Hu, Song;  Zhao, Lixin 收藏  |  浏览/下载：21/0  |  提交时间：2016/11/23 Design of a projection objective with high numeric aperture and large view field 会议论文  OAI收割 Proceedings of SPIE: 7TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES: DESIGN, MANUFACTURING, AND TESTING OF MICRO- AND NANO-OPTICAL DEVICES AND SYSTEMS, 2014 作者:  Liu, Junbo;  Hu, Song;  Gao, Hongtao;  Zhao, Lixin;  Zhu, Xianchang 收藏  |  浏览/下载：22/0  |  提交时间：2016/11/24 基于Hartmann-Shack波前检测原理的微透镜阵列焦距测量 期刊论文  OAI收割 光学精密工程, 2013, 卷号: 21, 期号: 5, 页码: 1122-1128 作者:  朱咸昌;  伍凡;  曹学东;  吴时彬 收藏  |  浏览/下载：22/0  |  提交时间：2016/11/22 微透镜阵列  焦距测量  波前检测  哈特曼波前传感器  图像清晰度   Novel Dynamic Flux Chamber for Measuring Air-Surface Exchange of Hg-o from Soils 期刊论文  OAI收割 Environmental Science & Technology, 2012, 卷号: 46, 期号: 16, 页码: 8910-8920 Che-Jen Lin; Wei Zhu; Xianchang Li; Xinbin Feng; Jonas Sommar; Lihai Shang 收藏  |  浏览/下载：21/0  |  提交时间：2015/06/04 Novel Dynamic Flux Chamber for Measuring Air–Surface Exchange of Hgo from Soils 期刊论文  OAI收割 Environmental Science & Technology, 2012, 卷号: 46, 期号: 16, 页码: 8910-8920 Che-Jen Lin; Wei Zhu; Xianchang Li; Xinbin Feng; Jonas Sommar; Lihai Shang 收藏  |  浏览/下载：20/0  |  提交时间：2013/08/15 Focal length measurement of Microlens-array by the clarity function of digital image 会议论文  OAI收割 Proceedings of SPIE: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 2012 作者:  Zhu, Xianchang;  Wu, Zhu Fan;  Cao, Xuedong;  Wu, Shibin;  Zhang, Peng 收藏  |  浏览/下载：19/0  |  提交时间：2016/11/25