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Chinese Academy of Sciences Institutional Repositories Grid
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浏览/检索结果: 共10条,第1-10条 帮助

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Littrow 3D measurement based on 2D grating dual-channel equal-optical path interference 期刊论文  OAI收割
Optics Express, 2022, 卷号: 30, 期号: 23, 页码: 41671-41684
作者:  
Y. Yin;  L. Liu;  Y. Bai;  Jirigalantu;  H. Yu
  |  收藏  |  浏览/下载:3/0  |  提交时间:2023/06/14
New Measuring Method of Diffraction Efficiency for Concave Grating Based on Fourier Optics Principle 期刊论文  OAI收割
Spectroscopy and Spectral Analysis, 2017, 卷号: 37, 期号: 4
作者:  
Ma, Z. Y.;  X. D. Qi;  X. T. Li;  Bayanheshig;  X. F. Yao
  |  收藏  |  浏览/下载:26/0  |  提交时间:2018/06/13
Design of Ultraviolet High-Resolution Astigmatic Correction Rowland Holographic Grating 期刊论文  OAI收割
Spectroscopy and Spectral Analysis, 2017, 卷号: 37, 期号: 11
作者:  
Zhao, X. L.;  Bayanheshig;  W. H. Li;  Y. X. Jiang;  N. Wu and T. Zhang
  |  收藏  |  浏览/下载:28/0  |  提交时间:2018/06/13
Two-color heterodyne laser interferometry for long-distance stage measurement with correction of uncertainties in measured optical distances 期刊论文  OAI收割
Scientific Reports, 2017, 卷号: 7
作者:  
Liu, Z. W.;  W. H. Li;  Bayanheshig;  X. T. Li;  S. Jiang
  |  收藏  |  浏览/下载:20/0  |  提交时间:2018/06/13
Precision measurement of X-axis stage mirror profile in scanning beam interference lithography by three-probe system based on bidirectional integration model 期刊论文  OAI收割
Optics Express, 2017, 卷号: 25, 期号: 9
作者:  
Liu, Z. W.;  S. Jiang;  X. T. Li;  Y. Song;  W. H. Li and Bayanheshig
  |  收藏  |  浏览/下载:130/0  |  提交时间:2018/06/13
Moire alignment algorithm for an aberration-corrected holographic grating exposure system and error analysis 期刊论文  OAI收割
Applied Optics, 2016, 卷号: 55, 期号: 31
作者:  
Zhao, X. L.;  Bayanheshig;  W. H. Li;  Y. X. Jiang;  Y. Song
收藏  |  浏览/下载:15/0  |  提交时间:2017/09/11
Study on the Effects and Compensation Effect of Recording Parameters Error on Imaging Performance of Holographic Grating in On-Line Spectral Diagnose 期刊论文  OAI收割
Spectroscopy and Spectral Analysis, 2016, 卷号: 36, 期号: 3
作者:  
Jiang, Y. X.;  Bayanheshig;  S. Yang;  X. L. Zhao;  N. Wu and W. H. Li
收藏  |  浏览/下载:24/0  |  提交时间:2017/09/11
Measuring method of diffraction efficiency for plane grating based on Fourier spectral technology 期刊论文  OAI收割
Applied Optics, 2016, 卷号: 55, 期号: 3
作者:  
Ma, Z. Y.;  X. D. Qi;  X. T. Li;  S. W. Zhang;  Bayanheshig
收藏  |  浏览/下载:23/0  |  提交时间:2017/09/11
Practical method study on correcting yaw error of 500 mm grating blank carriage in real time 期刊论文  OAI收割
Applied Optics, 2015, 卷号: 54, 期号: 13, 页码: 4084-4088
作者:  
Yang, C.;  X. T. Li;  H. L. Yu;  H. Z. Yu;  J. W. Zhu
收藏  |  浏览/下载:14/0  |  提交时间:2016/07/15
Establishment and experimental verification of the photoresist model considering interface slip between photoresist and concave spherical substrate 期刊论文  OAI收割
Aip Advances, 2015, 卷号: 5, 期号: 7, 页码: 10
作者:  
Yang, S.;  Bayanheshig;  X. L. Zhao;  S. Xing;  Y. X. Jiang
收藏  |  浏览/下载:24/0  |  提交时间:2016/07/15