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CAS IR Grid
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长春光学精密机械与... [10]
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OAI收割 [10]
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期刊论文 [10]
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2023 [1]
2022 [1]
2021 [1]
2020 [2]
2017 [3]
2016 [1]
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Accurate measurement and adjustment method for interference fringe direction in a scanning beam interference lithography system
期刊论文
OAI收割
Optics Express, 2023, 卷号: 31, 期号: 17, 页码: 28145-28160
作者:
Y. Li
;
S. Jiang
;
X. Chen
;
Z. Liu
;
W. Wang
  |  
收藏
  |  
浏览/下载:18/0
  |  
提交时间:2024/07/03
Fabrication of ultra-high aspect ratio silicon grating using an alignment method based on a scanning beam interference lithography system
期刊论文
OAI收割
Optics Express, 2022, 卷号: 30, 期号: 22, 页码: 40842-40853
作者:
X. S. Chen
;
S. Jiang
;
Y. B. Li
;
Y. X. Jiang
;
W. Wang and Bayanheshig
  |  
收藏
  |  
浏览/下载:5/0
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提交时间:2023/06/14
Numerical simulation of ultrasonic enhancement by acoustic streaming and thermal effect on mass transfer through a new computation model
期刊论文
OAI收割
International Journal of Heat and Mass Transfer, 2021, 卷号: 171
作者:
X. Chen
;
Bayanheshig
;
Q. Jiao
;
X. Tan and W. Wang
  |  
收藏
  |  
浏览/下载:36/0
  |  
提交时间:2022/06/13
Grating-based precision measurement system for five-dimensional measurement
期刊论文
OAI收割
Chinese Optics, 2020, 卷号: 13, 期号: 1, 页码: 189-202
作者:
Q. Lv,W. Wang,Z.-W. Liu,Y. Song,S. Jiang,L. Liu,Bayanheshig and W.-H. Li
  |  
收藏
  |  
浏览/下载:29/0
  |  
提交时间:2021/07/06
Heterodyne period measurement in a scanning beam interference lithography system
期刊论文
OAI收割
Applied Optics, 2020, 卷号: 59, 期号: 19, 页码: 5830-5836
作者:
S. Jiang,B. Lu,Y. Song,Z. W. Liu,W. Wang,L. Shuo and Bayanheshig
  |  
收藏
  |  
浏览/下载:37/0
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提交时间:2021/07/06
Beam Alignment Error and Its Control in Scanning Beam Interference Lithography System
期刊论文
OAI收割
Guangxue Xuebao/Acta Optica Sinica, 2017, 卷号: 37, 期号: 7
作者:
Wang, W.
;
Bayanheshig
;
M. Pan
;
Y. Song and W. Li
  |  
收藏
  |  
浏览/下载:22/0
  |  
提交时间:2018/06/13
Weighted iterative algorithm for beam alignment in scanning beam interference lithography
期刊论文
OAI收割
Applied Optics, 2017, 卷号: 56, 期号: 31
作者:
Song, Y.
;
W. Wang
;
S. Jiang
;
Bayanheshig and N. Zhang
  |  
收藏
  |  
浏览/下载:16/0
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提交时间:2018/06/13
Design of Spot Size and Optical Path in Scanning Beam Interference Lithography System
期刊论文
OAI收割
Zhongguo Jiguang/Chinese Journal of Lasers, 2017, 卷号: 44, 期号: 9
作者:
Wang, W.
;
S. Jiang
;
Y. Song and Bayanheshig
  |  
收藏
  |  
浏览/下载:21/0
  |  
提交时间:2018/06/13
Beam alignment and convergence analysis of scanning beam interference lithography systems
期刊论文
OAI收割
Zhongguo Jiguang/Chinese Journal of Lasers, 2016, 卷号: 43, 期号: 12
作者:
Wang, W.
;
Bayanheshig
;
Y. Song
;
S. Jiang and M. Pan
收藏
  |  
浏览/下载:18/0
  |  
提交时间:2017/09/11
Tunable spatial heterodyne spectroscopy with grating-mirror structure
期刊论文
OAI收割
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2015, 卷号: 23, 期号: 12, 页码: 3295-3302
作者:
Bayanheshig
;
T.-T. Li
;
M.-Z. Pan
;
J.-C. Cui
;
W. Wang and X.-T. Li
收藏
  |  
浏览/下载:14/0
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提交时间:2016/08/24