中国科学院机构知识库网格
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CAS IR Grid
机构
上海微系统与信息技术... [4]
长春光学精密机械与物... [1]
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期刊论文 [5]
会议论文 [2]
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2010 [2]
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Photocatalytic assisted chemical mechanical polishing for silicon carbide using developed ceria coated diamond core-shell abrasives
期刊论文
OAI收割
TRIBOLOGY INTERNATIONAL, 2024, 卷号: 197
作者:
Zhu, Xiaoxiao
;
Gui, Yuziyu
;
Fu, Hao
;
Ding, Juxuan
;
Mo, Zhangchao
  |  
收藏
  |  
浏览/下载:17/0
  |  
提交时间:2024/11/20
Silicon carbide (SiC)
Photocatalytic-assisted chemical mechanical
polishing (PCMP)
Core/shell abrasives
Materials removal mechanism
Synthesis, characterization of ceria-coated silica particles and their chemical mechanical polishing performance on glass substrate
期刊论文
OAI收割
APPLIED SURFACE SCIENCE, 2010, 卷号: 257, 期号: 5, 页码: 1750-1755
Zhang, ZF
;
Liu, WL
;
Zhu, JK
;
Song, ZT
收藏
  |  
浏览/下载:20/0
  |  
提交时间:2012/03/24
CMP BEHAVIOR
SURFACE MODIFICATION
NANO-ABRASIVES
GENERAL-METHOD
NANOPARTICLES
OXIDE
STABILITY
Two-Step Chemical Mechanical Polishing of Sapphire Substrate
期刊论文
OAI收割
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2010, 卷号: 157, 期号: 6, 页码: H688-H691
Zhang, ZF
;
Liu, WL
;
Song, ZT
;
Hu, XK
收藏
  |  
浏览/下载:32/0
  |  
提交时间:2012/03/24
PROCESS PARAMETERS
COLLOIDAL SILICA
CMP
PLANARIZATION
ABRASIVES
Study on the influence and disposal method of the micro-cracks of optical components (EI CONFERENCE)
会议论文
OAI收割
4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, November 19, 2008 - November 21, 2008, Chengdu, China
作者:
Xuan B.
;
Xie J.-J.
;
Xie J.-J.
;
Zhang H.
;
Zhang H.
收藏
  |  
浏览/下载:30/0
  |  
提交时间:2013/03/25
Micro-crack is one of the most effective factor to the intensity and service life of optical components. Owing to the micro-crack on surface
actual strength of optical components is reduced severely
even less than ten-percent of its theoretical strength. According to fracture mechanics
the mechanisms of the formation and propagation of micro-crack and the growth theory of sub-critical micro-crack are discussed in the paper firstly. Based on practice
an on-line test method disposing etching holes-the molecule-infiltrating method and the principles of acid-etching method disposing micro-crack are described. Followed by the demolishing mechanism of abrasives and a more reasonable removal redundancy of fine-grinding and polishing during
optical production is given by using abrasives in different-size orderly. 2009 SPIE.
Effect of chemicals on chemical mechanical polishing of glass substrates
期刊论文
OAI收割
CHINESE PHYSICS LETTERS, 2007, 卷号: 24, 期号: 1, 页码: 259-261
Wang, LY
;
Zhang, KL
;
Song, ZT
;
Feng, SL
收藏
  |  
浏览/下载:12/0
  |  
提交时间:2012/03/24
ABRASIVES
SURFACE
Ceria concentration effect on chemical mechanical polishing of optical glass
期刊论文
OAI收割
APPLIED SURFACE SCIENCE, 2007, 卷号: 253, 期号: 11, 页码: 4951-4954
Wang, LY
;
Zhang, KL
;
Song, ZT
;
Feng, SL
收藏
  |  
浏览/下载:24/0
  |  
提交时间:2012/03/24
OXIDE FUEL-CELL
TECHNOLOGIES
ABRASIVES
DEFECT
Preparation and characterization of macroporous pumice-porcelain composite foams
会议论文
OAI收割
作者:
Wu, Zhenjiang
;
Chen, Yunfa
;
Yu, Yeon-Tae
  |  
收藏
  |  
浏览/下载:0/0
  |  
提交时间:2023/06/16
Abrasives - Characterization - Polyurethanes - Porcelain - Quartz