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	Design of vibrating wire alignment system for HEPS-TF 期刊论文 OAI收割 HIGH POWER LASER AND PARTICLE BEAMS, 2015, 卷号: 27, 期号: 9, 页码: 95102 作者: Wu L(吴蕾); Wang XL(王小龙); Li CH(李春华); Chen SY(陈素颖); Qu HM(屈化民) 收藏 \| 浏览/下载：35/0 \| 提交时间：2016/04/18 Alignment technique Alignment tolerance Circuit structures Control and data acquisition systems High energy photons Mechanical structures Synchrotron radiation light source Vibrating wire
	Modulation transfer function measurement technique for image sensor arrays (EI CONFERENCE) 会议论文 OAI收割 6th International Symposium on Precision Engineering Measurements and Instrumentation, August 8, 2010 - August 11, 2010, Hangzhou, China 作者: Jiang H. 收藏 \| 浏览/下载：20/0 \| 提交时间：2013/03/25 A new technique is demonstrated for measurement of modulation transfer function (MTF) on image sensor arrays. Fourier analysis of a low frequency bar target pattern is used to extract MTF at odd harmonics of a target pattern frequency up to and beyond Nyquist. The technique is particularly useful for linear image arrays (either conventional linescan or time-delay-integration devices) where conventional slanted-edge technique is not always applicable. The technique is well suited to simple implementation and can provide live presentation of the MTF curve which helps to ensure optimal alignment conditions are achieved. Detailed analysis of the technique and demonstration of experimental results are presented. 2010 SPIE.
	高功率激光装置光束准直系统新型远场监测技术期刊论文 OAI收割物理学报, 2008, 卷号: 57, 期号: 9, 页码: 5713, 5717 丁莉; 刘代中; 高妍琦; 朱宝强; 朱俭; 彭增云; 朱健强; 俞立钧收藏 \| 浏览/下载：1314/297 \| 提交时间：2009/09/18 laser technique beam alignment grating far-field
	四程放大自动准直系统数学模型研究期刊论文 OAI收割物理学报, 2008, 卷号: 57, 期号: 11, 页码: 6992, 6997 高妍琦; 朱宝强; 刘代中; 彭增云; 林尊琪收藏 \| 浏览/下载：1058/202 \| 提交时间：2009/09/18 laser technique beam alignment four-pass amplifier
	Development of an experimental EUVL system (EI CONFERENCE) 会议论文 OAI收割 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies, AOMATT 2007: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, July 8, 2007 - July 12, 2007, Chengdu, China 作者: Wang L.-P.; Zhang L.-C.; Jin C.-S. 收藏 \| 浏览/下载：17/0 \| 提交时间：2013/03/25 An experimental EUVL system has been developed to investigate EUV imaging system design component fabrication assembly technique and experimental process. The system includes a laser produced plasma (LPP) source an ellipsoidal condenser a transmission mask a reduced projection optics and vacuum system. We designed a 10:1 reduction projection optics using Schwarzschild system with spherical mirrors to achieve 0.1m resolution. The Schwarzschild optics coated with Mo/Si multilayers was assembled with wavefront error (WFE) of 0.014 waves RMS at 632.8nm wavelength under computer-aided alignment method. Using this system a fine pattern of less than 0.25m covering a 0.1mm diameter image field of view was clearly replicated on resist-coated wafer.
	Key techniques of laser direct writing patterns on spherical substrate (EI CONFERENCE) 会议论文 OAI收割 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies, AOMATT 2007: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, July 8, 2007 - July 12, 2007, Chengdu, China 作者: Zhao J.-L.; Feng X.-G. 收藏 \| 浏览/下载：23/0 \| 提交时间：2013/03/25 Comparing with the writing method of plane pattern spherical pattern' has some remarkable different on several points. Firstly it is difficult to spin-coated a uniform photoresist film on a spherical substrate especially the ratio of spherical radius to caliber is smaller and the spin-coated way must match the ratio of spherical radius to caliber. Secondly if the sphere couldn't be regarded as a plane a so-called concentric optical scan movement way must be applied for the generation of spherical pattern because the reflex of substrate will affect the quantity of illumination. Commonly an alignment technique is indispensable with pattern generation of spherical surface by the concentric optical scan in order to ensure the orthogonal intersection of focusing laser beam and writing surface. Thirdly a uniform velocity control must be considered for the laser direct writing method on a spherical substrate. Otherwise the exposure time of photoresist will be different and the line widths of pattern will be also different at different areas. Fourthly commonly because the errors of concentric machine and substrate surface shape are bigger so focusing servo-control technique is also needful for writing a pattern on a spherical substrate. Focusing servo-control may keep the focal spot on the spherical surface by a focus detection and control system in the course of writing pattern. Using these techniques we fabricated a line width of 7m and a period of 600m isometric mesh on the concave of a spherical substrate.
	Study on optical parts of MOEMS optical switch with low insertion loss (EI CONFERENCE) 会议论文 OAI收割 MEMS/MOEMS Technologies and Applications II, November 10, 2004 - November 12, 2004, Beijing, China 作者: Wang W.; Wang L.; Wang L.; Wang L.; Chen W. 收藏 \| 浏览/下载：30/0 \| 提交时间：2013/03/25 We study insertion losses of optical switch when the laser beam is propagating during the free space between two single mode fibers (SMFs) and the related assemblage challenges Then a new packaging structure is developed for the hybrid-integration of free-space MOEMS (micro-opto-electro-mechanical systems) chip with a silicon micromachined submount to improve alignment accuracy. The submount is designed to accommodate various free-space MOEMS chips with minimal active optical alignment thus reducing the packaging cost. The silicon submount has a central recess to place the MOEMS chip in sixteen V-grooves for optical fibers and micropits for micro ball lenses all bulk micromachined at the same time by a single anisotropic wet etching step. A corner compensation technique is employed to prevent erosion of the convex corners where different geometries meet. Through this assembling method the fiber micro ball lens can be aligned preciously thus reduced lateral and angular misalignment between them. Then total insertion losses can be decreased.