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	Quantitative Prediction of the Whole Peeling Process of an Elastic Film on a Rigid Substrate 期刊论文 OAI收割 JOURNAL OF APPLIED MECHANICS-TRANSACTIONS OF THE ASME, 2018, 卷号: 85, 期号: 9, 页码: Ar-91004 作者: Yin HB; Chen SH; Liang LH(梁立红); Peng ZL(彭志龙); Wei YG(魏悦广) \| 收藏 \| 浏览/下载：30/0 \| 提交时间：2018/12/12 film-substrate system interface behavior peeling force cohesive zone model L-J potential
	Cylindrical nano-indentation on metal film/elastic substrate system with discrete dislocation plasticity analysis: A simple model for nano-indentation size effect 期刊论文 OAI收割 INTERNATIONAL JOURNAL OF SOLIDS AND STRUCTURES, 2010, 卷号: 47, 期号: 22-23, 页码: 3103-3114 作者: Ouyang, Chaojun; Li, Zhenhuan; Huang, Minsheng; Fan, Haidong 收藏 \| 浏览/下载：117/0 \| 提交时间：2013/07/05 Film/substrate system Indentation size effect Discrete dislocation plasticity Cylindrical indenter Geometrically necessary dislocation
	Determination Ofinterfacial Mechanical Parameters For An Al/Epoxy/Al2O3 System Byusing Peel Test Simulations 期刊论文 OAI收割 Acta Mechanica Solida Sinica, 2008, 页码: 198-206 作者: You XM(尤雪梅); Zhao HF(赵海峰); Wei YG(魏悦广) 收藏 \| 浏览/下载：662/88 \| 提交时间：2009/08/03 Peel Test Interface Toughness Cohesive Zone Model Energy Release Rate Ductile Thin-Films Cu/Cr/Polyimide System Adhesive Joints Fracture Energy Ceramic Substrate Metal-Film Strength Layer Plasticity Surface
	Automatic spin coater for concave spherical substrate (EI CONFERENCE) 会议论文 OAI收割 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies, AOMATT 2007: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, July 8, 2007 - July 12, 2007, Chengdu, China Fengchao L.; Jingsong G.; Xiaoguo F.; Jingli Z.; Zhijun X.; Jun H.; Fenglin X.; Huiqing W.; Xiaohan L. 收藏 \| 浏览/下载：23/0 \| 提交时间：2013/03/25 Coating photoresist film with uniform thickness on concave spherical substrate (CSS) is very important for microfabrication of concave spherical optical elements by lithography technique via a laser direct writer for the uneven photoresist film will result in ununiformity of line width so as to influence the characters of optical elements. For improving the uniformity of photoresist film coating on CSS an automatic spin coater was designed. The process and the mathematical model of spin coating for CSS were analyzed. Difficulties for realizing the spin coater consist of the control of multi-axis motion precisely and collaboratively valves on/ff properly and real-timely. A flexible and well-behaved spinning motion system was achieved by tmeans of principal and subordinate CPUs control. The motion program for spin coating could be created and implemented automatically while the pressure and the valves were was watched and controlled in real time. Film coating and laser direct writing experiments on a CSS with aperture equals to 100 mm and radius equals to 370 mm were performed. Photoresist film with uniform thickness on CSS was obtained by selecting proper spin coating parameters such as rotational speed acceleration and viscosity of the photoresist. After development the section analysis by the atomic force microscope showed that photoresist film thickness was about 517 nm in the center and about 520 nm in the edge of substrate the film thickness error was within 1% and the line width was about 6.0 m with steep sides parallel each other. Experimental results indicate that uniform thickness of thin photoresist film has been coated on CSS by the spin coater which contributes to quality improvement of laser direct writing lines on CSS.
	Key techniques of laser direct writing patterns on spherical substrate (EI CONFERENCE) 会议论文 OAI收割 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies, AOMATT 2007: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, July 8, 2007 - July 12, 2007, Chengdu, China 作者: Zhao J.-L.; Feng X.-G. 收藏 \| 浏览/下载：23/0 \| 提交时间：2013/03/25 Comparing with the writing method of plane pattern spherical pattern' has some remarkable different on several points. Firstly it is difficult to spin-coated a uniform photoresist film on a spherical substrate especially the ratio of spherical radius to caliber is smaller and the spin-coated way must match the ratio of spherical radius to caliber. Secondly if the sphere couldn't be regarded as a plane a so-called concentric optical scan movement way must be applied for the generation of spherical pattern because the reflex of substrate will affect the quantity of illumination. Commonly an alignment technique is indispensable with pattern generation of spherical surface by the concentric optical scan in order to ensure the orthogonal intersection of focusing laser beam and writing surface. Thirdly a uniform velocity control must be considered for the laser direct writing method on a spherical substrate. Otherwise the exposure time of photoresist will be different and the line widths of pattern will be also different at different areas. Fourthly commonly because the errors of concentric machine and substrate surface shape are bigger so focusing servo-control technique is also needful for writing a pattern on a spherical substrate. Focusing servo-control may keep the focal spot on the spherical surface by a focus detection and control system in the course of writing pattern. Using these techniques we fabricated a line width of 7m and a period of 600m isometric mesh on the concave of a spherical substrate.
	Small scale, grain size and substrate effects in nano-indentation experiment of film-substrate systems 期刊论文 OAI收割 International Journal of Solids and Structures, 2007, 卷号: 44, 期号: 13, 页码: 4492-4504 作者: Chen SH(陈少华); Liu L(刘磊); Wang ZQ(王自强) 收藏 \| 浏览/下载：967/46 \| 提交时间：2009/08/03 Nano-Indentation Hardness Film-Substrate System Classical Plasticity Theory Strain Gradient Plasticity Theory Indenter Tip Curvature Fem Strain Gradient Plasticity Depth-Sensing Indentation Indenter Tip Radius Thin-Films Length Scale Mechanical-Properties Conventional Theory Deformation-Theory Matrix Composites Single-Crystals
	Study on the fabrication of blazed grating with sub-micrometer space on aluminum film (EI CONFERENCE) 会议论文 OAI收割 12th International Manufacturing Conference in China, IMCC2006, September 21, 2006 - September 23, 2006, Xi'an, China Lun S.; Hao D.; Qi X. 收藏 \| 浏览/下载：14/0 \| 提交时间：2013/03/25 The saw tooth grooves of blazed grating ruled by ruling engine are formed by diamond tool which presses on the aluminum film evaporated on the substrate of optical glass or metal. The real shape of ruled saw tooth groove is different from that of the ideal groove and the ruling process indicates that there are the zero order planes similar to the flat tops on the grating grooves. The results of Fourier analysis for the real ruled grating featuring the zero order plane structure shows that the flat top width is an important factor for grating efficiency. Additionally bigger pressure value loaded on the diamond tool and bigger lateral pressure value on the aluminum film will be benefit to the improvement of grating diffraction efficiency. Based on the grating interferometer the high precision positioning control system of ruling engine guarantees the accuracy of the grooves space. High density blazed grating whose space is 0.83p.m is manufactured and its' grooves spaces are very equidistant and uniform under the view field of AFM. And the infrared blazed grating whose diffraction efficiency in the first order is up to 97 percent is ruled successfully also.
	Multiscale analysis for interfacial fractures of ductile thin film/ceramic substrate systems 会议论文 OAI收割 11th International Conference on Fracture 2005, ICF11, Turin, Italy, March 20, 2005 - March 25, 2005 作者: Wei YG(魏悦广); Zhao HF; Shu SQ 收藏 \| 浏览/下载：16/0 \| 提交时间：2017/06/01 Cohesive zones Copper thin film Different scale Elastic-Plastic FE analysis Interfacial fracture Material parameter Multi scale analysis Prediction and analysis Size effects Substrate system Thin film delamination
	Nanoindentation of thin-film-substrate system: Determination of film hardness and Young's modulus 期刊论文 OAI收割 Acta Mechanica Sinica, 2004, 卷号: 20, 期号: 4, 页码: 383-392 作者: Chen SH(陈少华); Liu L(刘磊); Wang ZQ(王自强) 收藏 \| 浏览/下载：1087/23 \| 提交时间：2009/08/03 Nanoindentation Hardness Young'S Modulus Film-Substrate System Wear-Resistant Coatings Mechanical-Properties Indentation Experiments